To compensate for a focal plane shifting away from an image plane due to a temperature change, an integrated image sensor and lens assembly includes an optical component and an optics compensator including passively actuating elements. The passively actuating elements couple the optical component to the inner surface of the lens mount. The passively actuating elements and the optics component are configured such that the focal plane is maintained to coincide with or substantially coincide with the image plane. The passively actuating elements and the optics component adjust the distance an incident ray travels in the optics compensator when the temperature changes to thereby maintaining the focal plane to coincide with or substantially coincide with the image plane.

A mirror element, in particular for a microlithographic projection exposure apparatus. According to one aspect, the mirror element includes a substrate (111, 112, 113, 114, 115, 211, 212, 213, 311a-311m, 411, 412, 413) and a layer stack (121, 122, 123, 124, 125, 221, 222, 223, 321a-321m, 421, 422, 423) on the substrate. The layer stack has at least one reflection layer system, wherein a curvature of the mirror element is generated on the basis of a setpoint curvature for a predetermined operating temperature by a non-vanishing bending force exerted by the layer stack, wherein the generated curvature varies by no more than 10% over a temperature interval (T) of at least 10 K.

A temperature insensitive locking apparatus for use with large optical mounts having at least one locking nut having an internal threaded portion adjacent to an internal tapered portion, at least one flexurized spring collet attached to a rigid base structure having an external threaded portion and a plurality of tapered flexures, a pivot shaft engaged with an optical yoke on a rotational axis of symmetry wherein when the internal threads of the locking nut engage with the external threads of the flexurized spring collet an increased level of a radial clamping force is provided around the pivot shaft.

The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (n.sub.R) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (n.sub.A) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (n.sub.A) is greater than the first number (n.sub.R). In accordance with one aspect, at least one of the actuators is arranged in a node of at least one natural vibration mode of the optical element.

The disclosure relates to a mirror module, in particular for a microlithographic projection exposure apparatus, including a mirror, which has a mirror body and an optically effective surface. The mirror body has a first material, and a supporting structure for connecting the mirror body to an objective structure. The supporting structure has a second material. The first material and the second material differ in terms of their coefficients of thermal expansion by less than 0.5*10.sup.6K.sup.1 in a temperature range around an operating temperature which is reached by the mirror module during operation in the region of the connection of the mirror body to the supporting structure.

A light detection device of the present invention includes: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.

An optical module includes a light-forming unit configured to form light, and a protective member surrounding and sealing the light-forming unit. The light-forming unit includes a laser diode, a first MEMS including a first mirror having a first reflective surface that reflects and scans light from the laser diode, the first mirror oscillating to form a first plane, and a second MEMS including a second mirror having a second reflective surface that reflects and scans light from the first mirror, the second mirror oscillating to form a second plane orthogonal to the first plane.

A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.

The present invention relates to a lamp system including a digital micro-mirror device (DMD) module, and more particularly, to a system and method for improving life characteristics of a DMD module. A DMD lamp and a method of controlling a DMD lamp of the present invention may improve a life of a DMD module by measuring a temperature of the DMD module in real time and controlling operations of the DMD module and a light source when the temperature of the DMD module rises above a certain temperature, and improve the life of the DMD module by adjusting a ratio of an ON mode/OFF mode of the DMD module to the same ratio and automatically compensating for the insufficient amount of light to reduce the consumption of an angle adjusting unit of a mirror to a minimum while maintaining the output amount of light.

The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element is tiltable about at least one tilting axis via at least one joint having a joint stiffness, comprising at least one actuator for exerting a force on the optical element, wherein the actuator has an actuator stiffness which at least partly compensates for the joint stiffness.