A sanitizing device includes a nonlinear optical element, one or more laser diodes, a lens, and a battery pack. The one or more laser diodes are each configured to direct a beam of optical energy to the nonlinear optical element. Each beam of optical energy has a first wavelength and the nonlinear optical element is configured to produce UV-C energy having a second wavelength from the beams of optical energy. The lens is configured to focus the UV-C energy to cover a desired area for sanitizing purposes. The battery pack is configured for powering the one or more laser diodes.

This invention proposes to use a specially designed layered nonlinear optic (LNO) for intracavity harmonic generation. The LNO generates the harmonic and guides the generated harmonic beam to a different path from the fundamental beam path with total internal reflection, a phenomenon that all lights are reflected when lights in one (“internal”) optic strike sufficiently obliquely against the interface with a second (“external”) optic, in which the refractive index is lower than that in the internal optic. No coating is necessary for the harmonic inside the fundamental beam laser cavity. The generated harmonic beam does not travel through any surface inside the fundamental beam cavity, either. Hence this invention improves the reliability of intracavity harmonic generation laser especially if the harmonic is in the UV range.

An object of the present invention is to provide a light irradiation system capable of securing economic efficiency, flexibility, reliability, and safety, and further capable of reducing a transmission loss between a center side and a remote side.

The present light irradiation system can secure economic efficiency by sharing a single light source installed on the center side with a plurality of irradiation places. The present light irradiation system can irradiate a place to be sterilized with ultraviolet light output by moving the optical fiber tip end on the remote side in a pinpoint manner, and can also secure flexibility. In addition, the present light irradiation system can secure reliability and safety by performing output control of the light source on the center side. Furthermore, in the present light irradiation system, light in a low-loss wavelength region is transmitted from the center side through the optical fiber, wavelength conversion is performed on the remote side, and thus the transmission loss between the center side and the remote side can be reduced.

An object of the present invention is to provide a light irradiation system capable of securing economic efficiency, flexibility, reliability, and safety, and further capable of reducing a transmission loss between a center side and a remote side.

The present light irradiation system can secure economic efficiency by sharing a single light source installed on the center side with a plurality of irradiation places. The present light irradiation system can irradiate a place to be sterilized with ultraviolet light output by moving the optical fiber tip end on the remote side in a pinpoint manner, and can also secure flexibility. In addition, the present light irradiation system can secure reliability and safety by performing output control of the light source on the center side. Furthermore, in the present light irradiation system, light in a low-loss wavelength region is transmitted from the center side through the optical fiber, wavelength conversion is performed on the remote side, and thus the transmission loss between the center side and the remote side can be reduced.

A method of inspection for defects on a substrate, such as a reflective reticle substrate, and associated apparatuses. The method includes performing the inspection using inspection radiation obtained from a high harmonic generation source and having one or more wavelengths within a wavelength range of between 20 nm and 150 nm. Also, a method including performing a coarse inspection using first inspection radiation having one or more first wavelengths within a first wavelength range; and performing a fine inspection using second inspection radiation having one or more second wavelengths within a second wavelength range, the second wavelength range comprising wavelengths shorter than the first wavelength range.

A hybrid laser printing (HLP) technology that utilizes ultrafast laser in sequential additive-subtractive modes to create 3D hydrogel constructs. The approach involves the synergistic use of additive crosslinking and subtractive ablation processes that are conventionally mutually exclusive. HLP can be operated at virtually any penetration depth and allow fabrication of multi-layer hydrogel constructs at micrometer resolution. HLP was used to print ready-to-use functional chips using commonly used hydrogels for potential cellular communication and migration applications. HLP was also found to be compatible with in situ printing of cell-laden hydrogel constructs. HLP makes shaping of soft hydrogels into 3D multiscale functional devices possible.

A hybrid laser printing (HLP) technology that utilizes ultrafast laser in sequential additive-subtractive modes to create 3D hydrogel constructs. The approach involves the synergistic use of additive crosslinking and subtractive ablation processes that are conventionally mutually exclusive. HLP can be operated at virtually any penetration depth and allow fabrication of multi-layer hydrogel constructs at micrometer resolution. HLP was used to print ready-to-use functional chips using commonly used hydrogels for potential cellular communication and migration applications. HLP was also found to be compatible with in situ printing of cell-laden hydrogel constructs. HLP makes shaping of soft hydrogels into 3D multiscale functional devices possible.

A wavelength conversion system comprising a transport system for a laser beam comprising: a circular polarization laser beam; an articulated arm comprising a mirror at each of its joints, arranged at 45° with respect to said laser beam; each of said mirrors having a phase shift between the reflected components of less than 10°; means for converting said laser beam from circular polarization to linear polarization and providing a linear polarization output laser beam; a non-linear converter for converting the wavelength of said output laser beam to linear polarization.

A wavelength conversion system comprising a transport system for a laser beam comprising: a circular polarization laser beam; an articulated arm comprising a mirror at each of its joints, arranged at 45° with respect to said laser beam; each of said mirrors having a phase shift between the reflected components of less than 10°; means for converting said laser beam from circular polarization to linear polarization and providing a linear polarization output laser beam; a non-linear converter for converting the wavelength of said output laser beam to linear polarization.

A method, apparatus, and system for non-linear optical process. A first light of a first wavelength is routed in a first loop in a main nonlinear optical waveguide. The first loop has a first length for the first light of the first wavelength. A second light of a second wavelength is routed in a second loop that includes portions of the main nonlinear optical waveguide and a first extension optical waveguide. The second loop has a second length for the second light of the second wavelength. A third light of a third wavelength is routed in a third loop that include portions of the main nonlinear optical waveguide and a second extension optical waveguide. The third loop has a third length for the third light of the third wavelength.