Efficient harmonic light generation can be achieved with ultrathin films by coupling an incident pump wave to an epsilon-near-zero (ENZ) mode of the thin film. As an example, efficient third harmonic generation from an indium tin oxide nanofilm (λ/42 thick) on a glass substrate for a pump wavelength of 1.4 μm was demonstrated. A conversion efficiency of 3.3×10.sup.−6 was achieved by exploiting the field enhancement properties of the ENZ mode with an enhancement factor of 200. This nanoscale frequency conversion method is applicable to other plasmonic materials and reststrahlen materials in proximity of the longitudinal optical phonon frequencies.

A quantum cascade laser includes a semiconductor substrate, an optical waveguide formed on a first surface of the semiconductor substrate, and a temperature adjusting member. The optical waveguide includes a first region and a second region located on one side with respect to the first region in the optical waveguide direction of the optical waveguide. The first region generates a first light having a first wavelength, and the second region generates a second light having a second wavelength. The optical waveguide generates an output light having a frequency corresponding to a difference between the first wavelength and the second wavelength by difference-frequency generation. A recess for suppressing heat transfer between the first region and the second region is formed at a second surface of the semiconductor substrate. The temperature adjusting member includes a first temperature adjusting member for adjusting the temperature of the second region.

Operating an optical frequency comb assembly includes operating an optical frequency comb source to generate laser light constituting an optical frequency comb and introducing the laser light into a common light path and seeding at least one branch light path by the laser light from the common light path, the branch light path comprising at least one optical element. For the branch light path, a phase difference of a first frequency mode ν.sub.1 of the optical frequency comb is determined between laser light coupled out at a reference point within the frequency comb assembly upstream of the at least one optical element and laser light coupled out at a measurement point provided in the branch light path downstream of the at least one optical element. Phase correction for the laser light from the branch light path is based on a deviation of the determined phase difference from a target value.

A graphene structure includes one or more graphene layers. The graphene layers allow for microwave squeezing with gains up to 24 dB over a wide bandwidth.

A method for extending and enhancing bright coherent high-order harmonic generation into the VUV-EUV-X-ray regions of the spectrum involves a way of accomplishing phase matching or effective phase matching of extreme upconversion of laser light at high conversion efficiency, approaching 10.sup.−3 in some spectral regions, and at significantly higher photon energies in a waveguide geometry, in a self-guiding geometry, a gas cell, or a loosely focusing geometry, containing nonlinear medium. The extension and enhancement of the coherent VUV, EUV, X-ray emission to high photon energies relies on using VUV-UV-VIS lasers of shorter wavelength. This leads to enhancement of macroscopic phase matching parameters due to stronger contribution of linear and nonlinear dispersion of both atoms and ions, combined with a strong microscopic single-atom yield.

The purpose of the present invention is to make it possible to output stable light by optimizing the wavelength conversion efficiency in a wavelength conversion element without employing an optical detection device such as a photo diode in a laser light source device. A fundamental light wave emitted from a semiconductor laser (2) is wavelength converted by a wavelength conversion element (5) and is emitted therefrom. A lighting circuit (20) supplies electric power for the aforementioned semiconductor laser (2) to turn on the semiconductor laser (2). A control unit (21) controls the operation of the device while controlling the amount of power supplied to a heater means (7) such that the wavelength conversion element (5) reaches a temperature at which optimum wavelength conversion efficiency is acquired. The temperature detected by a temperature detection means (Th1) is input to the control unit (21), and the control unit (21) defines the temperature of the wavelength conversion element (5) at which the maximum amount of power is supplied to the heater means (7) as a set temperature at which the optimum wavelength conversion efficiency is acquired, and performs feedback control of the temperature of the wavelength conversion element (5) so that the temperature of the wavelength conversion element (5) reaches the aforementioned set temperature by controlling the amount of heat supplied from the heater means (7).

A method of generating THz radiation includes the steps of generating optical input radiation with an input radiation source device (10), irradiating a first conversion crystal device (30) with the optical input radiation, wherein the first conversion crystal device (30) is arranged in a single pass configuration, and generating the THz radiation having a THz frequency in the first conversion crystal device (30) in response to the optical input radiation by an optical-to-THz-conversion process, wherein a multi-line frequency spectrum is provided by the optical input radiation in the first conversion crystal device (30), and the optical-to-THz-conversion process includes cascaded difference frequency generation using the multi-line frequency spectrum. Furthermore, a THz source apparatus being configured for generating THz radiation and applications thereof are described.

An method for generating illuminating radiation in an illumination apparatus for use in an inspection apparatus for use in lithographic processes is described. A driving radiation beam is provided that comprises a plurality of radiation pulses. The beam is split into first and second pluralities of driving radiation pulses. Each plurality of driving radiation pulses has a controllable characteristic. The first and second pluralities may be used to generate an illuminating radiation beam with an output wavelength spectrum. The first and second controllable characteristics are controlled so as to control first and second portions respectively of the output wavelength spectrum of the illuminating radiation beam.

Embodiments of the invention provide apparatuses and methods for generating frequency combs. A non-linear optical medium may generate new optical waves centered at frequencies differing from the input waves, while retaining the input wave properties. In the case when a parametric mixer is used to generate frequency combs with small frequency pitch, the phase correlation of the input (seed) waves can be achieved by an electro-optical modulator and a single master laser. In the case when a frequency comb possessing a frequency pitch that is larger than frequency modulation that can be affected by an electro-optic modulator, the phase correlation of the input (seed) waves is achieved by combined use of an electro-optical modulator and injection locking to a single or multiple slave lasers.

A system for optical comb carrier envelope offset frequency control includes a mode-locked oscillator. The mode-locked oscillator produces an output beam using an input beam and one or more control signals. The output beam includes a controlled carrier envelope offset frequency. A beat note generator produces a beat note signal using a portion of the output beam. A control signal generator produces the one or more control signals to set the beat note signal by modulating the intensity of the input beam within the mode locked oscillator. Modulating the intensity comprises using a Mach-Zehnder intensity modulator or using an intensity modulated external laser to affect a gain medium within the mode-locked laser.