In accordance with some embodiments, a lithography method in semiconductor manufacturing is provided. The lithography method includes transmitting a main pulse laser to a zone of excitation through a first optic assembly. The lithography method further includes supplying a coolant to the first optic assembly and detecting a temperature of the coolant with a use of at least one sensor. The lithography method also includes adjusting a heat transfer rate between the coolant and the first optic assembly based on the temperature of the first optic assembly. In addition, the lithography method includes generating a droplet of a target material into the zone of excitation. The lithography method further includes exciting the droplet of the target material into plasma with the main pulse laser in the zone of excitation.

A mirror clip for use in an optical mirror housing for an optical emission spectrometer includes a body having a mirror seating portion, at least one hinge member for positioning and attaching the clip to an optical mirror housing, and at least one clamping member for releasably securing the mirror clip to the optical mirror housing. A mirror can be accommodated in the mirror seating portion. The at least one hinge member may include a hook to provide a releasable hinged connection between the mirror clip and the optical mirror housing.

An example includes: an electrode layer including address electrodes and a hinge base; a hinge layer over the electrode layer, the hinge layer including: a torsional hinge having a longitudinal axis between opposite ends; a first single spring tip and a second single spring tip spaced from the torsional hinge; and raised electrodes spaced from the torsional hinge, from the first single spring tip, and from the second single spring tip; and a mirror over the hinge layer, the mirror having a tilt axis on a diagonal between a first corner and a second corner, the tilt axis aligned with the longitudinal axis of the torsional hinge, the mirror having a first tilting corner and a second tilting corner opposing one another across the tilt axis, the first single spring tip under the first tilting corner and the second single spring tip under the second tilting corner.

An optical system is provided. The optical system includes a first optical module with a first light-entering hole, a second optical module with a second light-entering hole, and a third optical module with a third light-entering hole. The second light-entering hole is close to the first light-entering hole and the third light-entering hole. The focal length of the second optical module is different from the focal length of the first optical module and the focal length of the third optical module.

An optical system is provided. The optical system includes a first optical module with a first light-entering hole, a second optical module with a second light-entering hole, and a third optical module with a third light-entering hole. The second light-entering hole is close to the first light-entering hole and the third light-entering hole. The focal length of the second optical module is different from the focal length of the first optical module and the focal length of the third optical module.

An optical member driving mechanism is provided. The optical member driving mechanism includes a movable portion and a fixed portion. The movable portion includes a holder for holding an optical member with an optical axis. The movable portion is movable relative to the fixed portion. The fixed portion has a housing and a base. The housing is disposed on the base, and includes a top surface and a side surface. The top surface extends in a direction that is parallel to the optical axis. The side surface extends from an edge of the top surface in a direction that is not parallel to the optical axis. The side surface has a rectangular opening.

An optical member driving mechanism is provided. The optical member driving mechanism includes a movable portion and a fixed portion. The movable portion includes a holder for holding an optical member with an optical axis. The movable portion is movable relative to the fixed portion. The fixed portion has a housing and a base. The housing is disposed on the base, and includes a top surface and a side surface. The top surface extends in a direction that is parallel to the optical axis. The side surface extends from an edge of the top surface in a direction that is not parallel to the optical axis. The side surface has a rectangular opening.

A reflective element driving module includes a first reflective element, a second reflective element, and a driving assembly. The first reflective element has a first reflective surface, disposed to correspond to the incident light, wherein the light has an optical axis. The second reflective element has a second reflective surface, disposed to correspond to the light reflected by the first reflective element, and is movable relative to the first reflective element. The driving assembly is configured to drive the second reflective element to move relative to the first reflective element, wherein the first reflective surface and the second reflective surface face different directions.

There is provided a head-up display device including: a display configured to emit a display light ray therefrom, a reflection member configured to pivot around a rotation axis and reflect the display light ray to project a display image; and a housing configured to accommodate the reflection member. The reflection member has a plurality of ribs protruding from a surface on an opposite side to a reflection surface which reflects the display light ray, and the plurality of ribs have a portion in which a height on an outer side in a rotational direction centered at the rotation axis is lower than that on an inner side in the rotational direction.

A system and method for reducing power consumption and increasing reliability in a solar tracking system is disclosed. The solar tracker comprises a panel, at least one actuator configured to control the orientation of the panel, and a tracking controller. The tracking controller is configured to determine a minimum operating current for the at least one actuator based on a range of motion of the panel, and energize the at least one actuator based on the minimum operating current. The tracking controller determines the minimum operating current based on the range of motion of the panel, specifically the minimum current need to drive the panel through a measured range of motion equal to or substantial similar to the full mechanical range of motion of the panel. Based on the minimum operating current, solar tracker may generate messages to repair or replace an actuator or gearbox, for example.