A spectrometer for examining the spectrum of an optical emission source may include: an optical base body, a light entry aperture connected to the optical base body to couple light into the spectrometer, at least one dispersion element to receive the light as a beam of rays and generate a spectrum, and at least one detector for measuring the generated spectrum. A light path may run from the light entry aperture to the detector. A mirror group with at least two mirrors may be provided in a section of the light path between the light entry aperture and the at least one detector, in which the beam does not run parallel, which may compensate for temperature effects. In the mirror group, at least one mirror or the entire mirror group may be moveable relative to the optical base body and may be coupled to a temperature-controlled drive.

An electro-optic device includes a chip provided with a mirror and a drive element adapted to drive the mirror, a light-transmitting cover adapted to cover the mirror in a planar view, and a spacer having contact with one surface of the chip between the cover and the chip. The entire part of one surface of the chip having contact with the spacer is made of a firs material such as silicon oxide film having first thermal conductivity, and the spacer is made of a second material such as a quartz crystal having second thermal conductivity higher than the first thermal conductivity. The cover is made of a third material such as sapphire having third thermal conductivity higher than the second thermal conductivity.

The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (n.sub.R) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (n.sub.A) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (n.sub.A) is greater than the first number (n.sub.R). In accordance with one aspect, at least one of the actuators is arranged in a node of at least one natural vibration mode of the optical element.

An optical scanning device that scans incident light by causing a mirror to oscillate is provided. The optical scanning device includes a displacement sensor for detecting a swing angle of the mirror and a temperature sensor used for temperature compensation of the displacement sensor. The displacement sensor is a piezoelectric sensor that has a structure in which a lower electrode, a piezoelectric film, and an upper electrode are layered in this order. The temperature sensor is a resistance type temperature measuring body that has a same layer structure as the lower electrode.

The disclosure relates to a mirror module, in particular for a microlithographic projection exposure apparatus, including a mirror, which has a mirror body and an optically effective surface. The mirror body has a first material, and a supporting structure for connecting the mirror body to an objective structure. The supporting structure has a second material. The first material and the second material differ in terms of their coefficients of thermal expansion by less than 0.5*10.sup.6K.sup.1 in a temperature range around an operating temperature which is reached by the mirror module during operation in the region of the connection of the mirror body to the supporting structure.

Systems and methods for detecting trace gases utilize a resonance optical cavity and a coherent light source coupled to the cavity through a cavity coupling mirror. The cavity is constructed of a material having the same or a similar coefficient of thermal expansion as the mirror elements defining the cavity. The main (bulk) cavity material may be the same as the main (bulk) material that forms the mirror elements, or it may be different. Such resonant cavity configurations provide improved accuracy and stability as compared to existing cavity configurations based upon similar principles.

A DMD cooling apparatus and method includes a DMD chip configured on a substrate, and a heatsink located within and integrated into the substrate upon which the DMD is configured. A plurality of micro-channels can be formed on a backside of the substrate. The micro-channels are fabricated via microlithography in association with a fabrication of the DMD chip such that the heatsink integrated into the silicon substrate allows for direct heat removal from the substrate.

In illustrative modes of practice, heliostat devices integrate light reflecting panels with a composite supporting structure that helps to provide the resultant assembly with structural integrity and stiffness. Light reflecting panels are coupled to the supporting, composite structure by a plurality of flexible connecting elements. Advantageously, the composite approach of the present invention effectively separates structural and thermal compensation functions. Specifically, the composite support structure helps to provide desired structural properties. In the meantime, the flexible connecting elements couple the top, light reflecting panel to the support structure in a manner that helps to isolate the top, light reflecting panel from thermal stresses that otherwise could cause undue slope errors.

A method for producing a mirror comprising a plurality of optical surfaces, the method comprises: a step of producing elements, step of assembling the elements with each other from the rear, a step of fixing the elements from the rear onto a supporting structure of the mirror, and a step of polishing subsequent to the step of fixing the elements in order to obtain the optical surfaces of the mirror and correct the residual positioning defects of the optical surfaces and polish them.

A support structure for an optical reflecting telescope including a beam inlet a primary support for a primary mirror, a secondary support for a secondary mirror, struts which extend between the primary support and the secondary support, and a beam outlet. The support structure has a contour of a single shell hyperboloid. The primary support, the secondary support and the struts are configured so that they support the primary mirror and the secondary mirror so that a z-shaped beam path is provided between the beam inlet, the primary mirror, the secondary mirror and the beam outlet. The struts have identical length.