A system and method for measuring resistance over an array. The array includes at least three electrodes. Nodes at each intersection between input electrodes and output electrodes have variable resistance. A driving voltage is applied to a selected input electrode and an output current is received at a selected output electrode. A selected node is at the intersection of the two selected electrodes and includes an electrical component with a resistive property. Remaining electrodes are connected with a ground for isolating the selected node from the effects of changes in impedance of the remaining nodes. The driving voltage is converted to an output current by resistance at the selected node. The output current is converted to an output voltage with a current-to-voltage converter circuit for measuring the resistance of the electrical component. The nodes may be measured as the selected node in sequential or non-sequential patterns.

Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine fixed parameters of a match network model are described. The multiple fixtures mimic various plasma conditions without occupying tool time in which a wafer is placed within a plasma chamber to generate the fixed parameters of the match network model.

A measuring bridge (1) provides a first matching pad (2), a second matching pad (3) and a third matching pad (4), wherein all matching pads (2, 3, 4) comprise at least three resistors (2.sub.1, 2.sub.2, 2.sub.3, 3.sub.1, 3.sub.2, 3.sub.3, 4.sub.1, 4.sub.2, 4.sub.3) which are arranged in a T-structure. A second resistor (3.sub.2) of the second matching pad (3) is connected to a second resistor (2.sub.2) of the first matching pad (2), and a third resistor (4.sub.3) of the third matching pad (4) is connected to a third resistor (2.sub.3) of the first matching pad (2). A second resistor (4.sub.2) of the third matching pad (4) can be connected to a device under test (7). A third resistor (3.sub.3) of the second matching pad (3) can be connected to a calibration standard (5), and a first resistor (3.sub.1, 4.sub.1) of the second and the third matching pad (3, 4) are connected in each case to a signal input of an element (11) which suppresses a common-mode component on its two signal inputs.

A measuring bridge (1) provides a first matching pad (2), a second matching pad (3) and a third matching pad (4), wherein all matching pads (2, 3, 4) comprise at least three resistors (2.sub.1, 2.sub.2, 2.sub.3, 3.sub.1, 3.sub.2, 3.sub.3, 4.sub.1, 4.sub.2, 4.sub.3) which are arranged in a T-structure. A second resistor (3.sub.2) of the second matching pad (3) is connected to a second resistor (2.sub.2) of the first matching pad (2), and a third resistor (4.sub.3) of the third matching pad (4) is connected to a third resistor (2.sub.3) of the first matching pad (2). A second resistor (4.sub.2) of the third matching pad (4) can be connected to a device under test (7). A third resistor (3.sub.3) of the second matching pad (3) can be connected to a calibration standard (5), and a first resistor (3.sub.1, 4.sub.1) of the second and the third matching pad (3, 4) are connected in each case to a signal input of an element (11) which suppresses a common-mode component on its two signal inputs.

A system for measuring a permittivity includes a resonant chamber, a conductive probe, a platform, a pillar, a detector, and a computing module. The resonant chamber has a cavity. The conductive probe is configured for introducing a microwave into the cavity of the resonant chamber. The platform is configured for carrying a sample. The pillar is positioned between the platform and a chamber wall, so that the platform protrudes from the chamber wall. The detector is used to detect a resonant frequency of the microwave when resonance occurs within the cavity. The computing module is configured for calculating a permittivity corresponding to the measured resonant frequency according to a corresponding relationship between resonant frequency and permittivity. The above-mentioned system for measuring a permittivity is capable of measuring a broader range of permittivity with simplified measurement steps and higher accuracy. A method for measuring a permittivity is also disclosed.

A measurement accessory device connectable to a measurement apparatus or to a device under test wherein the measurement accessory device comprises means for providing characteristic data of said measurement accessory device in machine readable form used by said measurement apparatus during measurement of said device under test.

One aspect of the present disclosure relates to a signal generating method for generating a visible light signal. A signal generating method includes: a step SD11 of determining, as a method for transmitting a visible light signal from a transmitter, one of a single-frame transmitting method for transmitting data as one frame and a multiple-frame transmitting method for transmitting the data while dividing the data into a plurality of frames; a step SD12 of, when the multiple-frame transmitting method is determined, generating partition type information indicating a type of data to be transmitted, and generating combination data by adding the partition type information to the data to be transmitted; a step SD13 of generating the plurality of frames each of which includes each of a plurality of data parts by dividing the combination data into the plurality of data parts; and a step SD14 of generating the visible light signal by adding a preamble to a head of each of the plurality of frames.

One aspect of the present disclosure relates to a signal generating method for generating a visible light signal. A signal generating method includes: a step SD11 of determining, as a method for transmitting a visible light signal from a transmitter, one of a single-frame transmitting method for transmitting data as one frame and a multiple-frame transmitting method for transmitting the data while dividing the data into a plurality of frames; a step SD12 of, when the multiple-frame transmitting method is determined, generating partition type information indicating a type of data to be transmitted, and generating combination data by adding the partition type information to the data to be transmitted; a step SD13 of generating the plurality of frames each of which includes each of a plurality of data parts by dividing the combination data into the plurality of data parts; and a step SD14 of generating the visible light signal by adding a preamble to a head of each of the plurality of frames.

A microwave (MW) system includes an object support adapted to support an object, a MW transmitter, a MW receiver, an outer rotation unit, an inner rotation unit, a controller and a computation processor. The outer rotation unit includes an outer ring, having a ring shape, with an outer ring mount, upon which one of either an antenna of the MW transmitter or an antenna of the MW receiver is mounted. The inner rotation unit comprises an inner ring, having a ring shape, with an inner ring mount, upon which the other of an antenna of the MW transmitter or an antenna of the MW receiver is mounted. The controller is configured to independently control both the rotation of the inner ring and the outer ring. The computation processor is configured to receive data including MW data representative of MW scattered field detected by the MW receiver.

A miniaturized plasma source includes a stripline split-ring resonator. The split-ring resonator is sandwiched between two dielectric substrates and two metal ground planes. In order to make the plasma accessible from the outside of the ground planes, a hole is made through the gap between the ends of the split ring. The two ground planes act as an electromagnetic shield, protecting the split-ring resonator from electromagnetic interference due to changes in the electric or dielectric environment surrounding it. The miniaturized plasma source is particularly useful in optogalvanic spectroscopy applications.