A linear accelerator system comprising a source arranged to produce a pulsed beam of charged particles, a linear accelerator string arranged to accelerate the pulsed beam up to a predetermined range of energies, and a pre-acceleration stage interposed between the source and the linear accelerator string and arranged to accelerate the pulsed beam up to an energy suitable for beam insertion into the linear accelerator string and perform bunching of the pulsed beam. An average current detector is arranged to measure an average current in the pulsed beam, the average current detector comprising at least one non-interceptive sensor placed at an input side of the linear accelerator string, downstream of the pre-acceleration stage, the sensor being responsive to the pulsed beam passing thereby.

The present invention comprises novel methods of continuously monitoring the performance of an atmospheric pressure ionization (API) system. The methods of the invention allow for improved quality monitoring of the processes that leads to the formation of ions at atmospheric pressure. The methods of the invention further allow for continuously monitoring for the quality of the ion formation process in API without the addition of extraneous material (such as labelled compounds or control known compounds) to the system being monitored.

The disclosure provides a gas detector with an ionizing device for producing ions depending on a gas to be detected. The gas detector includes a catcher for receiving the electrical current produced by the ions, and a measuring device with an electrical measuring resistor. The electrical measuring resistor produces an electrical measuring potential from the current and is surrounded, at least in part, by an electrical shield resistor, denoted by R.sub.T. The same potentials, up to a deviation of at most 25%, are applied in the longitudinal direction of the electrical measuring resistor to mutually opposed regions of the electrical measuring resistor and the electrical shield resistor.

An ion detection current conversion circuit includes a conversion amplifier coupled with a conversion resistor assembly for converting an ion detection current produced by an ion detector into an ion detection voltage, the conversion resistor assembly comprising a resistor having a high resistance and a capacitive compensation element, and a compensation voltage circuit for deriving a compensation voltage from the ion detection voltage and feeding the compensation voltage to the capacitive compensation element, the compensation voltage circuit comprising a variable resistor for adjusting the compensation voltage.

The present invention discloses a magnetic probe device. The magnetic probe device includes a magnetic probe body and a signal processing circuit, and an output end of the magnetic probe body is connected with an input end of the signal processing circuit; the signal processing circuit includes a first capacitor, a second capacitor, a Faraday shield and a step-up transformer, and the Faraday shield is fixedly arranged between a primary winding and a secondary winding of the step-up transformer; a center tap is arranged at the primary winding of the step-up transformer, and the center tap is grounded; and a first end of the primary winding is in series connection with the first capacitor, and a second end of the primary winding is in series connection with the second capacitor. The magnetic probe device provided by the present invention can improve the signal-to-noise ratio of a magnetic probe and the measurement accuracy of the magnetic field in plasma.

A computing system obtains test data for a particle source. The test data was generated by the particle source when the particle source was caused to emit particles. The test data comprises a first set of measurements of a first type and a second set of measurements of a second type. The computing system applies a data agnostic predictive model to the test data. The data agnostic predictive model is generated without a parametric analysis of variables of the first type and variables of the second type. The data agnostic predictive model outputs, based upon the test data, a value that is indicative of whether or not the test data is abnormal. Based upon the value, the computing system outputs an indication that the particle source was operating sub-optimally when emitting the particles.

A system for non-invasive sensing of radio-frequency current spectra. In one example, the system comprises a plasma processing chamber, a plasma generator, and a shunt connector having a resistor therein. In one example, the shunt connector is attached across an opening in a ground-return path between the chamber and the generator.

The disclosure provides a gas detector with an ionizing device for producing ions depending on a gas to be detected. The gas detector includes a catcher for receiving the electrical current produced by the ions, and a measuring device with an electrical measuring resistor. The electrical measuring resistor produces an electrical measuring potential from the current and is surrounded, at least in part, by an electrical shield resistor, denoted by R.sub.T. The same potentials, up to a deviation of at most 25%, are applied in the longitudinal direction of the electrical measuring resistor to mutually opposed regions of the electrical measuring resistor and the electrical shield resistor.

Embodiments disclosed herein include a processing tool. In an embodiment, the processing tool comprises a power supply, an impedance matching network coupled to the power supply, a cathode, wherein the power supply is configured to supply power through the impedance matching network to the cathode, and a processing module, wherein the processing module is communicatively coupled to the power supply and the impedance matching network.

A linear accelerator system comprising a source arranged to produce a pulsed beam of charged particles, a linear accelerator string arranged to accelerate the pulsed beam up to a predetermined range of energies, and a pre-acceleration stage interposed between the source and the linear accelerator string and arranged to accelerate the pulsed beam up to an energy suitable for beam insertion into the linear accelerator string and perform bunching of the pulsed beam. An average current detector is arranged to measure an average current in the pulsed beam, the average current detector comprising at least one non-interceptive sensor placed at an input side of the linear accelerator string, downstream of the pre-acceleration stage, the sensor being responsive to the pulsed beam passing thereby.