An imaging device according to the present invention includes: first and second image sensors that respectively capture a first optical image and a second optical image having parallax with each other; a first imaging optical system that forms the first optical image on a light receiving surface of the first image sensor; and a second imaging optical system that forms the second optical image on a light receiving surface of the second image sensor. Each of focal positions of the first imaging optical system and the second imaging optical system is deviated along an optical axis direction and is positioned within mutual depth of field.

An imaging system may include a sample stage having a surface to support a sample to be scanned by the imaging system; an optical stage having an objective lens, the optical stage being positionable relative to the sample stage; an actuator physically coupled to at least one of the sample stage and the optical stage to move the sample stage relative to the optical stage; a servo circuit to control the actuator; a first set of control parameters to control the servo circuit; a second set of control parameters to control the servo circuit; and a servo control circuit to apply the first set of control parameters to the servo circuit when the imaging system is operating in a first mode of operation and to apply the second set of control parameters to the servo circuit when the imaging system is operating in a second mode of operation.

A lens module includes a printed circuit board, a lens component, and at least two electric conductors. The lens component includes a first lens and a microscope base, the first lens is formed on the microscope base, the microscope base is formed on the printed circuit board, and the first lens is electrically conductive and deforms under voltage. The first lens is electrically connected to the printed circuit board by the electric conductors. The printed circuit board outputs a voltage to the first lens through the electric conductors; the first lens deforms according to the voltage thereby changing a focal distance of light passing through the first lens. The disclosure also relates to an electronic device using the lens module. The lens module can has a zoom function and has a litter volume.

A method and a device are provided which enables a simple and fast Raman and/or fluorescence measurement even on uneven specimen surfaces; additionally, the invention should make it possible to confocally image a plane or a surface, in particular a surface of a specimen, i.e. with the aid of confocal microscopy.

A three-axis actuator for a portable microscope have been provided, which may allow foot control of the three axes for providing efficient and effective movement of the portable microscope for use in various applications such as in surgery in a mobile setting. This includes an XY actuator, a Z actuator, and a foot pedal. The XY actuator attaches to the microscope and stands and moves the microscope in X and Y planes. The foot pedal controls the individual actuators using radio frequency transmission. The Z actuator moves the microscope objective lens in a Z plane for focusing the microscope.

A magnified observation apparatus includes an illuminator, a feature quantity calculator, and an illumination controller. The illumination controller selectively performs first and second sequences. In the first sequence, the illuminator is operated in the first lighting pattern, and a display is operated to display a live image of the observation object that is irradiated with the first lighting pattern by a display controller. In the second sequence, the illuminator is operated in the second lighting pattern as at least one of the different illumination directions that is selected based on the feature quantities of the image data, which are calculated correspondingly to the different illumination directions by the feature quantity calculator, and the display is operated to display by the display controller an image of the observation object that is captured when the observation object is irradiated with the second lighting pattern.

A method for metrology includes directing at least one illumination beam to illuminate a semiconductor wafer on which at least first and second patterned layers have been deposited in succession, including a first target feature in the first patterned layer and a second target feature in the second patterned layer, overlaid on the first target feature. A sequence of images of the first and second target features is captured while varying one or more imaging parameters over the sequence. The images in the sequence are processed in order to identify respective centers of symmetry of the first and second target features in the images and measure variations in the centers of symmetry as a function of the varying image parameters. The measured variations are applied in measuring an overlay error between the first and second patterned layers.

A laser scanning imaging system including: a first beam scanner; a first set of relay lenses; a second beam scanner; a second set of relay lenses; an objective lens; wherein the first beam scanner is configured to receive an input laser beam and scan the laser beam about one or more axes; the first set of relay lenses is configured to expand the laser beam scanned by the first beam scanner and conjugate a scanning plane of the first beam scanner with a scanning plane of the second beam scanner; the second beam scanner is configured to scan the laser beam relayed by the first set of relay lenses about one or more axes; the second set of relay lenses is configured to expand the laser beam scanned by the second beam scanner and project the scanning plane of the second beam scanner to a pupil of the objective lens.

An incubator and shelf with integrated microscope and wireless transmitter comprises a shelf adapted for use inside an incubator; a microscope integrated into the shelf; and a wireless (such as Wi-Fi) transmitter that wirelessly transmits an image produced by the microscope. Embodiments may be powered by the incubator, and may have an inverted microscope that views an object from below.

A separate microscopy system, applied to observe a specimen positioned on a stage and further to image the specimen on an imaging device, includes an ocular-lens unit, an adjustment unit and an objective-lens unit. The ocular-lens unit has an ocular-lens optical axis, and is manipulated to make the ocular-lens optical axis perpendicular to the stage. The adjustment unit is assembled to a side of the ocular-lens unit close to the stage. The objective-lens unit has an objective-lens optical axis, and is assembled to a side of the adjustment unit close to the stage. The objective-lens unit is manipulated to be adjusted by the adjustment unit to make the ocular-lens optical axis, the objective-lens optical axis and the imaging device co-axially and perpendicular to the stage, such that the specimen can be imaged at an imaging center position of the imaging device. In addition, an adjusting method thereof is also provided.