Embodiments of the disclosure are drawn to apparatuses and methods for a rotating optical reflector. Optical systems may have a limited field of view, and so in order to expand the area that the optical system collects data from, the field of view of the optical system may be scanned across a target area. The present disclosure is directed to a rotating optical reflector, which includes a transmissive layer which refracts light onto a reflective layer, which has a normal which is not parallel to the axis about which the optical reflector is rotated. The optical reflector may be both statically and dynamically balanced, which may allow an increased size of the optical reflector, which in turn may increase the aperture of an optical system (e.g., a lidar system) using the rotating optical reflector.

A Light Detection and Ranging (LiDAR) module for a vehicle can include a semiconductor integrated circuit with a microelectromechanical system (MEMS) and a substrate, the MEMS comprising a micro-mirror assembly including a mirror and a gimbal structure. The gimbal can be configured concentrically around and coplanar with the mirror. When rotated, the gimbal drives the mirror to oscillate at or near a resonant frequency and is coupled to the mirror via mirror-gimbal connectors. A support structure can be coupled to a backside of the mirror and gimbal structures and can increase the stiffness of the mirror to help the mirror better resist dynamic deformation. To limit the added rotational moment of inertia, the support structure can be etched to form a matrix of cells (e.g., formed by a mesh of circumferential and radial ridges) such that up to approximately 90% of the support structure material forming the support structure is removed.

A holographic waveguide LIDAR having a transmitter waveguide coupled to a beam deflector and a receiver waveguide coupled to a detector module. The transmitter waveguide contains an array of grating elements for diffracting a scanned laser beam into a predefined angular ranges. The receiver waveguide contains an array of grating elements for diffracting light reflected from external points within a predefined angular range towards the detector module.

A projection exposure device projects exposure light onto a substrate via a microlens array. The projection exposure device includes a scanning exposure unit that moves the microlens array along a scanning direction from one end toward another end of the substrate, and a microlens array shift unit that moves the microlens array in a shift direction intersecting with the scanning direction during movement of the microlens array caused by the scanning exposure unit.

A projection exposure device projects exposure light onto a substrate via a microlens array. The projection exposure device includes a scanning exposure unit that moves the microlens array along a scanning direction from one end toward another end of the substrate, and a microlens array shift unit that moves the microlens array in a shift direction intersecting with the scanning direction during movement of the microlens array caused by the scanning exposure unit.

The present invention relates to a head device of a three-dimensional modelling equipment, and a modelling plane scanning method using the same, the head device of a three-dimensional modelling equipment comprising: a modelling light source array having a plurality of modelling light sources; a light guide part, installed at a given position above a modelling plane, having a function of reflecting modelling rays from the modelling light source array so as to be incident on the modelling plane; and a controller for controlling the operations of the modelling light source array and the light guide part in a conjoined manner, wherein a plurality of modelling rays generated from the plurality of modelling light sources are irradiated while forming one line scan having a first axial direction on the modelling plane, and the light guide part continuously or intermittently moves the one line scan on the modelling plane to irradiate the modelling light rays across the modelling plane. The present invention has the effects of enabling high-speed scanning to be performed, and modelling precision to be enhanced through precise scanning control.

To provide an optical module and a scan-type image projection display device at low power consumption in a configuration of enhancing a heat radiation property with excellent assembly performance. An optical module for coupling and irradiating laser beams from a plurality of laser diodes, and onto a desired position is characterized in that a first protruded part corresponding to a first laser holder for holding a first laser diode 1a and a second protruded part corresponding to a second laser holder for holding a second laser diode are provided on a base for placing the optical module thereon, and heat conductive materials are provided between the first protruded part and the first laser holder and between the second protruded part and the second laser holder, respectively.

This method is for calibrating an optical scanning apparatus that includes an optical fiber with a tip supported to allow vibration and an actuator that drives the tip of the optical fiber in a direction perpendicular to the optical axis of the optical fiber. The method includes arranging a position sensitive detector that detects a position of emitted light from the tip of the optical fiber (step S02) and detecting the position of the emitted light with the position sensitive detector while supplying light to the optical fiber and driving the tip of the optical fiber (step S03). The step of detecting (step S03) is performed using an interference fringe reducer that reduces interference fringes occurring along an optical path reaching the position sensitive detector.

A scanning observation apparatus (10) deflects illumination light with an actuator (25) through an illumination optical system (26) to scan an object (32), subjects light from the object (32) to photoelectric conversion with an optical detector (44), performs processing with an image processor (46), and displays an image of the object (32) on a display (60). A memory (35) stores information on optical characteristics related to chromatic aberration of magnification of the illumination optical system (26) relative to light of predetermined colors. A scanning pattern calculator (45) calculates a scanning pattern, on the object (32), of light of each color using the information. Using the scanning pattern, the image processor (46) calibrates a plot position yielded by a photoelectric conversion signal from the optical detector (44) for light of each color and generates an image of the object (32), thereby more easily correcting the chromatic aberration of magnification.

A method and an apparatus for setting driving conditions applied in an optical scanning apparatus. The method for setting driving conditions includes attaching a scanning pattern detector and adjusting a scanning pattern detected by the scanning pattern detector by changing a drive signal applied to an actuator (steps S03 to S06). The step of adjusting includes setting a first drive signal value of the drive signal applied to the actuator and a target amplitude of the scanning pattern (step S03) and determining a frequency of the drive signal applied to the actuator by comparing an amplitude of the scanning pattern detected by changing the frequency of the drive signal applied to the actuator with the target amplitude while vibrating the actuator at the first drive signal value (step S04).