A device monitors a pulse frequency and a duty ratio of a microwave generated by a microwave output device provided in a plasma processing apparatus. The plasma processing apparatus includes a chamber main body, the microwave output device, a wave guide tube, and a tuner. The microwave output device generates the microwave of which power is pulse-modulated. The device includes a wave detection unit and an acquisition unit. The wave detection unit detects a measured value corresponding to travelling wave power of a microwave in the wave guide tube. The acquisition unit acquires a frequency and a duty ratio of the travelling wave power on the basis of the measured value detected by the wave detection unit.

A frequency estimation signal generator component arranged to receive an input frequency signal and to generate therefrom a frequency estimation signal. The frequency estimation signal generator component comprises a counter component arranged to sequentially output a sequence of control signal patterns over a plurality of digital control signals under the control of an oscillating signal derived from the received input frequency signal terns. The frequency estimation signal generator further comprises a continuous waveform generator component arranged to receive the plurality of digital control signals and a weighted analogue signal for each of the received digital control signals, and to output a continuous waveform signal comprising a sum of the weighted analogue signals for which the corresponding digital control signals comprise an asserted logical state. The frequency conversion component is arranged to derive the frequency estimation signal from the continuous waveform signal output by the continuous waveform generator component.

A duty cycle measuring circuit, the circuit comprising a synchronizer and a measurer, the synchronizer arranged such that when a signal to be measured comprising pulses having a pulse width and a pulse period is input to the synchronizer, synchronizing signals corresponding to each of pulse rising edge, pulse falling edge, pulse period start and pulse period end are output from the synchronizer, each synchronizing signal comprising a rising or falling edge, wherein the synchronizing signal outputs from the synchronizer are input to the measurer, and wherein the measurer is arranged to provide two measurement outputs based on the synchronizing signal inputs from the synchronizer, the measurement outputs comprising a first measurement output signal indicative of a pulse period measurement of the signal to be measured and a second measurement output signal indicative of a pulse width measurement of the signal to be measured.

A duty cycle measuring circuit, the circuit comprising a synchronizer and a measurer, the synchronizer arranged such that when a signal to be measured comprising pulses having a pulse width and a pulse period is input to the synchronizer, synchronizing signals corresponding to each of pulse rising edge, pulse falling edge, pulse period start and pulse period end are output from the synchronizer, each synchronizing signal comprising a rising or falling edge, wherein the synchronizing signal outputs from the synchronizer are input to the measurer, and wherein the measurer is arranged to provide two measurement outputs based on the synchronizing signal inputs from the synchronizer, the measurement outputs comprising a first measurement output signal indicative of a pulse period measurement of the signal to be measured and a second measurement output signal indicative of a pulse width measurement of the signal to be measured.

A high-precision frequency measuring system and method. The system includes: an analog-to-digital conversion module for receiving an analog intermediate frequency signal to convert the analog intermediate frequency signal into a digital intermediate frequency signal; a frequency mixing module for generating two orthogonal local carriers to convert the digital intermediate frequency signal to a digital baseband signal; an extraction filter module for performing low-pass filtering and extraction of the digital baseband signal, so as to reduce a data rate; a Fourier transform module for obtaining a frequency domain signal; a frequency measurement module for obtaining a first frequency measurement value; a scanning module for obtaining a scanned second frequency measurement value; and a selector for selecting either the first frequency measurement value or the second frequency measurement value as a result of frequency measurement. The system and method can improve the accuracy of frequency measurement.

In a general aspect, a radio frequency (RF) measurement device includes first and second mode converters, each configured to convert a mode of the RF electromagnetic wave between a first RF waveguide mode and a second RF waveguide mode. The RF measurement device also includes an internal cavity between the first and second mode converters that contains a vapor or a source of the vapor. The vapor includes Ryberg atoms or molecules. The RF measurement device additionally includes an RF waveguide extending between the first and second mode converters and configured to establish a circular polarization of the RF electromagnetic wave in the internal cavity.

A wireless power transmission system, and a method for controlling wireless power transmission and wireless power reception are provided. According to an aspect, a method for controlling a wireless power transmission may include: detecting a plurality of target devices used to wirelessly receive power; selecting a source resonating unit from among a plurality of source resonating units, based on the amount of power to be transmitted to one or more of the plurality of target devices, a coupling factor associated with one or more of the plurality of target devices, or both; and wirelessly transmitting power to a target device using the selected source resonating unit.

A wireless power transmission system, and a method for controlling wireless power transmission and wireless power reception are provided. According to an aspect, a method for controlling a wireless power transmission may include: detecting a plurality of target devices used to wirelessly receive power; selecting a source resonating unit from among a plurality of source resonating units, based on the amount of power to be transmitted to one or more of the plurality of target devices, a coupling factor associated with one or more of the plurality of target devices, or both; and wirelessly transmitting power to a target device using the selected source resonating unit.

A wireless power transmission system, and a method for controlling wireless power transmission and wireless power reception are provided. According to an aspect, a method for controlling a wireless power transmission may include: detecting a plurality of target devices used to wirelessly receive power; selecting a source resonating unit from among a plurality of source resonating units, based on the amount of power to be transmitted to one or more of the plurality of target devices, a coupling factor associated with one or more of the plurality of target devices, or both; and wirelessly transmitting power to a target device using the selected source resonating unit.

A wireless power transmission system, and a method for controlling wireless power transmission and wireless power reception are provided. According to an aspect, a method for controlling a wireless power transmission may include: detecting a plurality of target devices used to wirelessly receive power; selecting a source resonating unit from among a plurality of source resonating units, based on the amount of power to be transmitted to one or more of the plurality of target devices, a coupling factor associated with one or more of the plurality of target devices, or both; and wirelessly transmitting power to a target device using the selected source resonating unit.