A non-invasive method of detecting electrical activity in a target volume. The method can comprise aiming a plurality of antennas at one or more target sub-volumes within a target volume and acquiring the radio signal created when an electrical discharge occurs. The method can then comprise processing the radio signals to determine the electrical activity within the target volume and displaying the electrical activity in the target volume.

A non-invasive method of detecting electrical activity in a target volume. The method can comprise aiming a plurality of antennas at one or more target sub-volumes within a target volume and acquiring the radio signal created when an electrical discharge occurs. The method can then comprise processing the radio signals to determine the electrical activity within the target volume and displaying the electrical activity in the target volume.

A system and method for detecting the connectivity of an absence of voltage detector to the source of power to be detected has a first terminal wire connected to a first terminal and a second terminal wire also connected to the first terminal. An RF signal is placed on the first terminal and then its presence is detected on the second signal wire. This method and system can also be placed on each phase of a three phase system.

A system and method for detecting the connectivity of an absence of voltage detector to the source of power to be detected has a first terminal wire connected to a first terminal and a second terminal wire also connected to the first terminal. An RF signal is placed on the first terminal and then its presence is detected on the second signal wire. This method and system can also be placed on each phase of a three phase system.

A voltage sensor for a substrate processing system is provided. The voltage sensor includes a terminal, a first channel, and a second channel. The terminal connects to a pickup device of a substrate support in the substrate processing system. The first channel is configured to detect, at the pickup device, first radio frequency voltages in a first voltage range. The first channel includes a first voltage divider. The first voltage divider is connected to the terminal and is configured to output a first reduced voltage representative of a detected one of the first radio frequency voltages. The second channel is configured to detect, at the pickup device, second radio frequency voltages in a second voltage range. The second channel includes a second voltage divider. The second voltage divider is connected to the terminal and is configured to output a second reduced voltage representative of a detected one of the second radio frequency voltages. The second voltage range is different than the first voltage range.

A voltage sensor for a substrate processing system is provided. The voltage sensor includes a terminal, a first channel, and a second channel. The terminal connects to a pickup device of a substrate support in the substrate processing system. The first channel is configured to detect, at the pickup device, first radio frequency voltages in a first voltage range. The first channel includes a first voltage divider. The first voltage divider is connected to the terminal and is configured to output a first reduced voltage representative of a detected one of the first radio frequency voltages. The second channel is configured to detect, at the pickup device, second radio frequency voltages in a second voltage range. The second channel includes a second voltage divider. The second voltage divider is connected to the terminal and is configured to output a second reduced voltage representative of a detected one of the second radio frequency voltages. The second voltage range is different than the first voltage range.

A galvanically isolated voltage sensor is provided which includes a mechanically integral piezoelectric transformer assembly coupled to a modulation circuit. The modulation circuit receives a source voltage signal to be measured and modulates that signal at a frequency equal to a resonance frequency of the transformer assembly and transmits the modulated to signal to the transformer assembly. The transformer assembly generates an output signal that is identical to the modulated signal subject to the transformer gain. The output signal is then demodulated and filtered so as to recreate the source voltage signal for analysis.

A galvanically isolated voltage sensor is provided which includes a mechanically integral piezoelectric transformer assembly coupled to a modulation circuit. The modulation circuit receives a source voltage signal to be measured and modulates that signal at a frequency equal to a resonance frequency of the transformer assembly and transmits the modulated to signal to the transformer assembly. The transformer assembly generates an output signal that is identical to the modulated signal subject to the transformer gain. The output signal is then demodulated and filtered so as to recreate the source voltage signal for analysis.

A voltage sensor device includes an oscillator unit, the oscillator unit having a tunable bulk acoustic wave (BAW) resonator device and an oscillator core. The voltage sensor device also includes a frequency analyzer configured to obtain frequency measurements for the oscillator unit and to determine a voltage sense value based on a comparison of at least some of the obtained frequency measurements. The voltage sensor device also includes an output interface configured to store or output voltage sense values determined by the frequency analyzer.

A voltage measurement system has a voltage measuring device connected to a device under test by a voltage divider to drop high voltages (e.g., peaking at or above 100 kilovolts) at a measurement point to lower levels for processing by a voltage measurement and wireless printed circuit board. The voltage measuring device communicates raw measurement data wirelessly (e.g., via Bluetooth) to a remote device such as a mobile phone, laptop or portable meter head having a display and processing device programmed to calculate voltage measurements such has absolute average (ABS AVG), AC root mean square (RMS), +/peak voltage, and AC or DC coupling. The remote device can wirelessly communicate with multiple voltage measuring devices to capture raw measurement data therefrom for voltage measurement applications with multiple measurement points (e.g., three-phase measurement, and transformer testing).