Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

An analysis threshold determination device includes a threshold determination unit for determining a pair of or plural pairs of thresholds used for analysis in accordance with a pair of thresholds generated by a calculation unit and a count value output from a. pulse count unit. The calculation unit repeatedly generates a new pair of thresholds in which at least one of the pair of thresholds is changed every time the pulse count unit counts the pulse until reaching a predetermined value. The threshold determination unit chooses a class of a measure of central tendency according to a frequency distribution defining each pair of thresholds generated as a class and the count value output from the pulse count unit as a frequency. The threshold determination unit determines a pair of or plural pairs of thresholds corresponding to a class of a predetermined range from the class of measure of central tendency.

An analysis threshold determination device includes a threshold determination unit for determining a pair of or plural pairs of thresholds used for analysis in accordance with a pair of thresholds generated by a calculation unit and a count value output from a. pulse count unit. The calculation unit repeatedly generates a new pair of thresholds in which at least one of the pair of thresholds is changed every time the pulse count unit counts the pulse until reaching a predetermined value. The threshold determination unit chooses a class of a measure of central tendency according to a frequency distribution defining each pair of thresholds generated as a class and the count value output from the pulse count unit as a frequency. The threshold determination unit determines a pair of or plural pairs of thresholds corresponding to a class of a predetermined range from the class of measure of central tendency.

A frequency measurement circuit includes a first counter that counts a pulse number of a reference clock signal and generates first count data, a second counter that counts a pulse number of a measurement target clock signal and generates second count data, a time-to-digital conversion circuit that generates first time difference data indicating a time difference between a first timing at which the first counter starts counting of the pulse number and a second timing at which the second counter starts counting of the pulse number, and second time difference data indicating a time difference between a third timing at which the first counter ends counting of the pulse number and a fourth timing at which the second counter ends counting of the pulse number, and a calculation circuit that performs calculation based on the second count data, the first time difference data, and the second time difference data and generates frequency data indicating a frequency of the measurement target clock signal.

A frequency measurement circuit includes a first counter that counts a pulse number of a reference clock signal and generates first count data, a second counter that counts a pulse number of a measurement target clock signal and generates second count data, a time-to-digital conversion circuit that generates first time difference data indicating a time difference between a first timing at which the first counter starts counting of the pulse number and a second timing at which the second counter starts counting of the pulse number, and second time difference data indicating a time difference between a third timing at which the first counter ends counting of the pulse number and a fourth timing at which the second counter ends counting of the pulse number, and a calculation circuit that performs calculation based on the second count data, the first time difference data, and the second time difference data and generates frequency data indicating a frequency of the measurement target clock signal.

A system for determine presence or quality of an external timing device is provided. The system may include a circuit (e.g., in a field-programmable gate array (FPGA)) having an input, an oscillator, an edge detector, a bit counter, and a calculator element. In some examples, the input may receive an input signal under test. The oscillator may advance a timer at a known rate to facilitate generation of clock samples for the input signal under test. The edge detector may measure edges of the input signal under test based on the clock samples. The circuit may include at least one bit counter to store a count associated with the measured edges for a shorter interval timer period and a longer interval timer period. The calculator element may determine presence or quality of an external timing device based on the count.

A frequency ratio measurement device includes a counter section configured to count a time event of a first signal and output a count value obtained by multiplying the time event by k.sub.0, a time to digital converter section configured to output a time digital value corresponding to a phase difference between the first signal and a second signal, a combiner section configured to output a combined value of the count value and the time digital value, a subtractor section configured to output a difference value between a first value based on the combined value and a second value, a quantizer section configured to compare a third value based on the difference value with a predetermined threshold to thereby output a quantized value obtained by quantizing the third value, and a feedback section configured to output, based on a time event of the second signal, the second value based on the quantized value. The frequency ratio measurement device outputs, based on the quantized value, a delta-sigma modulated signal corresponding to a frequency ratio of the first signal and the second signal.

An object of the present invention is to reduce the possibility of failure in the detection of metallic foreign object. A metallic foreign object detector includes a sensor part having at least one antenna coil that receives a magnetic field or current to generate a vibration signal a vibration time length measurement circuit that measures a vibration time length indicating the length of time required for the vibration of the vibration signal output from the sensor part corresponding to a predetermined wavenumber larger than 1, and a determination circuit that determines the presence/absence of a metallic foreign object approaching the antenna coil based on the vibration time length and a criterion vibration time length which is the vibration time length obtained in the absence of the approaching metallic foreign object.

An electronic magnetometer and a method for measuring a magnetic field are provided. A Gunn diode with magnetic shielding and a Gunn diode without magnetic shielding generate different induced high-frequency oscillating currents in various environments. The high-frequency oscillating current of the Gunn diode with magnetic shielding and the high-frequency oscillating current of the Gunn diode without magnetic shielding are processed by circuits and subsequently compared. The difference of frequencies in the two currents is proportional to the magnitude of magnetic field, and the magnitude of magnetic field is obtained.

An electronic magnetometer and a method for measuring a magnetic field are provided. A Gunn diode with magnetic shielding and a Gunn diode without magnetic shielding generate different induced high-frequency oscillating currents in various environments. The high-frequency oscillating current of the Gunn diode with magnetic shielding and the high-frequency oscillating current of the Gunn diode without magnetic shielding are processed by circuits and subsequently compared. The difference of frequencies in the two currents is proportional to the magnitude of magnetic field, and the magnitude of magnetic field is obtained.