Patent classifications
G01N2223/645
Utensil for evaluating length measurement error in X-ray CT device for three-dimensional shape measurement
In order to sufficiently capture spatial distortion specific to an X-ray CT device and evaluate the three-dimensional shape measurement accuracy of the X-ray CT device, in a utensil, by attaching support rods fixing spheres to the tip thereof and having different lengths to a base spheres are arranged in an XYZ space on the base. On a flat surface on the top of the base, the support rods supporting the spheres and having different lengths are arranged at predetermined intervals. In doing so, the spheres are arranged in the XYZ space respectively at appropriate inter-sphere distances.
SYSTEM AND METHOD USING X-RAYS FOR DEPTH-RESOLVING METROLOGY AND ANALYSIS
A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.
In-Situ 3D printing and Non-Destructive Testing with Computer Tomography Using X-ray Flexible Detector
A method of in-situ 3D printing and Non-Destructive Testing (NDT) with Computer Tomography (CT) using X-ray flexible detector is presented. An apparatus of in-situ 3D printing and NDT using CT with X-ray flexible detector comprises a 3D printer, an X-ray source, X-ray flexible detector, data acquisition system, CT reconstruction software, CT visualization software, motion control system and a computer. Either platform of 3D build object or X-ray source, X-ray flexible detector can be on a rotation and translational stage. The apparatus with the method can automatically stop current 3D printing build, replace older part and start a new object build process based on real time CT data analysis.
Nanoscale X-ray tomosynthesis for rapid analysis of integrated circuit (IC) dies
System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.
X-ray imaging system
An X-ray imaging system includes the following. An X-ray Talbot imaging apparatus includes an X-ray source, a plurality of gratings, and an X-ray detector. An X-ray is irradiated from the X-ray source through the examined target which is an object and the plurality of gratings and to the X-ray detector to obtain a moire image necessary to generate the reconstructed image of the examined target. A first database shows, for each name or type of material, a correlation between information regarding a signal strength in the reconstructed image generated based on the moire image and quality information of the material included in the examined target. A controller estimates as the evaluation index the quality information in the examined target from the reconstructed image based on information regarding the input name or the type of material and input shape information and the first database.
Methods and systems for inclusion analysis
Various methods and systems are provided for analyzing sample inclusions. As one example, a correction factor may be generated based on inclusion properties of a first sample determined using both an optical emission spectrometry (OES) system and a charged-particle microscopy with energy dispersive X-ray spectroscopy (CPM/EDX) system. The OES system may be calibrated with the correction factor. The inclusion properties of a second, different, sample may be determined using the calibrated OES system.
Test apparatus for x-ray inspection
A test apparatus for challenging contaminant monitoring apparatus. The test apparatus includes contaminant provisions having a pre-selected property including any one or more of the group including composition, material, mass, size and/or shape of a contaminant. The test apparatus also includes identification provisions for identifying the presence of the contaminant provisions and/or for identifying the identity of the test apparatus. The contaminant provisions and the identification provisions are detectable and/or discriminateable by X-rays.
UTENSIL FOR EVALUATING LENGTH MEASUREMENT ERROR IN X-RAY CT DEVICE FOR THREE-DIMENSIONAL SHAPE MEASUREMENT
In order to sufficiently capture spatial distortion specific to an X-ray CT device and evaluate the three-dimensional shape measurement accuracy of the X-ray CT device, in a utensil, by attaching support rods fixing spheres to the tip thereof and having different lengths to a base spheres are arranged in an XYZ space on the base. On a flat surface on the top of the base, the support rods supporting the spheres and having different lengths are arranged at predetermined intervals. In doing so, the spheres are arranged in the XYZ space respectively at appropriate inter-sphere distances.
FABRIC DETECTING AND RECORDING METHOD AND APPARATUS
The present disclosure discloses a fabric detecting and recording method and apparatus. The method includes: acquiring a fabric identification of a fabric to be detected; acquiring an image data of a current detecting part of the fabric to be detected; detecting defects on the image data, if there is a defect on the detecting part included in the image data, a detection data corresponding to the detecting part will be generated; packaging the fabric identification and the detection data into a detection data packet, and sending the packet into the blockchain network for broadcasting. The blockchain technology is used in the solution of the embodiments of the present disclosure to broadcast the fabric detection data in real time through the blockchain network, without any manual uploading operation, thus to reduce the risk of data being tampered with during the uploading stage.
ITEM INSPECTION BY DYNAMIC SELECTION OF PROJECTION ANGLE
A method, system, use, and computer program product for inspection of an item are disclosed. The method (1) comprises acquiring (2) a projection image of the item using a radiation imaging system and obtaining (3) a plurality of simulated projection images of the item or a component thereof, based on a simulation of a numerical three-dimensional model, in which at least one geometric parameter relating to the relative orientation between the simulated item, a simulated radiation source, and a simulated detection plane varies over the plurality of simulated images. The method comprises determining (4) a relative orientation of the item with respect to the imaging system, said determining of the relative orientation comprises comparing (9) the projection image to the plurality of simulated images. The method comprises determining (5) at least one angle of rotation taking a viewing angle and the relative orientation into account, moving (6) the item and/or the imaging system in accordance with the at least one angle of rotation and acquiring (7) a further projection image of the item, after moving the item, such that the further projection image corresponds to a view of the item from the viewing angle.