An illumination intensity correction device can specify an illumination intensity over an illumination field of a lithographic projection exposure apparatus. The correction device has a plurality of rod-shaped individual stops arranged next to one another. A displacement drive can displace at least some of the individual stops at least along their respective rod axis. Free ends of the individual stops are individually displaceable using the displacement drive into a specified displacement position to specify an intensity correction of an illumination of the illumination field. The intensity correction acts along a correction dimension transverse with respect to the rod axes.

A camera module includes: a lens module disposed in a housing and a stop module coupled to the lens module. The stop module includes apertures having different diameters from each other so as to selectively change an amount of light incident on the lens module, a magnet portion to select any one of the apertures by movement of the magnet portion, and a coil disposed on the housing facing the magnet portion to move the magnet portion.

A camera module includes: a lens module disposed in a housing and a stop module coupled to the lens module. The stop module includes apertures having different diameters from each other so as to selectively change an amount of light incident on the lens module, a magnet portion to select any one of the apertures by movement of the magnet portion, and a coil disposed on the housing facing the magnet portion to move the magnet portion.

A camera module includes a housing having a lens module, an aperture module provided above the lens module and including blades that form incident holes having different sizes in multiple stages or successively, a moving part configured to linearly reciprocate to drive the blades, including a driving magnet facing a driving coil, a position sensor configured to sense a position of the moving part according to interaction with the driving magnet, and a controller configured to receive a signal from the position sensor and confirm or correct the position of the moving part.

The present disclosure relates to an aperture unit having an optical axis. The aperture unit includes a fixed portion, a movable portion, a first blade and a driving component. The movable portion is movably connected to the fixed portion, the first blade movably connects to the movable portion and the fixed portion, and the driving component connects to the movable portion to move the movable portion relative to the fixed portion in a first moving dimension. When the movable portion is moved relative to the fixed portion in the first moving dimension, the first blade is driven by the movable portion to move relative to the fixed portion in a second moving dimension, and the first moving dimension and the second moving dimension are different.

An illumination intensity correction device can specify an illumination intensity over an illumination field of a lithographic projection exposure apparatus. The correction device has a plurality of rod-shaped individual stops arranged next to one another. A displacement drive can displace at least some of the individual stops at least along their respective rod axis. Free ends of the individual stops are individually displaceable using the displacement drive into a specified displacement position to specify an intensity correction of an illumination of the illumination field. The intensity correction acts along a correction dimension transverse with respect to the rod axes.

A camera module includes a variable aperture module and a lens module. The variable aperture module includes at least one aperture piece and a radial propulsion device. The lens module includes a lens assembly and an axial propulsion device. The axial propulsion device is configured to drive the lens assembly along an axial direction. The radial propulsion device is configured to propel the aperture piece in a radial direction approaching a central axis of the lens assembly, such that a portion of the aperture piece enters the lens assembly through an opening defined by the wall of the lens barrel. The radial propulsion device is configured to retract the aperture piece in a radial direction away from the central axis of the lens assembly, such that the portion of the aperture piece leaving the lens assembly through the opening defined by the wall of the lens barrel.

A lens device includes an imaging optical system and an optical member. The optical member is disposed near a pupil of the imaging optical system in a state where an optical axis of the optical member coincides with an optical axis of the imaging optical system. The optical member includes a frame that includes a plurality of aperture regions, a plurality of optical filters that are disposed in at least one of the plurality of aperture regions and include two or more optical filters transmitting light having at least some wavelength ranges different from each other, and a plurality of polarizing filters that are disposed in at least one of the plurality of aperture regions and have different polarization directions. The lens barrel has a slit, and the optical member is insertable into and removable from the imaging optical system through the slit.

A lens device includes an imaging optical system and an optical member. The optical member is disposed near a pupil of the imaging optical system in a state where an optical axis of the optical member coincides with an optical axis of the imaging optical system. The optical member includes a frame that includes a plurality of aperture regions, a plurality of optical filters that are disposed in at least one of the plurality of aperture regions and include two or more optical filters transmitting light having at least some wavelength ranges different from each other, and a plurality of polarizing filters that are disposed in at least one of the plurality of aperture regions and have different polarization directions. The lens barrel has a slit, and the optical member is insertable into and removable from the imaging optical system through the slit.

A camera module is provided. The camera module includes a housing, a lens assembly received in the housing and including at least one lens, an aperture including an aperture blade having an opening for adjusting an amount of external light incident on the at least one lens and a rotary shaft formed on a side of the aperture blade, in which the rotary shaft is coupled to the lens assembly such that the aperture blade is rotated about the rotary shaft, a magnet disposed on the aperture so as to be adjacent to the rotary shaft, at least one coil disposed on one surface of the housing so as to face the magnet, control circuitry that rotates the aperture using the coil, and a lens driving unit that moves the lens assembly in an optical axis direction of the lens.