An optical assembly of a projection exposure apparatus for semiconductor lithography comprises an optical element and an actuator for deforming the optical element. The actuator is subjected to a bias voltage by a controller that is present. A projection exposure apparatus for semiconductor lithography comprises an optical assembly. A method for operating an actuator for deforming an optical element for semiconductor lithography comprises subjecting the actuator to a bias voltage by a controller.

An optical assembly of a projection exposure apparatus for semiconductor lithography comprises an optical element and an actuator for deforming the optical element. The actuator is subjected to a bias voltage by a controller that is present. A projection exposure apparatus for semiconductor lithography comprises an optical assembly. A method for operating an actuator for deforming an optical element for semiconductor lithography comprises subjecting the actuator to a bias voltage by a controller.

A microscope unit comprises: a main lens barrel of an imaging optical system; and an illumination lens barrel of an illumination optical system connected to the main lens barrel, the illumination optical system having: a collector lens that collects light that has been irradiated from a light source; a fly-eye lens allowing to be transmitted therethrough light from the collector lens; a first relay lens having lenses that relay light from the fly-eye lens; a field stop that stops down a range of light from the first relay lens; a second relay lens that relays to a beam splitter light from the first relay lens; and the beam splitter guiding at least a part of light incident thereon to the objective lens and allowing to be transmitted therethrough to a side of an imaging sensor at least a part of light incident thereon from the objective lens.

One example implementation of a mirror system comprises a carrier, and a first chip package arranged on a surface of the carrier and comprising a first MEMS mirror. Furthermore, the mirror system comprises a second chip package arranged on the surface of the carrier and comprising a second MEMS mirror. The mirror system furthermore comprises a reflective element arranged over the surface of the carrier and above the first chip package and the second chip package in such a way that a radiation that is incident in the mirror system and is reflected by the first MEMS mirror in the direction of the reflective element is reflected by the reflective element in the direction of the second MEMS mirror.

The present disclosure provides a method for preparing a MEMS micro mirror with electrodes on both sides. The method includes: providing a first base, forming an electrode lead groove in the first base; forming an insulating groove, a plurality of lower comb plates and a moving space groove in a first device layer to obtain a bonded structure layer; providing a second base bonded with the bonded structure layer to obtain a bonded piece; forming a frame, upper comb plates, movable micro light reflector, and elastic beams in a second device layer, with the movable micro light reflector located inside the frame, and the elastic beam connected with the frame and/or the movable micro light reflector; forming a metal reflecting layer, a first upper comb plate electrode, a first lower comb plate electrode, a second upper comb plate electrode and a second lower comb plate electrode.

The present disclosure is related to reducing shake and vibration in Head-Up Displays (HUDs) under dynamic operating conditions. The apparatus includes a curved mirror for projecting an image from a display unit on a windshield of a vehicle. The curved mirror has damping tape on its nonreflective side to absorb vibrational energy and shift the first natural frequency of the curved mirror to a higher frequency. The damping tape includes at least a viscoelastic adhesive layer and a constraining layer. The method for stabilizing the HUD includes applying damping tape selected and positioned to reduce vibrational amplitude and shift the first natural frequency of the curved mirror to a higher frequency.

The present disclosure is related to reducing shake and vibration in Head-Up Displays (HUDs) under dynamic operating conditions. The apparatus includes a curved mirror for projecting an image from a display unit on a windshield of a vehicle. The curved mirror has damping tape on its nonreflective side to absorb vibrational energy and shift the first natural frequency of the curved mirror to a higher frequency. The damping tape includes at least a viscoelastic adhesive layer and a constraining layer. The method for stabilizing the HUD includes applying damping tape selected and positioned to reduce vibrational amplitude and shift the first natural frequency of the curved mirror to a higher frequency.

A deployable measurement system for analyzing a rail of a railroad track includes a housing, a reflecting assembly coupled to the housing, a movement assembly coupled to the housing, and an optical measurement system disposed within the housing. Both the housing and the reflecting assembly are moveable between a stored position and a deployed position. The movement assembly includes a deployment assembly that moves the reflecting assembly from the stored position to the deployed position, and a retraction assembly that moves the reflecting assembly from the deployed position to the stored position. The optical measurement system emits and receives light. The reflecting assembly reflects the emitted light toward the rail. The reflecting assembly reflects light reflected off of the rail toward the optical measurement system. The light received by the optical measurement system is used to measure parameters related to the rail.

A deployable measurement system for analyzing a rail of a railroad track includes a housing, a reflecting assembly coupled to the housing, a movement assembly coupled to the housing, and an optical measurement system disposed within the housing. Both the housing and the reflecting assembly are moveable between a stored position and a deployed position. The movement assembly includes a deployment assembly that moves the reflecting assembly from the stored position to the deployed position, and a retraction assembly that moves the reflecting assembly from the deployed position to the stored position. The optical measurement system emits and receives light. The reflecting assembly reflects the emitted light toward the rail. The reflecting assembly reflects light reflected off of the rail toward the optical measurement system. The light received by the optical measurement system is used to measure parameters related to the rail.

A mirror device includes: a mirror including a rotation shaft pivotably supported, a coupling shaft separated from the rotation shaft, and a reflecting surface that reflects display light; a coupling member including a first coupling portion coupled to the rotation shaft and a second coupling portion coupled to the coupling shaft, and configured to pivot integrally with the mirror; a motor that is connected to the coupling member via a gear and that pivots the coupling member; and a first spring having one end side immovably fixed and another end side coupled to the coupling member, and configured to apply force to the coupling member in one rotation direction.