A component assembly includes a first component, such as an optical component, and a second component, such as a support component, having different coefficients of thermal expansion (CTEs). The component assembly also includes a spacer having a CTE matched to that of the first component, disposed between the first component and the second component. When the CTE of the first component is greater than that of the second component, the second component includes a protrusion, and the spacer includes a complementary opening for receiving the protrusion, such that a joint between the protrusion and the complementary opening is under compressive stress. The spacer also includes a mounting area for receiving the first component, and an air gap disposed between the first component and the protrusion.

The invention relates to an optical element including a resin body having a functional surface covered with a reflective coating capable of reflecting light beams, the reflective coating including a copper layer covering at least the functional surface, a nickel layer covering the copper layer, and a chromium layer covering the nickel layer.

In a beam splitter assembly 7, a beam splitter 22 is supported at three points by three bent portions 41 of a first spacer 24. Therefore, the beam splitter 22 can be prevented from being affected by the surface accuracy of a holder 21. Further, in the beam splitter assembly 7, the first spacer 24 faces the peripheral edge portion of the beam splitter 22. Each bent portion 41 is configured by bending each outer projection piece. Therefore, the external shape of the first spacer 24 can be prevented from becoming larger than the external shape of the beam splitter 22. And it is possible to suppress that the size of the holder 21 for providing the first spacer 24 becomes large. As a result, the miniaturization of the beam splitter assembly 7 can be realized.

A component assembly includes a first component, such as an optical component, and a second component, such as a support component, having different coefficients of thermal expansion (CTEs). The component assembly also includes a spacer having a CTE matched to that of the first component, disposed between the first component and the second component. When the CTE of the first component is greater than that of the second component, the second component includes a protrusion, and the spacer includes a complementary opening for receiving the protrusion, such that a joint between the protrusion and the complementary opening is under compressive stress. The spacer also includes a mounting area for receiving the first component, and an air gap disposed between the first component and the protrusion.

An optical assembly and a method of making an optical assembly in which additive manufacturing techniques are used to form a support structure either directly on an optical element or on a carrier that is subsequently bonded to an optical element.

An optical bench for supporting a reflex sight in a weapon-mounted sight assembly includes a reflex sight mounting portion having a first surface for receiving a reticle light source and a first reticle lens mounting arm spaced apart from a second reticle lens mounting arm. The first and second reticle lens mounting arms are attached to the reflex sight mounting portion and the first and second reticle lens mounting arms are configured to engage opposite sides of a reticle lens to support the reticle lens in an optical path of the reticle light source. The first and second reticle lens mounting arms are sufficiently resilient to accommodate thermal expansion and contraction of the reticle lens. In further aspects, a weapon sight assembly employing an optical bench and a method for manufacturing an optical bench are provided.

A Micro-Electromechanical System (MEMS) device having improved thermal management, and methods of fabricating the same are described. Generally, the device includes a piston layer suspended over a surface of a substrate by posts at four corners thereof, the piston layer including an electrostatically deflectable piston and a number of flexures through which the piston is coupled to the posts. A faceplate including an aperture through which the piston is exposed is suspended over the piston layer. Thermal sinking structures project from the surface of the substrate and extend through void spaces between the posts, the flexures and the piston of the piston layer to provide thermal management of the piston layer. The thermal posts substantially fill the void spaces without contacting either the flexures or the piston, and without altering a deflection gap between the piston and the surface of the substrate. Other embodiments are also described.

An optical module is provided. The optical module includes a substrate, an optical element, a cover plate, and a heat-dissipating device. The optical element is disposed on the substrate, wherein the optical element has a first side and a second side opposite the first side. The cover plate is disposed on the second side of the optical element, and extends over the substrate. In addition, the substrate is disposed between the heat-dissipating device and the optical element.

A MEMS device includes a movable mirror and a solid material below the mirror that removes more heat from the mirror and creates more viscous drag than if the solid material were absent while allowing free movement of the mirror. A MEMS system includes a movable mirror, transparent window, electronic package, and a fluid-tight cavity between the window and the electronic package filled with a fluid exhibiting higher thermal conductivity than air. Another system has a reflective movable mirror, transparent window, and a lid that holds the window close to the mirror without obstructing its free movement. There is greater vertical clearance between the MEMS system and lid than between the mirror and MEMS system. Another MEMS device has a movable mirror and a surrounding substrate coplanar to the mirror. A gap between the mirror and substrate is filled with fluid. Finger structures extend from the mirror into the gap.

Methods and apparatus for an upper reflector assembly for use in a process chamber are provided herein. In some embodiments, an upper reflector assembly for use in a process chamber includes a reflector mounting ring; and upper reflector plate coupled to the reflector mounting ring and having an upper surface and lower surface, wherein the lower surface includes a plurality of linear channels extending substantially parallel to each other across the lower surface, and wherein the upper reflector plate includes air cooling slots extending from the upper surface to the lower surface.