Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

A measuring apparatus according to the present invention includes a response signal measuring section, an input frequency domain conversion section, a response frequency domain conversion section, and a frequency characteristic acquisition section. The response signal measuring section measures a response signal within a time domain, the response signal being acquired by applying a pulse having a width of not less than one femtosecond nor more than 1000 femtoseconds to an object to be measured. The input frequency domain conversion section converts the pulse into a frequency domain. The response frequency domain conversion section converts a measurement result from the response signal measuring section into a frequency domain. The frequency characteristic acquisition section acquires a frequency characteristic of the object to be measured, from a conversion result provided from the input frequency domain conversion section and a conversion result provided from the response frequency domain conversion section.

The present disclosure relates to a motor control system including: a motor control device, including a semiconductor integrated circuit having a memory and forming a control loop for a motor so as to control a drive of the motor; and an external debug device, externally connected to the motor control device and accessible to the memory in the motor control device. The external debug device includes a disturbance signal superimposer and a frequency characteristics deriver. The interference signal superimposer generates a disturbance signal for the control loop and superimposes the disturbance signal on a signal generated in the control loop. The frequency characteristics deriver derives frequency characteristics of the control loop based on the signal generated in the control loop by superimposition.

The present disclosure relates to a motor control system including: a motor control device, including a semiconductor integrated circuit having a memory and forming a control loop for a motor so as to control a drive of the motor; and an external debug device, externally connected to the motor control device and accessible to the memory in the motor control device. The external debug device includes a disturbance signal superimposer and a frequency characteristics deriver. The interference signal superimposer generates a disturbance signal for the control loop and superimposes the disturbance signal on a signal generated in the control loop. The frequency characteristics deriver derives frequency characteristics of the control loop based on the signal generated in the control loop by superimposition.

A method for predicting electromagnetic radiation characteristics, a computer-readable recording medium and a simulator are provided. The method includes the steps of obtaining a plurality of first radiation currents in an equivalent circuit model of an electronic component, calculating a radiation resistance according to the first radiation currents, inserting the radiation resistance into the equivalent circuit model, and then obtaining a plurality of second radiation currents in the equivalent circuit model, and predicting electromagnetic radiation characteristics of the electronic component according to the second radiation currents.

An apparatus and method are provided for detecting a resonant frequency giving rise to an impedance peak in a power delivery network used to provide a supply voltage. The apparatus includes resonant frequency detection circuitry that comprises test frequency control circuitry and a loading circuit. The test frequency control circuitry is arranged to generate control signals to indicate a sequence of test frequencies. A loading circuit is controlled by the control signals and operates from the supply voltage. In particular, in response to each test frequency indicated by the control signals, the loading circuit draws a duty-cycled current load through the power delivery network at that test frequency. Operation of the loading circuit produces a measurable property whose value varies in dependence on the supply voltage, thus enabling the resonant frequency to be determined from a variation in the value of that measurable property.

The present disclosure relates to a motor control system including: a motor control device, including a semiconductor integrated circuit having a memory and forming a control loop for a motor so as to control a drive of the motor; and an external debug device, externally connected to the motor control device and accessible to the memory in the motor control device. The external debug device includes a disturbance signal superimposer and a frequency characteristics deriver. The interference signal superimposer generates a disturbance signal for the control loop and superimposes the disturbance signal on a signal generated in the control loop. The frequency characteristics deriver derives frequency characteristics of the control loop based on the signal generated in the control loop by superimposition.

The present disclosure relates to a motor control system including: a motor control device, including a semiconductor integrated circuit having a memory and forming a control loop for a motor so as to control a drive of the motor; and an external debug device, externally connected to the motor control device and accessible to the memory in the motor control device. The external debug device includes a disturbance signal superimposer and a frequency characteristics deriver. The interference signal superimposer generates a disturbance signal for the control loop and superimposes the disturbance signal on a signal generated in the control loop. The frequency characteristics deriver derives frequency characteristics of the control loop based on the signal generated in the control loop by superimposition.

A spectrum analyzer (10) comprises a signal input or receiver (11) for receiving a signal, an A/D converter (12) configured to sample the received signal and generate a data stream of IQ-data, a digital processing circuit (13) for generating compressed data from the data stream of IQ-data, and a data interface (19) for outputting the compressed data from the spectrum analyzer (10).

A spectrum analyzer (10) comprises a signal input or receiver (11) for receiving a signal, an A/D converter (12) configured to sample the received signal and generate a data stream of IQ-data, a digital processing circuit (13) for generating compressed data from the data stream of IQ-data, and a data interface (19) for outputting the compressed data from the spectrum analyzer (10).