Techniques are disclosed for optical distortion reduction in projection systems for scanning projection and/or lithography. A projection system includes an illumination system configured to generate illumination radiation for generating an image of an object to be projected onto an image plane of the projection system. The illumination system includes a field omitting illumination condenser configured to receive the illumination radiation from a radiation source and provide a patterned illumination radiation beam to generate the image of the object, wherein the patterned illumination radiation beam comprises an omitted illumination portion corresponding to a ridge line of a roof prism disposed within an optical path of the projection system.

A unit magnification microscope includes a first lens assembly (20) with a number of lenses forming an infinity-corrected objective and a second lens assembly (22), identical to the first lens assembly, deployed in an opposite orientation along a light path. A physical stop (26) is located at a central point along the light path between the lens assemblies. A focal plane array image sensor (28) is mounted at the external focal plane of the second lens assembly, such that light from an object at an object plane (30) is focused with unit magnification on the focal plane array image sensor after passing along the light path through the first lens assembly, the physical stop and the second lens assembly. A beam splitter (34) may be used to introduce illumination along the light path.

A unit magnification microscope includes a first lens assembly (20) with a number of lenses forming an infinity-corrected objective and a second lens assembly (22), identical to the first lens assembly, deployed in an opposite orientation along a light path. A physical stop (26) is located at a central point along the light path between the lens assemblies. A focal plane array image sensor (28) is mounted at the external focal plane of the second lens assembly, such that light from an object at an object plane (30) is focused with unit magnification on the focal plane array image sensor after passing along the light path through the first lens assembly, the physical stop and the second lens assembly. A beam splitter (34) may be used to introduce illumination along the light path.

A unit magnification microscope includes a first lens assembly (20) with a number of lenses forming an infinity-corrected objective and a second lens assembly (22), identical to the first lens assembly, deployed in an opposite orientation along a light path. A physical stop (26) is located at a central point along the light path between the lens assemblies. A focal plane array image sensor (28) is mounted at the external focal plane of the second lens assembly, such that light from an object at an object plane (30) is focused with unit magnification on the focal plane array image sensor after passing along the light path through the first lens assembly, the physical stop and the second lens assembly. A beam splitter (34) may be used to introduce illumination along the light path.

A unit magnification microscope includes a first lens assembly (20) with a number of lenses forming an infinity-corrected objective and a second lens assembly (22), identical to the first lens assembly, deployed in an opposite orientation along a light path. A physical stop (26) is located at a central point along the light path between the lens assemblies. A focal plane array image sensor (28) is mounted at the external focal plane of the second lens assembly, such that light from an object at an object plane (30) is focused with unit magnification on the focal plane array image sensor after passing along the light path through the first lens assembly, the physical stop and the second lens assembly. A beam splitter (34) may be used to introduce illumination along the light path.

A lens system for imaging includes, in order from the object side, a first lens group with negative refractive power, a second lens group with positive refractive power, a third lens group with positive refractive power, a stop, and a fourth lens group with positive refractive power. The third lens group includes, closest to the image plane side, a cemented lens on the object side of the stop and whose image plane-side surface includes a concave surface on the object side. The fourth lens group includes, closest to the object side, a cemented lens on the image plane side of the stop and whose object-side surface includes a concave surface on the image plane side. A radius of curvature g3er of the object side concave surface and the radius of curvature g4fr of the image plane side concave surface satisfy the following condition: 2.5≤|g4fr/g3er|≤4.0.

Techniques are disclosed for optical distortion reduction in projection systems for scanning projection and/or lithography. A projection system includes an illumination system configured to generate illumination radiation for generating an image of an object to be projected onto an image plane of the projection system. The illumination system includes a field omitting illumination condenser configured to receive the illumination radiation from a radiation source and provide a patterned illumination radiation beam to generate the image of the object, wherein the patterned illumination radiation beam comprises an omitted illumination portion corresponding to a ridge line of a roof prism disposed within an optical path of the projection system.

A lens system includes a first lens array assembly including a first plurality of cells, each cell of the first plurality of cells configured to exhibit a pair of first Fourier transform lenses, and a second lens array assembly including a second plurality of cells, each cell of the second plurality of cells configured to exhibit a pair of second Fourier transform lenses. The first and second lens array assemblies are positioned relative to one another along an optical axis of the lens system such that light diverging from an object at a plane disposed at an object conjugate distance from the first lens array assembly reconverges at an image plane after passing through the first and second lens array assemblies. The image plane is disposed at an image conjugate distance from the second lens array assembly in accordance with the object conjugate distance.

A lens system includes a first lens array assembly including a first plurality of cells, each cell of the first plurality of cells configured to exhibit a pair of first Fourier transform lenses, and a second lens array assembly including a second plurality of cells, each cell of the second plurality of cells configured to exhibit a pair of second Fourier transform lenses. The first and second lens array assemblies are positioned relative to one another along an optical axis of the lens system such that light diverging from an object at a plane disposed at an object conjugate distance from the first lens array assembly reconverges at an image plane after passing through the first and second lens array assemblies. The image plane is disposed at an image conjugate distance from the second lens array assembly in accordance with the object conjugate distance.

Multilayer high-dynamic-range head-mounted display.