An x-ray inspection apparatus may comprise an x-ray source, an x-ray detector, and a drive assembly. The drive assembly may be configured to lift a part carrier such that the part carrier is disengaged from a feed assembly and an object mounted on the part carrier is positioned between the x-ray source and the x-ray detector. The feed assembly may be configured to feed part carriers into and out of the x-ray inspection apparatus. The drive assembly may be further configured to subsequently lower the part carrier such that the part carrier is reengaged with the feed assembly.

A beamstop arrangement for an x-ray-optical system is adjustable in an xy plane perpendicular to a z-direction for optimizing a ratio of useful radiation reaching a surface to interfering radiation of an x-ray beam in the z-direction. The beamstop arrangement comprises a plurality of beamstops of differing size and/or geometry arranged on an exchanging mount, which is installed on a carriage displaceable in the xy plane by means of a drive unit having at least one positioning motor. The multiple beamstops can be located in a vacuum, while the drive motors and all electronic components can be positioned outside the vacuum, so that no heat development takes place in the measurement region. Corruption of the measurement result due to a changed measurement background is thus avoided.

An x-ray inspection apparatus may comprise an x-ray source, an x-ray detector, and a drive assembly. The drive assembly may be configured to lift a part carrier such that the part carrier is disengaged from a feed assembly and an object mounted on the part carrier is positioned between the x-ray source and the x-ray detector. The feed assembly may be configured to feed part carriers into and out of the x-ray inspection apparatus. The drive assembly may be further configured to subsequently lower the part carrier such that the part carrier is reengaged with the feed assembly.

A core analysis system having a trailer and an analysis assembly secured to the trailer. The analysis assembly includes an X-ray Fluorescence (XRF) detection subassembly defining a sample analysis area. The analysis assembly further includes a conveyor subassembly configured to selectively deliver one or more core samples to the sample analysis area of the XRF detection subassembly.

A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.

A test device for the irradiation of products which are fed into a housing along at least two tracks. At least one separate sensor is provided for each track in order to separately monitor the arrival at a target position selected individually for each track preferably within the housing of the test device.

An X-ray system includes a multiple degree of freedom robotic arm mounted to a surface of a radiology suite, the robotic arm having one or more telescoping arm members, an X-ray source mounted on an end effector of the multiple degree of freedom robotic arm, at least one X-ray detector, and a work station coupled to the robotic arm, X-ray source, and X-ray detector, wherein the work station is configured to compute robotic arm trajectories for at least one scanning procedure and to control the robotic arm, X-ray source, and X-ray detector to effect the at least one scanning procedure.

Provided are CT scanning systems and architectures that utilize a unique approach to scanning large objects. Various embodiments of the architecture incorporate a scanning platform and a turntable. The scanning platform may be mounted horizontally. The vertical offset between the scanning platform and the turntable may be changed during a scan. A pallet or other object can be moved into a scanning area under the scanning platform. Both the vertical offset between the scanning platform and the turntable may be changed and the turntable may be rotated during a scan. Scan data may be used to generate a three dimensional image. Additional objects can be quickly positioned (once the vertical offset is adjusted) for subsequent scans allowing for greater throughput than conventional approaches.

A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.