A new passive wireless electric field sensor is disclosed. This sensor does not require direct attachment to a source of power which makes it passive. It is composed of a resonator loaded with varactors. The sensor is interrogated by a remotely located device transmitting and receiving the pulses of sine wave in the resonance frequency range of the sensor. Therefore, the sensor can be mounted in the vicinity of high voltage apparatus and interrogated from a safe distance.

A voltage sensor for a substrate processing system is provided. The voltage sensor includes a terminal, a first channel, and a second channel. The terminal connects to a pickup device of a substrate support in the substrate processing system. The first channel is configured to detect, at the pickup device, first radio frequency voltages in a first voltage range. The first channel includes a first voltage divider. The first voltage divider is connected to the terminal and is configured to output a first reduced voltage representative of a detected one of the first radio frequency voltages. The second channel is configured to detect, at the pickup device, second radio frequency voltages in a second voltage range. The second channel includes a second voltage divider. The second voltage divider is connected to the terminal and is configured to output a second reduced voltage representative of a detected one of the second radio frequency voltages. The second voltage range is different than the first voltage range.

A voltage sensor for a substrate processing system is provided. The voltage sensor includes a terminal, a first channel, and a second channel. The terminal connects to a pickup device of a substrate support in the substrate processing system. The first channel is configured to detect, at the pickup device, first radio frequency voltages in a first voltage range. The first channel includes a first voltage divider. The first voltage divider is connected to the terminal and is configured to output a first reduced voltage representative of a detected one of the first radio frequency voltages. The second channel is configured to detect, at the pickup device, second radio frequency voltages in a second voltage range. The second channel includes a second voltage divider. The second voltage divider is connected to the terminal and is configured to output a second reduced voltage representative of a detected one of the second radio frequency voltages. The second voltage range is different than the first voltage range.

Disclosed is a signal isolating test instrument, such as an electronics test probe. The instrument includes an input to receive a floating analog signal. An upconverter is employed to modulate the floating analog signal to a microwave frequency analog signal. An isolation barrier in the instrument prevents coupling of the floating analog signal to an earth ground. The instrument employs a microwave structure to transmit the microwave frequency analog signal across the isolation barrier via electromagnetic coupling. A downconverter is then employed to demodulate the microwave frequency analog signal to obtain a ground referenced test signal corresponding to the floating analog signal.

A voltage sensor of a substrate processing system including a multi-divider circuit, a clamping circuit and first and second outputs. The multi-divider circuit receives a RF signal indicative of a RF voltage at a substrate. The multi-divider circuit includes dividers of respective channels and outputting first and second reduced voltages based on the received RF signal. The reduced voltages are less than the RF voltage. The clamping circuit clamps the first reduced voltage to a first predetermined voltage when the RF voltage is greater than a second predetermined voltage or the first reduced voltage is greater than a third predetermined voltage. While the received RF signal is in first and second voltage ranges, the first and second outputs output output signals based respectively on the first and second reduced voltages. The first predetermined voltage is based on a maximum value of the first voltage range.

A voltage sensor of a substrate processing system including a multi-divider circuit, a clamping circuit and first and second outputs. The multi-divider circuit receives a RF signal indicative of a RF voltage at a substrate. The multi-divider circuit includes dividers of respective channels and outputting first and second reduced voltages based on the received RF signal. The reduced voltages are less than the RF voltage. The clamping circuit clamps the first reduced voltage to a first predetermined voltage when the RF voltage is greater than a second predetermined voltage or the first reduced voltage is greater than a third predetermined voltage. While the received RF signal is in first and second voltage ranges, the first and second outputs output output signals based respectively on the first and second reduced voltages. The first predetermined voltage is based on a maximum value of the first voltage range.

A meter includes a hermetically encapsulated electronic metering mechanism having a meter unit for the determination of meter readings, the metering mechanism including a data memory for storing the meter readings, and the metering unit including an antenna of a defined shape, and a readout unit arranged outside the metering mechanism for reading the meter readings from the data memory. The meter is operated according to a method for the determination of meter readings and for the wireless transmission of electrical energy. The shape of the readout unit antenna is identical to the shape of the metering unit antenna, wherein the congruent and predefined positioning of the readout unit antenna ensures an effective wireless energy supply to the metering unit by electromagnetic radiation through the readout unit, and, independently thereof, a stable wireless data coupling for the determination of meter readings between the metering unit and the readout unit.

A meter includes a hermetically encapsulated electronic metering mechanism having a meter unit for the determination of meter readings, the metering mechanism including a data memory for storing the meter readings, and the metering unit including an antenna of a defined shape, and a readout unit arranged outside the metering mechanism for reading the meter readings from the data memory. The meter is operated according to a method for the determination of meter readings and for the wireless transmission of electrical energy. The shape of the readout unit antenna is identical to the shape of the metering unit antenna, wherein the congruent and predefined positioning of the readout unit antenna ensures an effective wireless energy supply to the metering unit by electromagnetic radiation through the readout unit, and, independently thereof, a stable wireless data coupling for the determination of meter readings between the metering unit and the readout unit.

The present disclosure relates to a system (10) for measuring an electric current (I) flowing through an electrically conductive element (2). The system comprises a device (15) for generating a magnetic field in the electrically conductive element, comprising a support (53) and an electrically conductive wire (50) rigidly coupled to the support, and comprising at least one coil (52) wound around the support, a device for detecting (60) acoustic waves on the surface of the electrically conductive element, and a control and acquisition device (30) comprising a generator (33) configured to provide at least one current pulse in the electrically conductive wire and an acquisition chain for detecting an electrical signal(S) provided by the detection device.

A voltage measurement system has a voltage measuring device connected to a device under test by a voltage divider to drop high voltages (e.g., peaking at or above 100 kilovolts) at a measurement point to lower levels for processing by a voltage measurement and wireless printed circuit board. The voltage measuring device communicates raw measurement data wirelessly (e.g., via Bluetooth) to a remote device such as a mobile phone, laptop or portable meter head having a display and processing device programmed to calculate voltage measurements such has absolute average (ABS AVG), AC root mean square (RMS), +/peak voltage, and AC or DC coupling. The remote device can wirelessly communicate with multiple voltage measuring devices to capture raw measurement data therefrom for voltage measurement applications with multiple measurement points (e.g., three-phase measurement, and transformer testing).