Patent classifications
G02B17/0896
Wafer Defect Inspection and Review Systems
Imaging objectives and inspection systems equipped with such imaging objectives are disclosed. The imaging objective may include a front objective configured to produce a diffraction limited intermediate image. The imaging objective may also include a relay configured to receive the intermediate image produced by the front objective. The relay may include three spherical mirrors positioned to deliver a projection of the intermediate image to a fixed image plane.
Projection optical system and image display apparatus including a refraction optical system and first and second reflecing surfaces
There is provided a projection optical system capable of projecting an image formed on an image forming unit on a projection plane, which has an extremely short projection distance and a small size.
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element
A film element of an EUV-transmitting wavefront correction device is arranged in a beam path and includes a first layer of first layer material having a first complex refractive index n.sub.1=(1−δ.sub.1)+iβ.sub.1, with a first optical layer thickness, which varies locally over the used region in accordance with a first layer thickness profile, and a second layer of second layer material having a second complex refractive index n.sub.2=(1−δ.sub.2)+iβ.sub.2, with a second optical layer thickness, which varies locally over the used region in accordance with a second layer thickness profile. The first and second layer thickness profiles differ. The deviation δ.sub.1 of the real part of the first refractive index from 1 is large relative to the absorption coefficient β.sub.1 of the first layer material and the deviation δ.sub.2 of the real part of the second refractive index from 1 is small relative to the absorption coefficient β.sub.2 of the second layer material.
Magnification compensation and/or beam steering in optical systems
Techniques are disclosed for magnification compensation and/or beam steering in optical systems. An optical system may include a lens system to receive first radiation associated with an object and direct second radiation associated with an image of the object toward an image plane. The lens system may include a set of lenses, and an actuator system to selectively adjust the set of lenses to adjust a magnification associated with the image symmetrically along a first and a second direction. The lens system may also include a beam steering lens to direct the first radiation to provide the second radiation. In some examples, the lens system may also include a second set of lenses, where the actuator system may also selectively adjust the second set of lenses to adjust the magnification along the first or the second direction. Related methods are also disclosed.
Near-eye display system
An optical subsystem of a near-eye display system provides for projecting light of a virtual image of image content to an eye location, and provides for collecting light of the virtual image onto an exit pupil on a surface proximate to an outer surface of an eye when at the eye location. A subpupil modulator within an aperture in cooperation with the optical subsystem provides for forming a plurality of subpupils within the exit pupil, at least two of which overlap by at least 20 percent, and provides for less than all of the light of the virtual image associated with one or more less than all of the plurality of subpupils to be projected to the eye location.
Optical system
Optical systems including a partial reflector, a reflective polarizer, and a retarder disposed between the partial reflector and the reflective polarizer are described. The reflective polarizer is curved about two orthogonal axes and includes at least one layer that is substantially optically uniaxial at at least one location. The optical system is adapted to provide an adjustable focus.
TELEPHOTO OPTICAL IMAGING SYSTEM AND ZOOM CAMERA APPARATUS
A telephoto optical imaging system and zoom camera apparatus. The telephoto optical imaging system includes, sequentially from an object side to an image side along an optical axis, a first lens having positive refractive power, a second lens having negative refractive power, an optical path turning prism, and a triangular prism. Distance T from the object-side surface of the first lens to an imaging plane of the telephoto optical imaging system in a normal direction of the imaging plane and the total effective focal length F1 of the telephoto optical imaging system satisfy T/F1<0.6. The zoom camera apparatus includes the telephoto optical imaging system and a short-focus optical imaging system arranged in parallel with the telephoto optical imaging system. A total effective focal length F1 of the telephoto optical imaging system and a total effective focal length F2 of the short-focus optical imaging system satisfy F1/F2>5.
Imaging optical system, projection type display device, and imaging apparatus
The imaging optical system forms a first intermediate image at a position conjugate to a magnification side imaging surface and a second intermediate image at a position closer to a reduction side than the first intermediate image on an optical path and conjugate to the first intermediate image. The imaging optical system consists of a first optical system, a second optical system, and a third optical system in order from the magnification side to the reduction side along the optical path. The imaging optical system does not include a reflective member having a power.
Catadioptric system for mid-wave thermal imaging equipment
The invention proposed the catadioptric system, which consists of two main components: the first component comprising the two reflective mirrors, in which surface distortion of mirror 1 is parabolic, surface distortion of mirror 2 is aspheric; the second component is a relay consisting of three lenses: lens 1, lens 2, and lens 3 arranged after the medial image plane correspondingly; the second component helps reduce aberration to ensure receiving good quality image at a plane of the sensor.
Reflective eyepiece optical system and head-mounted near-to-eye display device
The present invention relates to a reflective eyepiece optical system and a head-mounted near-to-eye display apparatus. The system includes: a first lens group, and a first optical element and a second lens group for transmitting and reflecting a light from a miniature image displayer. The second lens group includes an optical reflection surface, and the optical reflection surface is an optical surface farthest from a human eye viewing side in the second lens group. The optical reflection surface is concave to a human eye viewing direction. The first optical element reflects the light refracted by the first lens group to the second lens group, and then transmits the light refracted, reflected, and refracted by the second lens group to the human eye.