A transparent optical element may include a layer of an electroactive ceramic disposed between transparent electrodes, such that the electrodes are each oriented perpendicular to a non-polar direction of the ceramic layer. Optical properties of the optical element, including transmissivity, haze, and clarity may be improved by the application of a voltage to the electroactive ceramic, and an associated phase transformation.

A pupil-replicating waveguide suitable for operation with a coherent light source is disclosed. A waveguide body has opposed surfaces for guiding a beam of image light. An out-coupling element is disposed in an optical path of the beam for out-coupling portions of the beam at a plurality of spaced apart locations along the optical path. Electrodes are coupled to at least a portion of the waveguide body for modulating an optical path length of the optical path of the beam to create time-varying phase delays between the portions of the beam out-coupled by the out-coupling element.

Embodiments are directed to a microwave-to-optical transducer device. The device includes an anchorage structure that includes a bar extending in a plane and laterally delimiting two voids on each longitudinal side of the bar. That is, the two voids are arranged side-by-side in said plane. The device further includes a piezoelectric beam structured as an optical cavity (e.g., as a 1D photonic crystal cavity), where the beam extends transversally to the bar, parallel to said plane, and is anchored on a resting point on the bar. The beam extends outwardly, beyond the resting point and on each side thereof, so as to overhang each of the two voids. Embodiments are further directed to related microwave circuits, including a microwave-to-optical transducer such as described above and, in particular, to superconducting microwave circuits configured as quantum information processing devices.

An optical pulse for an extreme ultraviolet (EUV) light source may be formed by illuminating a semiconductor material of a modulation system with a first light beam having a first wavelength; applying a voltage to the semiconductor material for a time duration, the applied voltage being sufficient to modify an index of refraction of the semiconductor material such that a polarization state of a light beam having a second wavelength passing through the semiconductor material is modified to pass through at least one polarization-based optical element of the modulation system; and forming an optical pulse by passing a second light beam having the second wavelength through the semiconductor material during the time duration.

A transparent optical element includes a primary electrode, a secondary electrode overlapping at least a portion of the primary electrode, an electroactive layer disposed between and abutting the primary electrode and the secondary electrode, and a control system operably coupled to at least one of the primary electrode and the secondary electrode and adapted to provide a drive signal to actuate the electroactive layer within an aperture of the transparent optical element.

An electroactive ceramic may be incorporated into a transparent optical element between transparent electrodes and may characterized by a preferred crystallographic orientation. The preferred crystallographic orientation may be aligned along a polar axis of the electroactive ceramic and substantially parallel to each of the electrodes. Optical properties of the optical element, including transmissivity, haze, and clarity may be substantially unchanged during actuation thereof and the attendant application of a voltage to the electroactive ceramic.

Embodiments of the present invention provide an MEMS actuator with a substrate, at least one post attached to the substrate and a deflectable actuator body that is connected to the at least one post via at least one spring, wherein, during electrostatic, electromagnetic or magnetic force application, the actuator body takes a second position starting from a first position by a tilt-free translational movement, wherein the first position and the second position are different, and wherein in a top view of the MEMS actuator the actuator body is arranged outside an area spanned by the at least one post.

A pupil-replicating waveguide suitable for operation with a coherent light source is disclosed. A waveguide body has opposed surfaces for guiding a beam of image light. An out-coupling element is disposed in an optical path of the beam for out-coupling portions of the beam at a plurality of spaced apart locations along the optical path. Electrodes are coupled to at least a portion of the waveguide body for modulating an optical path length of the optical path of the beam to create time-varying phase delays between the portions of the beam out-coupled by the out-coupling element.

The invention provides an elastomeric optical device having a first optical state and a second optical state. The device is transparent when in the first optical state and is translucent or opaque when in the second optical state. The device comprises, in sequence, an optional substrate, a first transparent electrode, an optional dielectric layer, an elastomer layer, and a second transparent electrode. In some embodiments, the second transparent electrode comprises an electrically-conductive polymer, transparent electrically-conductive nanoparticles, or both. In such embodiments, the second transparent electrode is configured to compress the elastomer layer in response to an electric field between the first and second transparent electrodes, such that when the elastomeric optical device is in the second optical state the elastomer layer is compressed between the first and second transparent electrodes. One or both of the elastomer layer and the second transparent electrode has one or more non-uniformity features.

A pupil-replicating waveguide suitable for operation with a coherent light source is disclosed. A waveguide body has opposed surfaces for guiding a beam of image light. An out-coupling element is disposed in an optical path of the beam for out-coupling portions of the beam at a plurality of spaced apart locations along the optical path. Electrodes are coupled to at least a portion of the waveguide body for modulating an optical path length of the optical path of the beam to create time-varying phase delays between the portions of the beam out-coupled by the out-coupling element.