G01Q60/12

Frequency comb feedback control for scanning probe microscopy
10401383 · 2019-09-03 ·

In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with resistive samples. Optionally, no DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

Method of carrier profiling in semiconductors
10401382 · 2019-09-03 ·

The superimposition of a periodic potential wave to the tip movement control or the bias supply of an STM, in which a microwave frequency comb is generated in its tunneling junction, may be used to reduce or eliminate artifacts or other noise generated from outside the tunneling junction.

Method of carrier profiling in semiconductors
10401382 · 2019-09-03 ·

The superimposition of a periodic potential wave to the tip movement control or the bias supply of an STM, in which a microwave frequency comb is generated in its tunneling junction, may be used to reduce or eliminate artifacts or other noise generated from outside the tunneling junction.

Quantum molecular sequencing (QM-SEQ): identification of unique nanoelectronic tunneling spectroscopy fingerprints for DNA, RNA, and single nucleotide modifications

Techniques, methods, devices, and compositions are disclosed that are useful in identifying and sequencing natural and synthetic, and modified and unmodified DNA, RNA, PNA, DNA/RNA nucleotides. The disclosed techniques, methods, devices, and compositions are useful in identifying various modifications, DNA/RNA damage, and nucleotide structure, using nanoelectronic quantum tunneling spectroscopy, which may be referred to as QM-Seq. The methods and compositions can include the use of a charged, smooth substrate for deposition of single stranded nucleotides and polynucleotide macromolecules, scanning the modified or unmodified DNA/RNA/PNA, comparing the electronic signatures of an unknown nucleobase against a database of electronic fingerprints of known nucleobases, including natural and synthetic, modified and unmodified nucleobases, and secondary/tertiary structure, obtained under the same or similar conditions, for example where the nucleobase is in an acidic environment.

Quantum molecular sequencing (QM-SEQ): identification of unique nanoelectronic tunneling spectroscopy fingerprints for DNA, RNA, and single nucleotide modifications

Techniques, methods, devices, and compositions are disclosed that are useful in identifying and sequencing natural and synthetic, and modified and unmodified DNA, RNA, PNA, DNA/RNA nucleotides. The disclosed techniques, methods, devices, and compositions are useful in identifying various modifications, DNA/RNA damage, and nucleotide structure, using nanoelectronic quantum tunneling spectroscopy, which may be referred to as QM-Seq. The methods and compositions can include the use of a charged, smooth substrate for deposition of single stranded nucleotides and polynucleotide macromolecules, scanning the modified or unmodified DNA/RNA/PNA, comparing the electronic signatures of an unknown nucleobase against a database of electronic fingerprints of known nucleobases, including natural and synthetic, modified and unmodified nucleobases, and secondary/tertiary structure, obtained under the same or similar conditions, for example where the nucleobase is in an acidic environment.

Frequency Comb Feedback Control for Scanning Probe Microscopy
20180364278 · 2018-12-20 ·

In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with resistive samples. Optionally, no DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

Frequency Comb Feedback Control for Scanning Probe Microscopy
20180364278 · 2018-12-20 ·

In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with resistive samples. Optionally, no DC bias is required to use the method. Utilization of this method contributes to true sub-nanometer resolution of images of carrier distribution in resistive samples such as semi-conductors.

A METHOD OF EXAMINING A SAMPLE IN A SCANNING TUNNELING MICROSCOPE USING TIP-TO-TIP SAMPLE DISTANCE VARIATIONS

A method of examining a sample (1) in a microscope equipped with at least one scanning tunneling tip (4), wherein tunneling current TC can be detected and wherein relative tip-to-sample planar coordinates xrel=xtip?xsample and yrel=ytip?ysample are differences between corresponding tip and sample coordinates, wherein the following steps are performed above at least two surface points of the sample (1): placing the tip (4) successively above said surface points of the sample (1); above each of said surface points of the sample, performing a distance varying step (33) comprising varying the tip-to-sample distance D, and performing a time dependencies recording step (35), comprising recording time dependencies TC(t), xrel(t), yrel(t), D(t). Based on these time dependencies, four maps can be created from a single measurement: constant current map, constant height map, Local Density of States Topography map and potential barrier map.

Method of carrier profiling in semiconductors
20180275164 · 2018-09-27 ·

The superimposition of a periodic potential wave to the tip movement control or the bias supply of an STM, in which a microwave frequency comb is generated in its tunneling junction, may be used to reduce or eliminate artifacts or other noise generated from outside the tunneling junction.

Method of carrier profiling in semiconductors
20180275164 · 2018-09-27 ·

The superimposition of a periodic potential wave to the tip movement control or the bias supply of an STM, in which a microwave frequency comb is generated in its tunneling junction, may be used to reduce or eliminate artifacts or other noise generated from outside the tunneling junction.