G02B19/0028

Adjustment and Design Method of Illumination System Matched with Multiple Objective Lenses in Extreme Ultraviolet Lithography Machine

Provided in the present invention is an adjustment and design method of an illumination system matched with multiple objective lenses in an extreme ultraviolet lithography machine; the illumination system to which the method is applied comprises a light source, a collection lens, a field compound eye, a pupil compound eye and a relay lens group; the method specifically comprises the steps: before a projection objective lens of an extreme ultraviolet lithography machine is replaced, calculating aperture angles of emergent ray of a relay lens A on a meridian plane and a sagittal plane by means of ray tracing; after the projection objective lens of the extreme ultraviolet lithography machine is replaced, taking out a central point of a exit pupil plane as an object point for ray tracing; adjusting inclination angles and positions of the relay lens A and a relay lens B, and adjusting inclination angles of central compound eye units of the pupil compound eye and the field compound eye, till an image plane of a current illumination system approximates to an arc-shaped image plane corresponding to the projection objective lens. By adjusting the illumination system on the basis of the adjustment method of the present invention, an illumination system matched with the projection objective lens system can be obtained, which dramatically reduces the cost of designing a projection lithography machine.

Light guiding unit, light source apparatus, and projector

A light guiding unit includes a light guiding member that light enters and an angle converter that the light from the light guiding member enters. The light guiding member has a side surface and a light exiting end surface which intersects the side surface and via which the light exits. The angle converter includes a light incident section on which the light from the light guiding member is incident, a light exiting section via which the light incident on the angle converter exits, and a reflection section that reflects the light incident via the light incident section toward the light exiting section. The refractive index of the interior of the angle converter is greater than the refractive index of air. The refractive index of the interior of the light guiding member is greater than the refractive index of the interior of the angle converter.

Inflatable divergent Fresnel lens and non-imaging concentrator based non-tracking solar concentrator
11671053 · 2023-06-06 · ·

An inflatable divergent Fresnel lens and non-imaging CPC based non-tracking high concentration ratio solar concentrator system comprises a flexible domed divergent Fresnel lens, and an inflatable non-imaging CPC concentrator with a domed transparent top cover and a flat transparent bottom cover. Where, the flexible domed divergent Fresnel lens is attached onto the said domed transparent cover of the said inflatable non-imaging CPC concentrator. When in operation, the oblique incident sunlight including beam light and diffuse light onto the domed divergent Fresnel lens, is deflected to change its direction, and consequently change its original incident angle relative to the said CPC concentrator from large to small, then eventually fall in the acceptance half-angle to be concentrated by the said CPC in large concentration ratio.

Lens and lighting device
09784430 · 2017-10-10 · ·

Disclosed is a lens (100) for a lighting device (10) comprising a solid state lighting element (20), the lens comprising a light exit surface (110); a central lens portion (120) opposite said light exit surface; an inner annular reflective element (130) opposite said light exit surface and extending away from said light exit surface by a first distance (d1), said inner annular reflective element delimiting said central lens portion; and a side surface defined by an outer annular reflective element (140) opposite said light exit surface and extending away from said light exit surface by a second distance (d2) that is larger than the first distance such that the outer annular reflective element extends beyond the inner annular reflective element. A lighting device such as a light bulb including such as lens is also disclosed.

Optical devices for light mixing
09784433 · 2017-10-10 · ·

An optical device includes a lower surface that is substantially transparent. The optical device further includes an upper surface disposed opposite the lower surface and having a first specular layer disposed thereon. The optical device further includes a first lateral surface extending between the lower surface and the upper surface and having a second specular layer disposed on at least a portion thereof.

ILLUMINATION APPARATUS FOR PRODUCING A RECTANGULAR LIGHT DISTRIBUTION IN AN ILLUMINATION PLANE
20170284637 · 2017-10-05 ·

An illumination apparatus for providing light and for illuminating an illumination plane with a rectangular light distribution is provided. The illumination apparatus includes at least one light source configured to generate light, a collimation optical unit configured to collimate the light, a condenser optical unit configured to shape a rectangular angular distribution of the light coming from the collimation optical unit, and a freeform optical unit having at least one freeform area for modifying the angular distribution such that a rectangular light distribution is produced in an illumination plane that is optically connected downstream.

Light-emitting diode input for hybrid solar lighting systems
09777900 · 2017-10-03 · ·

A hybrid lighting system is disclosed in which light emitting diodes (LEDs) provide input light when illumination with solar light is unavailable. Light from LEDs are propagated through an optical fiber, which delivers the light to a point of illumination. The disclosed system reduces the amount of electricity and electric conduit for light in areas using hybrid lighting systems.

Optical cross-coupling mitigation systems for wavelength beam combining laser systems
09778448 · 2017-10-03 · ·

In various embodiments, wavelength beam combining laser systems incorporate optical cross-coupling mitigation systems and/or engineered partially reflective output couplers in order to reduce or substantially eliminate unwanted back-reflection of stray light.

HYBRID HEADLIGHT FOR AIRCRAFT
20170275021 · 2017-09-28 · ·

This beam shaper for an aircraft headlight comprises a light input surface (3) and a light output surface (6), the output surface comprises prism-shaped areas so as to deflect a light beam transmitted between the light input surface and output surface by guiding the beam in two directions (D1, D2) which are oblique relative to an optical axis (A) of the beam shaper.

LIGHT SOURCE UNIT AND PROJECTOR
20170248837 · 2017-08-31 ·

A light source unit according to an embodiment has a first light source which emits light in a first wavelength range, a second light source which emits light in a second wavelength range which differs from the light in the first wavelength range, a dichroic mirror to which the light in the first wavelength range and the light in the second wavelength range are incident from directions which differ from each other and which reflects or transmits the light in the first wavelength range and the light in the second wavelength range, and an optical device which is disposed on an optical path between the dichroic mirror and the second light source, and the optical device is a spectral member to which a coating is applied which transmits the light in the second wavelength range and reflects or absorbs the light in the first wavelength range.