A broadband light source device for creating broadband light pulses includes a hollow-core fiber and a pump laser source device. The hollow-core fiber is configured to create the broadband light pulses by an optical non-linear broadening of pump laser pulses. The hollow-core fiber includes a filling gas, an axial hollow light guiding fiber core configured to support core modes of a guided light field, and an inner fiber structure surrounding the fiber core and configured to support transverse wall modes of the guided light field. The pump laser source device is configured to create and provide the pump laser pulses at an input side of the hollow-core fiber. The transverse wall modes include a fundamental transverse wall mode and second and higher order transverse wall modes.

An apparatus includes a non-linear optical crystal configured to perform harmonic wavelength conversion. The apparatus also includes first and second heaters contacting opposite sides of the optical crystal, where the first and second heaters are configured to heat the optical crystal. The apparatus further includes first and second backing plates configured to hold the first and second heaters in contact with the optical crystal. The apparatus also includes an internal mount defining a space configured to receive at least a portion of the optical crystal. In addition, the apparatus includes an external cover around at least a portion of the internal mount.

A nonlinear crystal including stacked Strontium tetraborate SrB.sub.4O.sub.7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency converting stage of a laser assembly to generate laser output light having a wavelength in the range of 125 nm to 183 nm. One or more fundamental light beams having fundamental wavelengths between 1 and 1.1 μm are doubled and/or summed using multiple intermediate frequency conversion stages to generate one or more intermediate light beam frequencies (e.g., second through eighth harmonics, or sums thereof), and then the final frequency converting stage utilizes the nonlinear crystal to either double a single intermediate light beam frequency or to sum two intermediate light beam frequencies to generate the desired laser output light at high power and photon energy levels. A method and inspection system incorporating the laser assembly is also described.

The system and method of producing a first path comprising a pulse stretcher for a mid-wave infrared (MWIR) signal, an optical parametric chirped-pulse amplification (OPCPA) amplifier, and a MWIR compressor for producing a first beam in a MWIR portion of the spectrum and a second path comprising a pulse stretcher for a long wave infrared (LWIR) signal, an OPCPA amplifier, and a LWIR compressor for producing a second beam in a LWIR portion of the spectrum. Each beam, on its own, is configured to produce laser-matter interactions at long range (100s of meters), having nonlinear effects and favoring supercontinuum generation spanning multiple octaves, that is temporally and spatially overlapped with the fundamental laser beam.

Disclosed in the present invention is a nonlinear optical crystal. The chemical formula of the nonlinear optical crystal is MHgGeSe.sub.4, M being selected from Ba or Sr. The nonlinear optical crystal has no symmetrical center, belongs to an orthorhombic crystal system, and has a space group Ama2. The nonlinear optical crystal is an infrared nonlinear optical crystal, and has the advantages of great nonlinear optical effect, wide light transmitting band, high hardness, good mechanical properties, breakage resistance, deliquescence resistance, easiness in processing and preserving, etc. Also disclosed in the present invention are a method for preparing the nonlinear optical crystal and application thereof.

Apparatus and methods for improved HHG of ultrashort pulse laser beams. A HHG assembly includes a gas distribution block and a waveguide cartridge having a HHG hollow core waveguide. The waveguide cartridge is attached to the gas distribution block and may be removed and replaced, while the gas distribution block remains affixed within the apparatus. The gas distribution block is configured to maintain a pressure profile within the hollow core fiber. The system also includes two operating beam sensors and two actuatable mirrors. The operating beam sensors are fixed with respect to the HHG assembly. The system is aligned before operation by adjusting the actuatable mirrors to optimize a sample beam through the waveguide and recording the position of the beam on the operating beam sensors. In operation, the mirrors are actuated to maintain the same positions of the input beam on the operating beam sensors.

The present invention relates to an orthogonal-phase compound and its nonlinear optical (NLO) crystal of BaGa.sub.7Se.sub.7, its producing method and uses thereof. Polycrystalline orthogonal-phase BaGa.sub.4Se.sub.7 was prepared by a high-temperature solid-phase reaction in a sealed silica tube. Large size single crystals of orthogonal-phase BaGa.sub.4Se.sub.7 could be prepared by the flux method or Bridgman method. BaGa.sub.4Se.sub.7 crystallizes in the point group mm2. Orthogonal-phase BaGa.sub.4Se.sub.7 has a powder second harmonic generation (SHG) efficiency of about 5 times that of AgGaS.sub.2 and is phase-matchable. The orthogonal-phase BaGa.sub.4Se.sub.7 is non-hygroscopic and has good mechanical properties, which makes it easy to cut, polish, and coat by normal processing. The orthogonal-phase BaGa.sub.4Se.sub.7 crystal has never been cracked during cutting and polishing. The orthogonal-phase compound and NLO crystal of BaGa.sub.4Se.sub.7 can be used as NLO devices.

Strontium tetraborate is used as an optical coating material for optical components utilized in semiconductor inspection and metrology systems to take advantage of its high refractive indices, high optical damage threshold and high microhardness in comparison to conventional optical materials. At least one layer of strontium tetraborate is formed on the light receiving surface of an optical component's substrate such that its thickness serves to increase or decrease the reflectance of the optical component. One or multiple additional coating layers may be placed on top of or below the strontium tetraborate layer, with the additional coating layers consisting of conventional optical materials. The thicknesses of the additional layers may be selected to achieve a desired reflectance of the optical component at specific wavelengths. The coated optical component is used in an illumination source or optical system utilized in a semiconductor inspection system, a metrology system or a lithography system.

A time-varying optical metasurface, comprising a plurality of modulated nano-antennas configured to vary dynamically over time. The metasurface may be implemented as part of an optical isolator, wherein the time-varying metasurface provides uni-directional light flow. The metasurface allows the breakage of Lorentz reciprocity in time-reversal. The metasurface may operate in a transmission mode or a reflection mode.

A time-varying optical metasurface, comprising a plurality of modulated nano-antennas configured to vary dynamically over time. The metasurface may be implemented as part of an optical isolator, wherein the time-varying metasurface provides uni-directional light flow. The metasurface allows the breakage of Lorentz reciprocity in time-reversal. The metasurface may operate in a transmission mode or a reflection mode.