Implementations described and claimed herein provide a mechanically-scanning 3-dimensional light detection and ranging (3D LiDAR) system including a galvo mirror assembly, wherein the galvo mirror assembly includes a mirror attached to an armature of a galvanometer to reflect a light signal generated by a light generator and received from a target, at least one permanent magnet, and at least one coil configured to carry a current to move the armature.

An inspection system includes a light source, a mirror, Galvano mirrors, a casing that holds the mirror and the Galvano mirrors inside and includes an attachment portion for attaching an optical element, and a control unit that controls a deflection angle of the Galvano mirrors, wherein the control unit controls the deflection angle so that an optical path optically connected to a semiconductor device is switched between a first optical path passing through the Galvano mirrors and the mirror, and a second optical path passing through the Galvano mirrors and the attachment portion, and controls the deflection angle so that the deflection angle when switching to the first optical path has been performed and the deflection angle when switching to the second optical path has been performed do not overlap.

A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

This optical scanning device includes: a shaft part to which a mirror part is connected; a movable magnet; a base part; a ball bearing; a core unit that has a core body and a coil body and rotationally drives the movable magnet; and a magnet position holding member that is a magnetic body provided facing the movable magnet and magnetically attracts the movable magnet to a reference position. The core unit is disposed on the outer surface side of one wall section of a pair of wall sections of the base part. An angle sensor unit for detecting the rotation angle position of the shaft part is disposed between the core unit and the one wall section.

A method of scanning a laser over a field of view, the method comprising: providing a laser to produce the laser beam; rasterizing the laser beam over a first sub-area of the field of view; deflecting the laser beam to a second sub-area of the field of view; and rasterizing the laser beam over the second sub-area of the field of view; and capturing image information produced by the laser beam so that, for each sub-area of the field of view, the rasterized laser beam defines a plurality of image segments; for each segment calculating an image correction and applying a correction to the laser according to the calculated image correction for the segment, and corresponding system.

Disclosed are a lidar, and a detection method for the lidar. The lidar includes a plurality of laser transceiver module groups, each configured to be integrated with at least one laser transmitting end and at least one laser receiving end, and a scanning module. The plurality of laser transceiver module groups are arranged in a distributed manner relative to the scanning module, and an at least partially stitched field of view of the lidar is formed by sub-fields of view correspondingly formed by the plurality of laser transceiver module groups. Further disclosed are a lidar and a manufacturing method for the lidar. The lidar includes a laser transmitting end, a laser receiving end, a scanning module and an isolation mechanism. A scanning component of the scanning module is constructed as a rotatable plate-shaped double-faceted mirror or a rotatable prism.

Disclosed are a lidar, and a detection method for the lidar. The lidar includes a plurality of laser transceiver module groups, each configured to be integrated with at least one laser transmitting end and at least one laser receiving end, and a scanning module. The plurality of laser transceiver module groups are arranged in a distributed manner relative to the scanning module, and an at least partially stitched field of view of the lidar is formed by sub-fields of view correspondingly formed by the plurality of laser transceiver module groups. Further disclosed are a lidar and a manufacturing method for the lidar. The lidar includes a laser transmitting end, a laser receiving end, a scanning module and an isolation mechanism. A scanning component of the scanning module is constructed as a rotatable plate-shaped double-faceted mirror or a rotatable prism.

An optical transmitting apparatus is disclosed, in the apparatus, an array light source include M*N light sources, and an included angle between any column of light sources in the N columns of light sources and any row of light sources in the M rows of light sources is a preset angle. The array light source is located on a first side of a collimating lens, a plane on which the array light source is located is perpendicular to an optical axis of the collimating lens, and a distance between the plane on which the array light source is located and a center point of the collimating lens is a focal length of the collimating lens. An rotatable scanning mirror is located on a second side of the collimating lens, and a center point of a reflective surface of the scanning mirror is on the optical axis of the collimating lens.

An optical scanning system includes one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) used to scan a field-of-view (FOV) over a field-of-regard (FOR). The MEMS MMA is configured such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of individual mirrors.

A near-eye display system employs a low-amplitude, low-frequency micro-electromechanical system (MEMS) mirror in series with a higher-amplitude, higher-frequency resonant MEMS mirror to rotate at a reduced amplitude and frequency with respect to the resonant MEMS mirror redistribute illumination pulses or pixels at the extents of a sinusoidal angular scan pattern of the resonant MEMS mirror.