Patent classifications
G
G01
G01R
31/00
G01R31/26
G01R31/2646
G01R31/2646
Devices and methods for noise testing of a substrate including through silicon vias
12535519
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2026-01-27
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Embodiments of the present disclosure provide a device and a method for noise testing of a substrate including through silicon vias (TSVs). The device may include a substrate including first TSVs; an excitation link including at least two groups of second TSVs; an insulation layer arranged between the excitation link and the substrate; and a testing link including at least one group of third TSVs, the testing link being electrically connected with the substrate.