Patent classifications
G
PHYSICS
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G01
MEASURING; TESTING
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G01Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
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30/00
Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
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G01Q30/02
Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
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G01Q30/025
Optical microscopes coupled with SPM
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