An apparatus includes a reflecting element with first, second and third reflecting surfaces, and a receiving element configured to receive a light flux from a light source reflected by the reflecting element. A value of an inner product of a unit normal vector of the first reflecting surface and a unit normal vector of the second reflecting surface, a value of an inner product of the unit normal vector of the first reflecting surface and a unit normal vector of the third reflecting surface, and a value of an inner product of the unit normal vector of the second reflecting surface and the unit normal vector of the third reflecting surface are appropriately set.

An example includes a system, having: an illumination source configured to produce illumination light; and a spatial light modulator (SLM) optically coupled to the illumination source, the SLM comprising an array of picture elements. The SLM is configured to: receive the illumination light; direct, by a first portion of the picture elements, on state light in a first direction; and direct, by a second portion of the picture elements, off state light in a second direction. The example system includes imaging optics optically coupled to the SLM, the imaging optics configured to receive the on state light from the SLM and to project an image as an image portion of a beam; and non-imaging optics optically coupled to the SLM, the non-imaging optics configured to receive the off state light from the SLM and to project the off state light as part of the beam.

An irradiation device for additively manufacturing three-dimensional objects may include a beam generation device configured to generate an energy beam, an optical modulator including a micromirror array disposed downstream from the beam generation device, and a focusing lens assembly disposed downstream from the optical modulator. The micromirror array may include a plurality of micromirror elements configured to reflect a corresponding plurality of beam segment of the energy beam along a beam path incident upon the focusing lens assembly. The focusing lens assembly may include one or more lenses configured to focus the plurality of beam segments such that for respective ones of a plurality of modulation groups including a subset of micromirror elements, a corresponding subset of beam segments are focused to at least partially overlap with one another at a combination zone corresponding to the respective modulation group.

A reaction compensation device includes a drive mechanism driving a first movable part with respect to a base, a reaction mass drive mechanism driving a second movable part with respect to the base; and a first relative position sensor measuring a relative position between the first movable part and the base. There is also a second relative position sensor measuring a relative position between the second movable part and the base, a first control system controlling the drive mechanism by taking in a signal outputted from the first relative position sensor as a feedback signal in response to a command value, and a second control system correcting the command value using a correction parameter for adjusting a difference between mass properties of the drive mechanism and reaction mass drive mechanism and for controlling the reaction mass drive mechanism.

A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.

A laser projection device includes at least one first reflector element, which is linearly movable. A period of the at least one first reflector element corresponds to a period of time for reproducing a single. The laser projection device includes at least one second reflector element, which is movable in a sinusoidal manner, a semiperiod of a sine corresponding to one line. The at least one first reflector element and the at least one second reflector element are movable about two axes at least substantially perpendicular to each other. The laser projection device includes at least one control and/or regulating unit, which is configured to control and/or regulate the at least one first reflector element.

An optical system is provided. The optical system includes a first optical module with a first light-entering hole, a second optical module with a second light-entering hole, and a third optical module with a third light-entering hole. The second light-entering hole is close to the first light-entering hole and the third light-entering hole. The focal length of the second optical module is different from the focal length of the first optical module and the focal length of the third optical module.

A metal substrate supported by a wiring substrate includes a first extending portion and a first connection portion connected to the first extending portion. The first connection portion includes a first region facing a portion of a wiring substrate in a Z-axis direction, a second region being continuous from the first region, and a third region being continuous from the second region. When viewed in the Z-axis direction, in a direction perpendicular to a connection direction in which the third region is connected to the second region, a width of the second region is larger than a width of the third region. A first bonding member bonding the wiring substrate and the metal substrate includes a first portion disposed between the portion and the first region, and a second portion being continuous from the first portion. The second portion reaches the second region but does not reach the third region.

A metal substrate supported by a wiring substrate includes a movable portion, a first extending portion, a first coupling portion that couples the first extending portion and the movable portion, and a first connection portion connected to the first extending portion. The first connection portion includes a first fixing region fixed to the wiring substrate, and a first connection region connected to the first extending portion and to the first fixing region. The first connection region includes a first bent portion. The first bent portion has a first outer edge on a movable portion side, and a second outer edge opposite the movable portion, and each of the first outer edge and the second outer edge is bent toward the movable portion side when viewed in a Z-axis direction.

An optical member driving mechanism is provided. The optical member driving mechanism includes a movable portion and a fixed portion. The movable portion includes a holder for holding an optical member with an optical axis. The movable portion is movable relative to the fixed portion. The fixed portion has a housing and a base. The housing is disposed on the base, and includes a top surface and a side surface. The top surface extends in a direction that is parallel to the optical axis. The side surface extends from an edge of the top surface in a direction that is not parallel to the optical axis. The side surface has a rectangular opening.