A method of inspecting a component using computed tomography is described, the method comprising the steps of: (a) providing a computed tomography (CT) scanner; (b) providing a target component; (c) reviewing the geometry of the component; (d) estimating the best component orientation; (e) orienting the component; (f) scanning the component with the CT scanner; (g) loading CT scan data into 3D image software; (h) registering the best CT scan data; (i) determining acceptable and unacceptable regions of CT scan data; (j) determining additional component orientations; (k) repeating steps (e) through (i) until all regions of CT scan data for the component are acceptable; and (l) creating a merged volume of acceptable CT scan data.

System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

In one embodiment, a computing system may obtain a high-resolution X-ray image and a number of low-resolution X-ray images of an object of interest. The system may divide each of the low-resolution X-ray images into a number of low-resolution patches. Each low-resolution patch may be associated with a portion of the object of interest. The system may input a set of low-resolution patches associated with a same portion of the object of interest into a machine-learning model. Each low-resolution patch of the set may be from a different low-resolution X-ray image. The machine-learning model may output a high-resolution patch for the same portion of the object of interest. The system may compare the high-resolution patch outputted by the machine-learning model to a corresponding portion of the high-resolution X-ray image of the object of interest and adjust one or more parameters of the machine-learning model based on the comparison.

An object of the invention is to easily acquire images of a position corresponding among a plurality of sample sections in an imaging device that acquires images of the plurality of sample sections. The imaging device according to the invention generates a cursor for specifying a first observation region and a contour portion of a first sample section, and superimposes the cursor on a contour portion of a second sample section so as to calculate coordinates of a second observation region of the second sample section.

A system and method for determining the strength of a bond joining a composite structure is provided. The system includes a gas gun produces a short gas pulse directed normal to a surface of the composite structure and that creates a compression wave through the composite structure; a monochromatic x-ray system produces a monochromatic x-ray that is incident at an angle to the surface and that passes through the composite structure; a scintillator screen receives transmitted x-rays that pass through the composite structure; a mirror receives and magnifies radiation emitted from the scintillator screen; a detector receives the radiation from the scintillator screen; an electronic processor configured to process the radiation detected by the detector; and a synchronization controller configured to synchronize operation of the gas gun, the monochromatic x-ray system, and the detector.

A calculating unit for calculating a recording trajectory of a CT system has a receive interface, an optimizer and a control unit. The receive interface serves for receiving measurement and simulation data relative to the object to be recorded. The optimizer is configured to determine the recording trajectory based on known degrees of freedom of the CT system, based on the measurement and simulation data and based on a test task from a group having a plurality of test tasks. The control unit is configured to output data in correspondence with the recording trajectory for controlling the CT system.

The disclosure relates to a method of examining a sample using a charged particle microscope. The method comprises the steps of detecting using a first detector emissions of a first type from the sample in response to the beam scanned over the area of the sample. Then, using spectral information of detected emissions of the first type, at least a part of the scanned area of the sample is divided into multiple segments. According to the disclosure, emissions of the first type at different positions along the scan in at least one of said multiple segments may be combined to produce a combined spectrum of the sample in said one of said multiple segments. In an embodiment, a second detector is used to detect emissions of a second type, and this is used to divide the area of the sample into multiple regions. The first detector may be an EDS, and the second detector may be based on EM. This way, EDS data and EM data can be effectively combined for producing colored images.

A system and method for determining the strength of a bond joining a composite structure is provided. The system includes a gas gun produces a short gas pulse directed normal to a surface of the composite structure and that creates a compression wave through the composite structure; a monochromatic x-ray system produces a monochromatic x-ray that is incident at an angle to the surface and that passes through the composite structure; a scintillator screen receives transmitted x-rays that pass through the composite structure; a mirror receives and magnifies radiation emitted from the scintillator screen; a detector receives the radiation from the scintillator screen; an electronic processor configured to process the radiation detected by the detector; and a synchronization controller configured to synchronize operation of the gas gun, the monochromatic x-ray system, and the detector.

Various embodiments are described herein for a system and method of integrated X-ray imaging and microscopic imaging of an imaging area having a sample on a sample stage. An X-ray apparatus may be disposed within the imaging area and be configured to acquire X-ray image data of at least a portion of the sample. A microscopic imaging apparatus may be disposed within the imaging area and be configured to acquire microscopic image data of the at least a portion of the sample. In some embodiments, a processing unit may then control the X-ray apparatus to acquire X-ray image data of the at least the portion of the sample, and generate one or more corresponding X-ray images; determine a region of interest (ROI) of the sample based on the one or more X-ray images; and control the microscopic imaging apparatus to obtain at least one microscopic image based on the ROI.

The presently-disclosed technology improves the resolution of an x-ray microscope so as to obtain super-resolution x-ray images having resolutions beyond the maximum normal resolution of the x-ray microscope. Furthermore, the disclosed technology provides for the rapid generation of the super-resolution x-ray images and so enables real-time super-resolution x-ray imaging for purposes of defect detection, for example. A method of super-resolution x-ray imaging using a super-resolving patch classifier is provided. In addition, a method of training the super-resolving patch classifier is disclosed. Other embodiments, aspects and features are also disclosed.