An image capturing mechanism includes: an optical measurement unit for optically observing a sample; a temperature conditioning unit for heating or cooling the sample, the temperature conditioning unit being mounted on a table by means of a support member; and a moving mechanism for moving the table in order to photograph the sample. The temperature conditioning unit includes: a temperature conditioning part for heating or cooling the sample, abutted on one face of a Peltier device; a heat conducting member abutted on the other face of the Peltier device; and the support member for holding the temperature conditioning part and the heat conducting member and securing the temperature conditioning part and the heat conducting member on the table. At least the heat conducting member is connected to a cooling means, and the thermal conductivity of the support member is low relative to the thermal conductivity of the heat conducting member.

An image capturing mechanism includes: an optical measurement unit for optically observing a sample; a temperature conditioning unit for heating or cooling the sample, the temperature conditioning unit being mounted on a table by means of a support member; and a moving mechanism for moving the table in order to photograph the sample. The temperature conditioning unit includes: a temperature conditioning part for heating or cooling the sample, abutted on one face of a Peltier device; a heat conducting member abutted on the other face of the Peltier device; and the support member for holding the temperature conditioning part and the heat conducting member and securing the temperature conditioning part and the heat conducting member on the table. At least the heat conducting member is connected to a cooling means, and the thermal conductivity of the support member is low relative to the thermal conductivity of the heat conducting member.

A system for controlling a filling level of a reservoir filled with a liquid includes the reservoir configured to be filled with the liquid at least up to a maximum filling level. The system also includes a probe including a probe body, at least a section of the probe body extending, in a height dimension of the reservoir, from a first position to a second position, the first position being lower than the second position, and the second position being above the maximum filling level, and further including a temperature dependent sensor configured to generate a sensor signal based on a temperature at the second position, the temperature depending on the filling level. The system also includes a controller for controlling the filling level of the reservoir depending on the sensor signal such that the filling level is kept constant.

A viewer device for observing and recording images of materials, such as chemical and biological materials is described. The viewer device includes a housing that provides a chamber for receiving a sample or a sample container that contains a sample of a material (e.g., chemical or biological material). The housing includes a viewing window for observing the sample, a port through which the sample or the sample container can be introduced to or removed from the chamber, and a coupling mechanism configured to removably and replaceably couple the housing to an observational device, such as a camera equipped device.

An EUV photomask inspection apparatus includes a plurality of optical systems respectively forming different confocal points in a mask structure including an EUV photomask and a pellicle on the EUV photomask. A first optical system among the plurality of optical systems includes a first light source emitting first light having a wavelength in a visible light range, a beam splitter transmitting or reflecting the first light, an objective lens configured to allow the first light to pass through at least a portion of the mask structure to form a first focus in the mask structure, a first light detector configured to detect first reflected light reflected from the mask structure by the incident first light, and a pinhole plate in front of the first light source. The first light detector includes a detection module including a PMT and an APD, and a thermoelectric cooling.

An EUV photomask inspection apparatus includes a plurality of optical systems respectively forming different confocal points in a mask structure including an EUV photomask and a pellicle on the EUV photomask. A first optical system among the plurality of optical systems includes a first light source emitting first light having a wavelength in a visible light range, a beam splitter transmitting or reflecting the first light, an objective lens configured to allow the first light to pass through at least a portion of the mask structure to form a first focus in the mask structure, a first light detector configured to detect first reflected light reflected from the mask structure by the incident first light, and a pinhole plate in front of the first light source. The first light detector includes a detection module including a PMT and an APD, and a thermoelectric cooling.

One embodiment includes a system for mounting a specimen on a slide, the system having an immersion chamber, a stage, and a pump. The immersion chamber is configured to hold a liquid and comprises at least one wall, a closed bottom, and an open top. The stage is configured to support the slide, and the stage is arranged within the immersion chamber such that the specimen may be supported substantially above the stage by the liquid. The pump is configured to draw the liquid from the immersion chamber such that the level of liquid in the immersion chamber decreases and the specimen is dispensed onto the slide.

One embodiment includes a system for mounting a specimen on a slide, the system having an immersion chamber, a stage, and a pump. The immersion chamber is configured to hold a liquid and comprises at least one wall, a closed bottom, and an open top. The stage is configured to support the slide, and the stage is arranged within the immersion chamber such that the specimen may be supported substantially above the stage by the liquid. The pump is configured to draw the liquid from the immersion chamber such that the level of liquid in the immersion chamber decreases and the specimen is dispensed onto the slide.

A vertical support rigidly mounted to a planar base positions and supports a cryocooler expander unit off axis and away from a sample to be examined. The sample support is likewise rigidly mounted to the planar base with a rigidly mounted sample housing therein. The cryocooler expander unit is suspended in the vertical support by spring dampening bearings. A pair of opposing flexible vacuum bellows connects the cryocooler expander unit to the sample housing and vertical support. This configuration isolates the sample from vibration. Flexible thermal links associated with a predictive electronic closed loop control sequence maintains sample temperature.

A vertical support rigidly mounted to a planar base positions and supports a cryocooler expander unit off axis and away from a sample to be examined. The sample support is likewise rigidly mounted to the planar base with a rigidly mounted sample housing therein. The cryocooler expander unit is suspended in the vertical support by spring dampening bearings. A pair of opposing flexible vacuum bellows connects the cryocooler expander unit to the sample housing and vertical support. This configuration isolates the sample from vibration. Flexible thermal links associated with a predictive electronic closed loop control sequence maintains sample temperature.