The DMD assembly in present disclosure includes a base mounted on a first side of a driver board; a chip substrate; a DMD chip mounted on the chip substrate; and a fixing frame fixed with driver board on the first side; a second side of the base includes a mounting groove configured to mount the chip substrate; the fixing frame includes an insertion hole, and the base is received in the insertion hole; an elastic protrusion is positioned beside the inserting hole, and the elastic protrusion comprises a fixing portion and a pressing portion, the fixing portion is connected to the fixing frame on a side of the fixing frame facing away from the driver board, the pressing portion is positioned on the fixing portion; a surface of the pressing portion facing the chip substrate contacts the chip substrate to clamp the chip substrate against the base.

The present invention provides strategies for mitigating the deleterious effects of differential thermal expansion in composite panel structures. The principles of the present invention are particularly useful in the field of concentrating solar power. The principles of the present invention can be used in CSP applications to make composite mirror panel structures with improved characteristics for accommodating differential thermal expansion between components of the composite. Significantly, the composite mirrors structures can still be securely attached to other heliostat components such as a drive mechanism while still having the ability to accommodate differential thermal expansion between the skins of a composite mirror panel helps to limit energy losses due to slope errors.

A monolithic optical mount having a bore for accommodating an optical element, the bore including: a first ridge located at a first position on the inside circumference of the bore; a second ridge located at a second position on the inside circumference of the bore; and a flexure extending from along the inside circumference of the bore to a point beyond a threaded hole which passes through from the outside circumference of the bore to the inside circumference of the bore; wherein the flexure is actuated by turning a screw in the threaded hole thereby adjusting an amount of force pushing against a point on the flexure by a tip of the screw.

An optical system includes at least one optical element which has an optically effective surface and which is designed for an operating wavelength of less than 30 nm. The optical system also includes a heating arrangement for heating this optical element and comprising a plurality of IR emitters for irradiating the optically effective surface with IR radiation. The IR emitters are activatable and deactivatable independently of each other to variably set different heating profiles in the optical element. The optical system further includes at least one beam shaping unit for shaping the beam of the IR radiation steered onto the optically effective surface by the IR emitters. The optical system also includes a multi-fiber head comprising a multi-fiber connector for connecting optical fibers. IR radiation from a respective one of the IR emitters is suppliable by way of each of these optical fibers.

The present disclosure relates to the field of optical and projecting technology, and particularly to a DMD assembly, DLP optical engine and DLP projection device. The DMD assembly includes a base, a driver board, a chip substrate with a DMD chip and a fixing frame, where a first side of the base is provided with a mounting groove for mounting the chip substrate, a second side of the base is attached to the driver board, and the first side is opposite to the second side; a conductive spring leaf on the base extends through a bottom of the mounting groove and is beyond the second side, so that the chip substrate is electrically connected to the driver board through the conductive spring leaf; the driver board is provided with a first through hole, and the fixing frame is provided with a second through hole; position of the first hole corresponds to position of the second hole, and the driver board and the fixing frame are fixed by a fastener extending through the first through hole and the second through hole; and the fixing frame is provided with an inserting hole, into which the base is inserted.

A light scanning apparatus, including: a light source; a deflection unit configured to deflect a light beam emitted from the light source; a reflecting mirror configured to reflect the light beam to a photosensitive member; a housing; a first support portion provided in the housing to support one end of the reflecting mirror; a second support portion provided in the housing to support the other end of the reflecting mirror; a first leaf spring configured to press the reflecting mirror at the one end to apply an urging force for urging the reflecting mirror against the first support portion; and a second leaf spring configured to press the reflecting mirror at the other end to apply an urging force for urging the reflecting mirror against the second support portion, wherein a pressing force of the first leaf spring is larger than a pressing force of the second leaf spring.

An optical mount includes a support substrate defining an aperture configured to receive an optical element. A support assembly is positioned proximate a perimeter of the aperture. The support assembly includes a resilient member configured reflects in response to relative motion between the optical element and the support substrate. A support plate is positioned on the resilient member and is in contact with the optical element.

An all-reflective coronagraph optical system for continuously imaging a wide field of view. The optical system can comprise a fore-optics assembly comprising a plurality of mirrors that reflect light rays, about a wide field of view centered around the Sun, to an aft-optics assembly that reflects the light rays to an image sensor. A fold mirror, having an aperture, is optically supported between the fore-optics assembly and the aft-optics assembly. The aperture defines an angular subtense (e.g., 1.0 degree) sized larger than the angular subtense of the Sun. The aperture facilitates passage of a direct solar image and a solar thermal load. A thermal control subsystem comprises a shroud radiatively coupled to each fore-optics mirror and the fold mirror. A cold radiator is thermally coupled to each shroud. Heaters adjacent fore optics mirrors and the fold mirror control temperature to provide a steady state optical system to minimize wavefront error.

To compensate for a focal plane shifting away from an image plane due to a temperature change, an integrated image sensor and lens assembly includes an optical component and an optics compensator including passively actuating elements. The passively actuating elements couple the optical component to the inner surface of the lens mount. The passively actuating elements and the optics component are configured such that the focal plane is maintained to coincide with or substantially coincide with the image plane. The passively actuating elements and the optics component adjust the distance an incident ray travels in the optics compensator when the temperature changes to thereby maintaining the focal plane to coincide with or substantially coincide with the image plane.

The disclosure relates to a method and an arrangement for actuating an element in a system for microlithography. According to an aspect in at least one degree of freedom an actuator force is exerted on the element via at least two actuator components. The actuator components are driven independently of one another for generating the actuator force. Driving is effected so that a thermal power introduced into the system on account of the generation of the actuator force by the actuator components deviates from a predefined constant value by not more than 20%.