An x-ray screening system includes a plurality of x-ray screening devices each for scanning at least one object of interest. Each screening device emits x-rays which pass through the object of interest and which are detected by a group of detectors including at least one detector to provide measured x-ray energy signals. At least one central processor is in data communication with each screening device for receiving the measured x-ray energy signals from each screening device automatically and in real-time. The at least one processor automatically analyzes the measured x-ray energy signals in real-time to determine at least one property of the object of interest and determining whether the at least one property indicates that at least a portion of the object of interest is composed of a material of interest. The material of interest may be a potentially dangerous material.

According to one aspect of the present invention, a pattern inspection apparatus includes an inspected image acquisition mechanism configured to acquire an inspected image of a figure pattern formed on an inspection target object, using an electron beam; a reference image generation processing circuit configured to generate a reference image corresponding to the inspected image; a contour data generation processing circuit configured to generate contour data defining a contour line of the figure pattern; a comparison processing circuit configured to compare the inspected image and the reference image and determine whether there is a defect based on a result of a comparison; and a defect selection processing circuit configured to select a defect within a range preset based on the contour line as a valid defect, from at least one defect determined to be a defect by the comparison, using the contour data.

An object is to provide a measurement device using X-ray reflection that can reduce space required for measurement, simplify the setting procedure, and improve measurement accuracy. The measurement device using X-ray reflection includes an X-ray tube 1 configured to emit an X-ray beam, a detector 7 configured to detect a reflected beam of the X-ray beam, a rotational driving unit configured to rotate the X-ray tube 1 and the detector 7, a calibration plate 22 configured to reflect the X-ray beam emitted from the X-ray tube 1 toward the detector 7, and a control unit configured to perform a predetermined computation. The control unit controls the rotational driving unit to direct the X-ray tube 1 and the detector 7 toward a measurement object 21, causes the detector 7 to detect a reflected beam of an X-ray beam emitted from the X-ray tube 1 toward the measurement object 21, directs the X-ray tube 1 and the detector 7 toward the calibration plate 22, causes the detector 7 to detect a reflected beam of an X-ray beam emitted from the X-ray tube 1 toward the calibration plate 22, and determines a measurement value on the measurement object 21 by a computation using a signal representing the reflected beam from the measurement object 21 and a signal representing the reflected beam from the calibration plate 22.

A system configured to detect defects in a first oxygen sensor is disclosed. The system includes an X-ray imaging device configured to capture a production X-ray image of the first oxygen sensor and an electronic processor configured to use a trained oxygen sensor defect detection model to identify a defect of the first oxygen sensor by producing a pseudo X-ray image by simulating a projection of a fan beam through CT data of a second oxygen sensor. The electronic processor is also configured to measure, via the trained oxygen sensor defect detection model, a fan-beam distortion in the production X-ray image; select, via the trained oxygen sensor defect detection model, the pseudo X-ray image based on the fan-beam distortion; perform a comparison, via the trained oxygen sensor defect detection model, of the production X-ray image to the pseudo X-ray image; and, classify, based on the comparison, the production X-ray image as representing an improperly assembled oxygen sensor.

In a method of detecting a defect, a region of a substrate may be primarily scanned using a first electron beam to detect a first defect. A remaining region of the substrate, which may be defined by excluding a portion in which the first defect may be positioned from the region of the substrate, may be secondarily scanned using a second electron beam to detect a second defect. Thus, the portion with the defect may not be scanned in a following scan process so that a scanning time may be remarkably decreased.

An electron beam inspection apparatus according to one aspect of the present invention includes an image acquisition mechanism to acquire a secondary electron image by scanning a substrate, on which a figure pattern is formed, with an electron beam, and detecting a secondary electron emitted due to irradiation with the electron beam by the scanning, a resize processing unit to perform, using design pattern data being a basis of the figure pattern, resize processing on the figure pattern to enlarge its size in a scan direction of the electron beam, a first developed image generation unit to generate, using the design pattern data which has not been resized, a first developed image by developing an image of a design pattern of a region corresponding to the secondary electron image, a second developed image generation unit to generate, using partial patterns enlarged by the resize processing in the figure pattern having been resized, a second developed image by developing an image of partial patterns in a region corresponding to the secondary electron image, a map generation unit to generate a pseudo defect candidate pixel map which can identify a pseudo defect candidate pixel that has no pattern in the first developed image and has a pattern in the second developed image, a reference image generation unit to generate a reference image of the region corresponding to the second electron image, and a comparison unit to compare, using the pseudo defect candidate pixel map, the second electron image with the reference image of the region corresponding to the second electron image.

Concepts for generating a dark X-ray (DAX) model adapted to represent relations between a DAX signal, a respiratory state, and a respiratory disease grade, as well as concepts for using the DAX model are proposed. In particular, as relations between these variables are modelled, the difference between a DAX signal of a subject at a respiratory state, compared to a DAX signal of a subject at a reference respiratory state may be assessed. Thus, the diagnostic accuracy of DAX imaging may be improved.

A charged particle beam inspection apparatus includes a first deflector to deflect NN multiple beams collectively to NN small regions having a size p/M in the first direction and arrayed at the pitch p in the first direction, perform tracking deflection, and re-deflect the multiple beams collectively to next NN small regions away from the NN small regions by N small regions in the first direction, by the stage completes a movement of a distance of N/Mp so as to reset the tracking deflection; and a second deflector to deflect the multiple beams collectively to scan the NN small regions concerned while the tracking deflection is performed.

The present disclosure relates to an X-ray measuring method and an X-ray measuring device for measuring a strand.

A method of characterizing a part including obtaining an X-ray tomography image of the part and then a step of correlating the image with a reference wherein the correlation step includes searching among a predefined set of X-ray tomography image transformations for a transformation that minimizes the difference between the image and the reference in order to characterize the inside of the part.