An optical scanning device includes a mirror device that has a mirror portion, which is swingable around a first axis and a second axis orthogonal to each other, having a reflecting surface reflecting incident light, a first actuator causing the mirror portion to swing around the first axis by applying a rotational torque around the first axis to the mirror portion, and a second actuator causing the mirror portion to swing around the second axis by applying a rotational torque around the second axis to the mirror portion, and a processor that provides a first driving signal to the first actuator and provides a second driving signal to the second actuator. The processor, with the first driving signal and the second driving signal each as cyclic voltage signals whose amplitudes and phases change with time, causes the mirror portion to perform a spiral rotation operation including a period in which a swing amplitude around the first axis and a swing amplitude around the second axis change linearly.

A LIDAR system has a switch configured to direct a switch signal to one of multiple different alternate waveguides. The switch signal carries multiple different channels. The system also includes one more redirection components that receive multiple different channel output signals. Each of the channel output signals carries a different one of the channels. The one more redirection components are configured to redirect the channel output signals such that a direction that each of the channel output signals travels away from the one more redirection components changes in response to a change in the alternate waveguide which receives the switch signal.

A laser scanning sensor includes a laser light-emitting element to emit a pulse laser beam, a light-receiving element to receive a returned reflected beam, a rotary polygon mirror having a plurality of reflecting surfaces to change the travelling direction of the pulse laser beam, and a drive motor to rotate the rotary polygon mirror in a predetermined direction. The sensor also includes an encoder to detect the rotation status of the rotary polygon mirror and to generate a reference signal and trigger signals for the respective reflecting surfaces, and a control/calculation unit to produce a projection pulse train in a specific pulse cycle after a delay time from the generation of a trigger signal for each of the reflecting surfaces, and to acquire distance information per pulse, based on the time after the start of emission of the pulse laser beam before the return of the reflected beam.

A laser scanning sensor includes a laser light-emitting element to emit a pulse laser beam, a light-receiving element to receive a returned reflected beam, a rotary polygon mirror having a plurality of reflecting surfaces to change the travelling direction of the pulse laser beam, and a drive motor to rotate the rotary polygon mirror in a predetermined direction. The sensor also includes an encoder to detect the rotation status of the rotary polygon mirror and to generate a reference signal and trigger signals for the respective reflecting surfaces, and a control/calculation unit to produce a projection pulse train in a specific pulse cycle after a delay time from the generation of a trigger signal for each of the reflecting surfaces, and to acquire distance information per pulse, based on the time after the start of emission of the pulse laser beam before the return of the reflected beam.

The invention relates to a MEMS mirror assembly for detecting a large angular range up to 180°, preferably up to 160°, and to a method for producing a MEMS mirror assembly. The mirror assembly comprises a carrier substrate (1), on which a mirror (2) vibrating about at least one axis is mounted, a transparent cover (4), which is connected in a hermetically sealed manner to the carrier substrate (1) and which comprises an ellipsoidal dome (6) having a substantially round base area, and a compensation optical system (8), which is arranged in a predefined beam path for an incident beam outside the dome (6). The middle of the mirror (2) lies in the centre point of the dome, and the compensation optical system (8) collimates the incident beam in such a way that a divergence or convergence of the beam caused by the boundary surfaces of the dome once said beam has exited from the dome (6) is substantially compensated. The MEMS mirror assemblies are produced by joining a cover wafer and a mirror wafer, which each comprise a plurality of hemispherical domes and mirrors mounted on the carrier substrate. The mirror assemblies are then separated from the joined wafers. The domes of the cover wafer are produced by a glass flow process.

A display system includes a display screen, a light source to generate a light beam to be modulated in accordance with image data, and a beam scanning module to receive the light beams and to direct the light beam onto an associated display region of the display screen. The beam scanning module includes a resonant scanning mirror configured to scan the light beam along a first scanning direction across the associated display region, and a polygon scanning mirror to scan the light beam along a second scanning direction across the associated display region.

A head-mounted display device including a projection device and an optical waveguide is provided. The projection device has an optical pupil located on a second surface of the optical waveguide, and includes a light source, a first MEMS mirror element, a second MEMS mirror element, and a relay optical element group. The relay optical element group has a first axis equivalent focal length corresponding to a first parallel light beam and has a second axis equivalent focal length corresponding to a second parallel light beam. The first parallel light beam and the second parallel light beam travel along an optical axis of the relay optical element group, and a value of the first axis equivalent focal length is different from a value of the second axis equivalent focal length. The head-mounted display device may provide good image quality and a large field of view.

An optical system for a virtual retinal scan display. The optical system includes: a projector unit including a modulatable light source for generating at least one modulated light beam and including a movable deflection device for the light beam, a scanning projection of an image content being generatable from the at least one light beam as a result of the movement of the movable deflection device; a diverting unit, onto which the image content is projectable and which is configured to map the projected image content into an exit pupil and to guide it onto an eye of a user; an optical exit pupil shifting unit situated in an optical path of the light beam for spatially shifting the exit pupil of an eye box of the optical system in directions which extend at least essentially in parallel to an exit pupil plane of the exit pupil.

An optical scanning device includes a substrate, a frame, a plurality of light source modules, and a scanning mirror assembly. The frame is disposed on the substrate to form an accommodating space, and includes a side wall and a reflective portion located on a top end of the side wall and having a light exit. The light source modules are disposed in the accommodating space, surround the scanning mirror assembly, and are configured to provide a plurality of light beams to the reflective portion. The scanning mirror assembly is disposed in the accommodating space and located on a transmission path of the light beams reflected by the reflective portion. The scanning mirror assembly includes a scanning element oscillating along at least one rotation axis and being configured to reflect the light beams to form a scanning light beam transmitted through the light exit out of the optical scanning device.

An optical scanning device includes a substrate, a frame, a plurality of light source modules, and a scanning mirror assembly. The frame is disposed on the substrate to form an accommodating space, and includes a side wall and a reflective portion located on a top end of the side wall and having a light exit. The light source modules are disposed in the accommodating space, surround the scanning mirror assembly, and are configured to provide a plurality of light beams to the reflective portion. The scanning mirror assembly is disposed in the accommodating space and located on a transmission path of the light beams reflected by the reflective portion. The scanning mirror assembly includes a scanning element oscillating along at least one rotation axis and being configured to reflect the light beams to form a scanning light beam transmitted through the light exit out of the optical scanning device.