G02B19/0095

Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method

In some embodiments of the disclosed subject matter, an extreme ultraviolet (EUV) light source is provided. The EUV light source comprises: a droplet nozzle array droplet nozzle array comprising multiple nozzles arranged in a ring, the nozzles are configured for sequentially ejecting droplets towards an annular radiation position; a laser source for generating a laser beam, wherein the laser beam is controlled to rotate and sequentially bombard the droplets that reach the annular radiation position; and an integrated rotary structure located between the droplet nozzle array and the laser source, the integrated rotary structure includes: a condenser mirror comprising a first surface and a second surface opposing to the first surface, and a motor driving shaft that is integrally connected with the condenser mirror.

ILLUMINATION OPTIC FOR EUV PROJECTION LITHOGRAPHY
20180074410 · 2018-03-15 ·

An illumination optical unit for EUV projection lithography illuminates an object field with illumination light. The illumination optical unit has a first facet mirror including a plurality of first facets on a first mirror carrier. Disposed downstream of the first facet mirror is a second facet mirror including a plurality of second facets arranged on a second mirror carrier around a facet arrangement center. Partial beams of the illumination light are guided superposed on one another into the object field, respectively via illumination channels which have one of the first facets and one of the second facets. Second maximum angle facets are arranged at the edge of the second mirror carrier. The second maximum angle facets predetermine maximum illumination angles of the illumination light which deviate maximally from a chief ray incidence on the object field.

Illumination optical unit and illumination system for EUV projection lithography
09915874 · 2018-03-13 · ·

An illumination optical unit for EUV projection lithography serves for illuminating an illumination field in which an object field of a downstream imaging optical unit is arranged. An object displaceable in an object displacement direction is in turn arrangeable in the object field. A facet mirror of the illumination optical unit has a plurality of facets arranged alongside one another and serving for the reflective, superimposing guidance of partial beams of a beam of EUV illumination light to the object field. The facet mirror is arranged such that a position of the respective facet on the facet mirror and an impingement region of an illumination light partial beam on the respective facet of the facet mirror predefine an illumination direction for the field points of the object field.

Receivers for optical narrowcasting
09917643 · 2018-03-13 · ·

Systems and methods for optical narrowcasting are provided for transmitting various types of content. Optical narrowcasting content indicative of the presence of additional information along with identifying information may be transmitted. The additional information (which may include meaningful amounts of advertising information, media, or any other content) may also be transmitted as optical narrowcasting content. Elements of an optical narrowcasting system may include optical transmitters and optical receivers which can be configured to be operative at distances ranging from, e.g., 400 meters to 1200 meters. Moreover, the elements can be implemented on a miniaturized scale in conjunction with small, user devices such as smartphones, thereby also realizing optical ad-hoc networking, as well as interoperability with other types of data networks. Optically narrowcast content can be used to augment a real-world experience, enhance and/or spawn new forms of social-media and media content.

Systems and methods for tiling optically narrowcast signals
09912406 · 2018-03-06 · ·

Systems and methods for optical narrowcasting are provided for transmitting various types of content. Optical narrowcasting content indicative of the presence of additional information along with identifying information may be transmitted. The additional information (which may include meaningful amounts of advertising information, media, or any other content) may also be transmitted as optical narrowcasting content. Elements of an optical narrowcasting system may include optical transmitters and optical receivers which can be configured to be operative at distances ranging from, e.g., 400 meters to 1200 meters. Moreover, the elements can be implemented on a miniaturized scale in conjunction with small, user devices such as smartphones, thereby also realizing optical ad-hoc networking, as well as interoperability with other types of data networks. Optically narrowcast content can be used to augment a real-world experience, enhance and/or spawn new forms of social-media and media content.

Transmitters for optical narrowcasting
09912412 · 2018-03-06 · ·

Systems and methods for optical narrowcasting are provided for transmitting various types of content. Optical narrowcasting content indicative of the presence of additional information along with identifying information may be transmitted. The additional information (which may include meaningful amounts of advertising information, media, or any other content) may also be transmitted as optical narrowcasting content. Elements of an optical narrowcasting system may include optical transmitters and optical receivers which can be configured to be operative at distances ranging from, e.g., 400 meters to 1200 meters. Moreover, the elements can be implemented on a miniaturized scale in conjunction with small, user devices such as smartphones, thereby also realizing optical ad-hoc networking, as well as interoperability with other types of data networks. Optically narrowcast content can be used to augment a real-world experience, enhance and/or spawn new forms of social-media and media content.

System for measuring thermal degradation of composites and method of making and using

A system for measuring thermal degradation of composites includes a cylindrical body; a bottom cover having a lower central aperture; an upper concave mirror facing the bottom cover with an upper central orifice concentric with a central axis of the body; a lower concave mirror facing the upper concave mirror with a lower central orifice concentric with the central axis; a source of actinic radiation between the upper concave mirror and the lower concave mirror on the central axis to direct actinic radiation through the lower central orifice and lower central aperture; and a camera with an image sensor positioned concentrically relative to the upper central orifice; wherein the bottom cover is adjustable relative to the cylindrical body to provide a focusing function for the image sensor by varying the distance from the lower central orifice and the upper reflective surface.

Integrating cone for an illumination device

A device for increasing the optical power of a solid state light source in the green and/or yellow bands, is disclosed. The device has an integral body having an ingress surface configured to receive light from an emitting portion of the solid state light source, an egress surface substantially opposite the ingress surface, and a recess formed within the body. The recess has an input opening in the ingress surface, an output opening in the egress surface, and a recess surface within the body extending between the input opening and the output opening. The recess surface is configured to reflect visible light with Lambertian scatter characteristics.

GRAPHICAL USER INTERFACE SYSTEMS AND METHODS FOR OPTICAL NARROWCASTING
20180054571 · 2018-02-22 ·

Systems and methods for optical narrowcasting are provided for transmitting various types of content. Optical narrowcasting content indicative of the presence of additional information along with identifying information may be transmitted. The additional information (which may include meaningful amounts of advertising information, media, or any other content) may also be transmitted as optical narrowcasting content. Elements of an optical narrowcasting system may include optical transmitters and optical receivers which can be configured to be operative at distances ranging from, e.g., 400 meters to 1200 meters. Moreover, the elements can be implemented on a miniaturized scale in conjunction with small, user devices such as smartphones, thereby also realizing optical ad-hoc networking, as well as interoperability with other types of data networks. Optically narrowcast content can be used to augment a real-world experience, enhance and/or spawn new forms of social-media and media content.

REAL-TIME VARIABLE PARAMETER MICRO-NANO OPTICAL FIELD MODULATION SYSTEM AND INTERFERENCE LITHOGRAPHY SYSTEM
20180039183 · 2018-02-08 ·

A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.