An electron beam accelerated using a first acceleration voltage is applied to respective positions on a sample to obtain spectra A at the respective positions, and an electron beam accelerated using a second acceleration voltage different from the first acceleration voltage is applied to the respective positions on the sample to obtain spectra B at the respective positions. Then, a spectral ratio A/B of the spectra is calculated at each of the positions to generate a waveform representing the spectral ratio A/B. The value of a spectral ratio A/B in an energy region of interest is extracted from each of the waveforms. The extracted values are mapped onto points corresponding to the respective positions on the sample, whereby a spectral map is generated. The spectral map is displayed.

Methods and devices are disclosed for the imaging of a biological sample from all rotational perspectives in three-dimensional space and with multiple imaging modalities. A biological sample is positioned on an imaging stage that is capable of full 360-degree rotation in at least one of two orthogonal axes. Positioned about the stage are imaging modules enabling the recording of a series of images in multiple modalities, including reflected visible light, fluorescence, X-ray, ultrasound, and optical coherence tomography. A computer can use the images to construct three-dimensional models of the sample and to render images of the sample conveying information from one or more imaging channels. The rendered images can be displayed for an operator who can manipulate the images to present additional information or viewing angles of the sample. The image manipulation can be with touch gestures entered using a sterilizable or disposable touch pen.

A radiation image obtained by imaging a test object irradiated with radiation is acquired. A standard image which is a normal radiation image of the test object imaged under the same imaging condition as in the acquired radiation image is stored in a standard image storage unit. Differential values of pixel values between corresponding pixels of the radiation image acquired by the radiation image acquisition unit and the standard image stored in the standard image storage unit are detected. A differential region between the radiation image and the standard image so that positive and negative of the differential values in the differential region can be determined on the basis of a detection result of the differential value detection unit is displayed on a display unit.

An X-ray imaging system includes the following. An X-ray Talbot imaging apparatus includes an X-ray source, a plurality of gratings, and an X-ray detector. An X-ray is irradiated from the X-ray source through the examined target which is an object and the plurality of gratings and to the X-ray detector to obtain a moire image necessary to generate the reconstructed image of the examined target. A first database shows, for each name or type of material, a correlation between information regarding a signal strength in the reconstructed image generated based on the moire image and quality information of the material included in the examined target. A controller estimates as the evaluation index the quality information in the examined target from the reconstructed image based on information regarding the input name or the type of material and input shape information and the first database.

A system for quantifying x-ray backscatter system performance may include a support; a plurality of rods mounted on the support; the rods of the plurality of rods arranged parallel to each other, having generally curved outer surfaces, and being arranged in groups of varying widths, each group of the groups having at least two of the rods of a same width; and a user interface configured to be connected to receive a backscatter signal from an x-ray backscatter detector associated with an x-ray tube, apply a transfer function to generate a transfer curve representing x-ray backscatter for each rod of the plurality of rods from x-rays transmitted by the x-ray tube.

Provided are operation guide system for X-ray analysis to enable users to easily understand measurement of X-ray optical system to be selected. The operation guide system includes: measurement information acquisition unit for acquiring information on a sample and each X-ray measurement optical system part; sample magnification acquisition unit for acquiring magnification for display; incident X-ray shape deformation unit for determining distorted shape of an incident X-ray obtained by magnifying shape of the incident X-ray based on the magnification in a plane perpendicular to an optical axis direction; scattered X-ray shape deformation unit for determining distorted shape of a scattered X-ray obtained by magnifying shape of the scattered X-ray based on the magnification in the plane; and X-ray measurement optical system modeling unit for modeling a deformed shape of the sample, the distorted shape of the incident X-ray, and the distorted shape of the scattered X-ray.

Techniques for adapting an adaptive specimen image acquisition system using an artificial neural network (ANN) are disclosed. An adaptive specimen image acquisition system is configurable to scan a specimen to produce images of varying qualities. An adaptive specimen image acquisition system first scans a specimen to produce a low-quality image. An ANN identifies objects of interest within the specimen image. A scan mask indicates regions of the image corresponding to the objects of interest. The adaptive specimen image acquisition system scans only the regions of the image corresponding to the objects of interest, as indicated by the scan mask, to produce a high-quality image. The low-quality image and the high-quality image are merged in a final image. The final image shows the objects of interest at a higher quality, and the rest of the specimen at a lower quality.

A method including inspecting, using an X-ray transmission image, internal defects in a TSV formed in a semiconductor wafer, and detecting the X-rays, and processing an X-ray transmission image. Therein, the detection of X-rays is configured such that: the detection azimuth of the X-rays, and the detection elevation angle of the X-rays relative to the X-ray source are determined on the basis of information on the arrangement interval, depth, and planar shape of structures formed in the sample. The angle of rotation of a rotating stage on which the sample is mounted is adjusted in accordance with the detection azimuth which has been determined, and the X-rays that have been transmitted through the sample are detected with the position of the detector set to the detection elevation angle which has been determined.

In an approach to X-ray inspection image display systems, a colorized X-ray inspection image is received comprising a monochrome X-ray inspection image that is colorized in accordance with an X-ray inspection system false colorization scheme. The colorized X-ray inspection image is filtered by performing pixel shading on the colorized X-ray inspection image to generate a custom colorized X-ray inspection image having a custom false colorization scheme that is different from the X-ray inspection system false colorization scheme.

The present disclosure relates to a multi-spectrum X-ray grating-based imaging system and imaging method. In one illustrative implementation, an exemplary multi-spectrum X-ray grating-based imaging system according to the present disclosure may comprise an incoherent X-ray source for emitting X-rays to irradiate an object to be detected, a grating module comprising a first absorption grating and a second absorption grating which are disposed in parallel to each other and are sequentially arranged in an X-ray propagation direction, and an energy-resolved detecting device for receiving the X-rays that have passed through the first absorption grating and the second absorption grating.