A power detection circuit includes an input end for receiving an AC input signal, a rectifier for converting the AC input signal into a rectified signal, an output end for outputting the rectified signal, at least two voltage clamp circuits, each for providing an electrical path between the output end and a reference voltage end when the rectified signal is greater than a threshold voltage of the voltage clamp circuit. A threshold voltage of at least one of the voltage clamp circuit is different from a threshold voltage of another clamp circuit.

Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

A power detector comprising a first and a second bipolar junction/FET transistor. The first transistor is arranged as a common base/gate transistor with its base/gate being biased by a bias voltage and the second transistor is arranged as a common emitter/source transistor with its emitter/source being grounded. The power detector also comprises a diode or current source connected to ground from the emitter/source of the first transistor, in which power detector an input port is connected to the emitter of the first transistor and to the base/gate of the second transistor, and an output port is connected to the collectors/drains of the first and second transistor, said collectors/drains also being connected to a DC supply via a first resistor.

The present invention relates to a millimeter-wave transmitter on a chip comprising at least one transmit path coupleable to an oscillator, and an on-chip power sensor to measure at least a portion of a transmit power transmitted over the at least one transmit path. The present invention further relates to a method of calibrating a millimeter-wave transmitter on a chip and an on-chip power sensor coupleable to at least one transmit path of a millimeter-wave transmitter. The embodiments of the present invention provide a direct measure of transmit power provided within an individual one of the transmit paths of the millimeter-wave transmitter.

The present invention relates to a millimeter-wave transmitter on a chip comprising at least one transmit path coupleable to an oscillator, and an on-chip power sensor to measure at least a portion of a transmit power transmitted over the at least one transmit path. The present invention further relates to a method of calibrating a millimeter-wave transmitter on a chip and an on-chip power sensor coupleable to at least one transmit path of a millimeter-wave transmitter. The embodiments of the present invention provide a direct measure of transmit power provided within an individual one of the transmit paths of the millimeter-wave transmitter.

A bi-directional bridge includes a forward bridge portion, and reverse bridge portion and a shared portion that enables the simultaneous measurement of power flowing in both directions while reducing insertion losses, providing better impedance matching and/or providing improved directionality. In some embodiments, additional attenuation is provided to reduce the common mode rejection requirements of detectors used with the bridge. In other embodiments, multi-tap attenuators and steering circuits may be integrated into the forward and/or reverse bridge portions to reduce common mode signal levels while still maintaining high levels of sensitivity for measuring small input signals.

A bi-directional bridge includes a forward bridge portion, and reverse bridge portion and a shared portion that enables the simultaneous measurement of power flowing in both directions while reducing insertion losses, providing better impedance matching and/or providing improved directionality. In some embodiments, additional attenuation is provided to reduce the common mode rejection requirements of detectors used with the bridge. In other embodiments, multi-tap attenuators and steering circuits may be integrated into the forward and/or reverse bridge portions to reduce common mode signal levels while still maintaining high levels of sensitivity for measuring small input signals.

An integrated circuit (IC) is provided with a plurality of diode based mm-wave peak voltage detectors (PVD)s. During a testing phase, a multi-point low frequency calibration test is performed one more of the PVDs to determine and store a set of alternating current (AC) coefficients. During operation of the IC, a current-voltage sweep is performed on a selected one of the PVDs to determine a process and temperature direct current (DC) coefficient. A peak voltage produced by the PVD in response to a high frequency radio frequency (RF) signal is measured to produce a first measured voltage. An approximate power of the RF signal is calculated by adjusting the first measured voltage using the DC coefficient and the AC coefficient.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

A power detection circuit includes an input end for receiving an AC input signal, a rectifier for converting the AC input signal into a rectified signal, an output end for outputting the rectified signal, at least two voltage clamp circuits, each for providing an electrical path between the output end and a reference voltage end when the rectified signal is greater than a threshold voltage of the voltage clamp circuit. A threshold voltage of at least one of the voltage clamp circuit is different from a threshold voltage of another clamp circuit.