A photolithography method includes producing, from an optical source, a pulsed light beam; and scanning the pulsed light beam across a substrate of a lithography exposure apparatus to expose the substrate with the pulsed light beam including exposing each sub-area of the substrate with the pulsed light beam. A sub-area is a portion of a total area of the substrate. For each sub-area of the substrate, a lithography performance parameter associated with the sub-area of the substrate is received; the received lithography performance parameter is analyzed, and, based on the analysis, a first spectral feature of the pulsed light beam is modified and a second spectral feature of the pulsed light beam is maintained.

An optical scanning system includes a radiating source capable of outputting a source light beam, a de-scan lens that is configured to output a de-scanned light beam, the de-scan lens is located approximately one focal length of the de-scan lens from a sample irradiation location, a focusing lens that is configured to output a focused light beam, a first non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam, a second non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam that is reflected by the first non-polarizing beam splitter, and a detector that is located at approximately one focal length of the focusing lens from the focusing lens, the detector is configured to be irradiated by at least a portion of the focused light beam that is reflected by the second non-polarizing beam splitter.

An apparatus according to an embodiment of the present invention enables measurement and visualization of a refractive field such as a fluid. An embodiment device obtains video captured by a video camera with an imaging plane. Representations of apparent motions in the video are correlated to determine actual motions of the refractive field. A textured background of the scene can be modeled as stationary, with a refractive field translating between background and video camera. This approach offers multiple advantages over conventional fluid flow visualization, including an ability to use ordinary video equipment outside a laboratory without particle injection. Even natural backgrounds can be used, and fluid motion can be distinguished from refraction changes. Embodiments can render refractive flow visualizations for augmented reality, wearable devices, and video microscopes.

An apparatus according to an embodiment of the present invention enables measurement and visualization of a refractive field such as a fluid. An embodiment device obtains video captured by a video camera with an imaging plane. Representations of apparent motions in the video are correlated to determine actual motions of the refractive field. A textured background of the scene can be modeled as stationary, with a refractive field translating between background and video camera. This approach offers multiple advantages over conventional fluid flow visualization, including an ability to use ordinary video equipment outside a laboratory without particle injection. Even natural backgrounds can be used, and fluid motion can be distinguished from refraction changes. Embodiments can render refractive flow visualizations for augmented reality, wearable devices, and video microscopes.

An illumination optical unit for EUV projection lithography serves for illuminating an illumination field in which an object field of a downstream imaging optical unit is arranged. An object displaceable in an object displacement direction is in turn arrangeable in the object field. A facet mirror of the illumination optical unit has a plurality of facets arranged alongside one another and serving for the reflective, superimposing guidance of partial beams of a beam of EUV illumination light to the object field. The facet mirror is arranged such that a position of the respective facet on the facet mirror and an impingement region of an illumination light partial beam on the respective facet of the facet mirror predefine an illumination direction for the field points of the object field.

In accordance with one aspect of the disclosure, a driver monitoring apparatus includes: a camera having a field of view facing a driver's seat of a vehicle and configured to provide image data; and a controller configured to process the image data, and the controller is configured to identify at least one of a respiratory rate per minute or a respiratory volume of a driver based on the image data, identify whether the driver is in a state of a drowsy driving based on at least one of the respiratory rate per minute or the respiratory volume of the driver, and provide a control request to output a warning message through a display and speaker of the vehicle based on the drowsy driving of the driver.

In accordance with one aspect of the disclosure, a driver monitoring apparatus includes: a camera having a field of view facing a driver's seat of a vehicle and configured to provide image data; and a controller configured to process the image data, and the controller is configured to identify at least one of a respiratory rate per minute or a respiratory volume of a driver based on the image data, identify whether the driver is in a state of a drowsy driving based on at least one of the respiratory rate per minute or the respiratory volume of the driver, and provide a control request to output a warning message through a display and speaker of the vehicle based on the drowsy driving of the driver.

A lithographic apparatus includes a reflector to redirect a radiation beam, e.g. an EUV beam. The position of the reflector is controlled using a controller and a positioning system. The positioning system includes a non-compensating actuator device and a compensating actuator device to compensate for parasitic forces of the non-compensating actuator device. The positioning system and controller can provide a more accurate position of the reflector, reduce deformation of the reflector and reduce the magnitude of forces transmitting through the reflector.

An imaging method and corresponding apparatus according to an embodiment of the present invention enables measurement and visualization of fluid flow. An embodiment method includes obtaining video captured by a video camera with an imaging plane. Representations of motions in the video are correlated. A textured background of the scene can be modeled as stationary, with a refractive field translating between background and video camera. This approach offers multiple advantages over conventional fluid flow visualization, including an ability to use ordinary video equipment outside a laboratory without particle injection. Even natural backgrounds can be used, and fluid motion can be distinguished from refraction changes. Depth and three-dimensional information can be recovered using stereo video, and uncertainty methods can enhance measurement robustness where backgrounds are less textured. Example applications can include avionics and hydrocarbon leak detection.

An imaging method and corresponding apparatus according to an embodiment of the present invention enables measurement and visualization of fluid flow. An embodiment method includes obtaining video captured by a video camera with an imaging plane. Representations of motions in the video are correlated. A textured background of the scene can be modeled as stationary, with a refractive field translating between background and video camera. This approach offers multiple advantages over conventional fluid flow visualization, including an ability to use ordinary video equipment outside a laboratory without particle injection. Even natural backgrounds can be used, and fluid motion can be distinguished from refraction changes. Depth and three-dimensional information can be recovered using stereo video, and uncertainty methods can enhance measurement robustness where backgrounds are less textured. Example applications can include avionics and hydrocarbon leak detection.