The present disclosure provides an optical system, including a first optical mechanism. The first optical mechanism includes a first movable part, a fixed assembly, a first driving assembly and a guiding assembly. The first movable part includes an optical element. The first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly. The landing assembly is configured to guide the first movable part to move relative to the fixed assembly. A friction force is generated between the first movable part and the guiding assembly, and the first movable part is temporarily positioned on the fixed assembly through the friction force.

A lens apparatus includes an optical member, a driving device configured to drive the optical member, a detector configured to detect a state relating to the driving, and a processor configured to generate a control signal for the driving device based on first information about the detected state. The processor includes a machine learning model configured to generate an output relating to the control signal based on the first information and second information about the lens apparatus, the second information being different from the first information.

Embodiments comprise a system created through fabricating a lens array through which lasers are emitted. The lens array may be fabricated in the semiconductor substrate used for fabricating the lasers or may be a separate substrate of other transparent material that would be aligned to the lasers. In some embodiments, more lenses may be produced than will eventually be used by the lasers. The inner portion of the substrate may be formed with the lenses that will be used for emitting lasers, and the outer portion of the substrate may be formed with lenses that will not be used for emitting lasers—rather, through etching these additional lenses, the inner lenses may be created with a higher quality.

A method includes assembling a first lens and a second lens to form a first optical assembly in a first assembly and validation line; testing the first optical assembly in the first assembly and validation line; securing a coupling between the first lens and the second lens if a testing result satisfies a predetermined condition; and disassembling the first optical assembly into the first lens and the second lens if the testing result does not satisfy the predetermined condition; The method also includes prior to stacking the first lens and the second lens to form a second optical assembly, adjusting at least one of an optical center, a tilt, or a polarimetric angle of at least one of the first lens or the second lens in a second assembly and validation line; and stacking the first lens and the second lens to form the second optical assembly.

An alignment device includes a base table, a plurality of electric actuators attached to the base table, an alignment table supported by the plurality of electric actuators. Each of the plurality of electric actuators includes a linear motion device that drives the alignment table in a direction approaching or separating from the base table.

An optical component driving mechanism includes a holder, a frame, a casing, a base, a first elastic member, a second elastic member and a driving assembly. The holder is for holding an optical component. The frame is elastically connected to the holder. The base is fixedly connected to the casing. The first elastic member has a first outer connecting portion and a first inner connecting portion. The second elastic member has a second outer connecting portion and a second inner connecting portion. The driving assembly is configured to drive the holder to move relative to the frame. The first and second outer connecting portions are disposed on the frame, the first and second inner connecting portions are disposed on the holder, and there is no elastic member disposed between the holder and the base for connecting the base or the frame.

Embodiments described herein relate to a dynamically controlled lens used in lithography tools. Multiple regions of the dynamic lens can be used to transmit a radiation beam for lithography process. By allowing multiple regions to transmit the radiation beam, the dynamically controlled lens can have an extended life cycle compared to conventional fixed lens. The dynamically controlled lens can be replaced or exchanged at a lower frequency, thus, improving efficiency of the lithography tools and reducing production cost.

An actuator assembly comprises a static part and a movable part. A helical bearing arrangement supporting the movable part on the static part guides helical movement of the movable part with respect to the static part around a helical axis. One or more actuators, that are not shape memory alloy actuators, are arranged to drive movement of the movable part around the helical axis, which thereby includes a component of translational movement along the helical axis. The helical movement increases the force within the actuator assembly allowing actuation of heavier movable parts, and may improve posture.

An alignment apparatus for a polarization device includes a polarizer subassembly for polarizing a light beam, a rotary support for rotatably supporting the polarization device in a path of the light beam downstream of the polarizer subassembly, an analyzer subassembly downstream of the rotary support for receiving the light beam propagated through the polarization device, and a photodetector array disposed downstream of the analyzer subassembly and extending along the width dimension of the light beam for detecting the light beam propagated through the analyzer subassembly. At least one of the polarizer or analyzer subassemblies includes a spatially variant polarization element having a polarization property varying along the width dimension of the light beam.

A method for assembling a first lens and a second lens is provided. The method includes performing an optical center measurement for at least one of the first lens or the second lens, and performing an optical center adjustment when the optical center measurement does not satisfy a predetermined optical center condition. The method also includes performing a polarimetric measurement for at least one of the first lens or the second lens, and performing a polarimetric angle adjustment when the polarimetric measurement does not satisfy a predetermined polarimetric condition. The method further includes assembling the first lens and the second lens to form an optical assembly.