A tunable metasurface is provided. The tunable metasurface includes a mirror, a dielectric layer disposed on the mirror, a metallic antenna and a phase change material (PCM) layer. The PCM layer is interposed between the dielectric layer and the metallic antenna. The PCM layer is configured to be amorphous or crystalline. The mirror, the dielectric layer, the metallic antenna and the PCM layer cooperatively form a Fabry Perot cavity in which light incident on the metallic antenna from free space is reflected between the mirror and the metallic antenna. The PCM layer has blanket dimensions relative to those of the metallic antenna such that the Fabry Perot cavity is critically coupled with the free space when the PCM layer is only one of amorphous and crystalline.

A device for reducing laser speckle using a micro scanner and a holographic diffuser. The micro scanner includes a first transparent optical substrate with an input surface and an output surface and a second transparent optical substrate with an input surface and an output surface and a variable refractive index medium sandwiched between the output surface of the first substrate and the input surface of the second substrate. Transparent electrodes are applied to the output surface of the first substrate and the input surface of the second substrate. The electrodes are coupled to a voltage generator. The input surface of the first substrate is optically coupled to a laser source. The input surface of the second substrate is configured as an array of prismatic elements. At least one of the input surface of the first substrate or the output surfaces of the second substrate is planar.

According to various embodiments, a tunable optical device comprises a tunable optical metasurface on a substrate with an integrated driver circuit. In some embodiments, the tunable optical device includes a photon shield layer to prevent optical radiation from disrupting operation of the driver circuit. In some embodiments, the tunable optical device includes a diagnostic circuit to detect and disable defective optical structures of the metasurface. In some embodiments, the tunable optical device includes an integrated heater circuit that maintains a liquid crystal of the metasurface above a minimum operating temperature. In some embodiments, the tunable optical device includes an integrated lidar sequencing controller, a steering pattern subcircuit, and a photodetector circuit.

An optoelectronic sensor is provided having a light receiver, a reception optics arranged upstream of the light receiver, and a control and evaluation unit, wherein the reception optics has a beam deflection device having a plurality of switchable blaze gratings of different grating constants arranged behind one another, and wherein the control and evaluation unit is configured to switch a blaze grating on and off in accordance with a desired deflection angle of the beam deflection device have the same grating constants, but a mutually different blaze angle.

Provided is a beam scanning apparatus including a plurality of antenna resonators disposed two-dimensionally in a row direction and a column direction, a plurality of row voltage lines that are configured to provide a plurality of driving voltages in a row direction, respectively, a plurality of column voltage lines that are configured to provide a plurality of driving voltages in a column direction, respectively, and a driving voltage conversion circuit configured to control a driving voltage applied to each of the plurality of antenna resonators based on a driving voltage in the row direction that is provided from each of the plurality of row voltage lines and a driving voltage in the column direction that is provided from each of the plurality of column voltage lines.

According to various embodiments, a cover is sealed over a metasurface on a substrate to create a sealed chamber. Liquid crystal, or another tunable refractive index dielectric material, is positioned within the sealed chamber around optical structures of the metasurface before or after the cover is sealed. For example, the liquid crystal may be injected through small vias or holes to fill a sealed chamber. In some embodiments, a glass cover is shaped or patterned with photoresist to protrude into the sealed chamber to reduce the thickness of the liquid crystal used to fill the sealed chamber. A driver to control the metasurface may be, for example, integrated within the substrate, be attached to exposed bond pads of the metasurface, and/or be embodied as a control layer connected to the metasurface through the substrate by through-substrate vias (TSVs).

According to various embodiments, a tunable optical device comprises a tunable optical metasurface on a substrate with an integrated driver circuit. In some embodiments, the tunable optical device includes a photon shield layer to prevent optical radiation from disrupting operation of the driver circuit. In some embodiments, the tunable optical device includes a diagnostic circuit to detect and disable defective optical structures of the metasurface. In some embodiments, the tunable optical device includes an integrated heater circuit that maintains a liquid crystal of the metasurface above a minimum operating temperature. In some embodiments, the tunable optical device includes an integrated lidar sequencing controller, a steering pattern subcircuit, and a photodetector circuit.

The optical tracking module includes an optical phased array (OPA), an analog drive, an integrated photodetector, and one or more processors. The OPA includes a plurality of array elements, and a plurality of phase shifters. The analog drive is configured to adjust the plurality of phase shifters. The integrated photodetector is configured to receive light from the OPA. The one or more processors is configured to extract signal information of an incoming beam via the OPA, and control an outgoing beam using the analog drive based on the signal information. The OPA, the analog drive, the integrated photodetector and the one or more processors are in an integrated circuit.

Provided is an optical modulating device including a substrate including first and second trenches, a phase modulator in a region of the substrate, the phase modulator including an undoped region provided between the first and the second trenches, and first and a second doped regions which are apart from each other with the undoped region therebetween, wherein the phase modulator is configured to modulate a phase of light traveling through the undoped region based on a first electrical signal applied to the phase modulator, an amplifier including a first doped layer, a quantum well layer, a clad layer, and a second doped layer sequentially on the substrate, the amplifier overlapping at least a portion of the phase modulator and being configured to amplify the light based on a second electrical signal applied to the amplifier, and an insulating layer between the phase modulator and the amplifier.

A light-collimating film including elongated chambers of bistable electrophoretic fluids. The light-collimating films are suitable to control the amount and/or direction of light incident to a transmissive substrate. Such films may be integrated into devices, such as LCD displays, to provide a zone of privacy for a user viewing the LCD display. Because the light-collimating film is switchable, it allows a user to alter the collimation of the emitted light on demand. Because the films are bistable, they do not require additional power after they have been switched to a display state.