Provided are a piezoelectric driving device, an optical member driving device, a camera device, and an electronic apparatus, which are capable of driving an object to be driven in one direction by oscillation in the one direction, and of driving the object to be driven in two directions by combining the driving in one direction. A piezoelectric driving device (18) includes: a driving portion (38) to be brought into frictional contact with an object to be driven (16), which is moved with respect to a fixed body (12); and at least two piezoelectric portions (40a to 40d), which are formed integrally with the driving portion (38), are arranged on a predetermined plane with the driving portion (38) being sandwiched between the at least two piezoelectric portions (40a to 40d), and are configured to be bent with respect to the predetermined plane when voltages are applied to the at least two piezoelectric portions (40a to 40d), wherein outer edges of entirety of the at least two piezoelectric portions (40a to 40d) are fixed to the fixed body (12).

An adjustable beam directing optical system for a focused laser differential interferometer (FLDI) instrument according to various aspects of the present technology may include optical half waveplate to achieve an incident linear polarization orientation with equal components of laser intensity aligned to the vertical and horizontal axis of the optical system, and an optical prism for splitting these components of an incident laser beam into two orthogonally-polarized beams equally about an optical axis of the FLDI instrument. A series of beam realignment devices positioned downstream of the optical prism are configured to selectively direct each beam to a predetermined location.

A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.

An optical system for a lithography apparatus, having a first component, a second component, and an optical element, which is held between the first component and the second component with force-fit engagement and for this purpose is subjected to a clamping force. At least one of the components includes a bearing portion which contacts the optical element and which has a shape-memory alloy.

An optical device detachably disposed on a scanner is provided, including a housing, a first opening, a second opening, a lens module, and a fixing member. The housing has a first surface and a second surface connected to the first surface. The first opening and the second opening are respectively formed on the first surface and the second surface. The lens module is disposed in the housing. The fixing member is detachably affixed to the scanner and pivotally connected to the housing. The light provided by the scanner enters the housing through the first opening, and the lens module guides the light to leave the housing through the second opening. The light leaving the housing through the second opening can fall on a scanned object.

An objective optical system includes a convex secondary mirror configured to reflect a measurement light irradiated from an infrared microscope, a concave primary mirror configured to reflect the measurement light reflected by the secondary mirror, a prism to which the measurement light reflected by the primary mirror is irradiated, and a light shielding means provided on an optical path of the measurement light between the primary mirror and the prism to shield a part of the light beam of the measurement light.

An optical element driving mechanism is provided. The optical element driving mechanism includes a carrier, a base, and a first driving assembly. The carrier holds an optical element with an optical axis. The carrier is movably connected to the base. The first driving assembly drives the carrier to move relative to the base. The first driving assembly includes a driving coil disposed on the carrier, and the direction of the winding axis of the driving coil is different from the direction of the optical axis. The carrier has an abutting surface, which faces and is in direct contact with the driving coil. The maximum size of the abutting surface is greater than the maximum size of the driving coil in the direction of the optical axis.

A driving device includes two rotor assemblies, a stator assembly, and a positioning assembly. Each rotor assembly includes a rotation axis and a rotor. The rotor includes a hollow chamber. The two rotor assemblies include a first rotor assembly and a second rotor assembly, a rotation axis of the first rotor assembly is parallel with a rotation axis of the second rotor assembly, a rotor of the first rotor assembly is at least partially embedded in a chamber of a rotor of the second rotor assembly. The stator assembly is surroundingly disposed at an outer side of the two rotor assemblies and drives a rotor. The rotor driven by the stator assembly causes another rotor of one of the first rotor assembly and the second rotor assembly to rotate. The positioning assembly is located outside of the rotors, and limits the rotors to rotate around corresponding fixed rotation axes.

An optical prism that includes an interlock structure that precisely couples to a complementary structure of a refractive lens. For precision, the interlock structure may be formed at the same time and using the same technique as the optical surface of the prism. The interlock structure provides high accuracy when assembling a folded lens system by precisely aligning the object side optical surface of the lens with the image side optical surface of the prism so that the optical axis is centered in the lens. The prism may have refractive power. A portion of the object side surface may be coated with an opaque material to provide an aperture stop at that surface.

An imaging system includes a first risley sensor pointed along a first axis and a second risley sensor pointed along a second axis, the second axis intersecting the first axis, the second risley sensor has at least a wide field of view and a narrow field of view. A controller is operably connected to the second risley sensor and configured to select one of the wide field of view and the narrow field of view for image data acquired by the second risley sensor. Vehicles including the imaging system and imaging methods are also described.