A substrate holder for a lithographic apparatus has a main body having a thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls to support a substrate are formed on the thin-film stack or in apertures of the thin-film stack.

Build material handling unit (2) for a powder module (3) for an apparatus for additively manufacturing three-dimensional objects, which apparatus is adapted to successively layerwise selectively irradiate and consolidate layers of a build material (4) which can be consolidated by means of an energy source, wherein the build material handling unit (2) is coupled or can be coupled with a powder module (3), wherein the build material handling unit (2) is adapted to level and/or compact a volume of build material (4) arranged inside a powder chamber (5) of the powder module (3) by controlling the gas pressure inside the powder chamber (5).

A system for manufacturing a three-dimensional article includes a controller. The controller is configured to: (a) receive an input file defining a solid body; (b) slice the solid body into horizontal slices; (c) analyze the sliced body to identify downward-facing slice regions, a downward-facing slice region intersects with a downward-facing surface of the solid body; (d) for the individual slices, define a contour region to span a Boolean union between a default lateral peripheral contour and the downward-facing slice region; and (e) for the individual slices, define a hatch region that spans a Boolean difference between the slice and the contour region.

A system and method of additively manufacturing a part including electrically conductive or static dissipating fluorine-containing polymers. The method includes depositing fluorine-containing polymer additive manufacturing material onto a build platform, selectively cross-linking portions of the deposited additive manufacturing material, and curing the selectively cross-linked portions such that the part is at least one of electrically conductive and static dissipating.

A substrate holder for a lithographic apparatus has a main body having a thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls to support a substrate are formed on the thin-film stack or in apertures of the thin-film stack.

Disclosed are a photomask, an exposure apparatus, and a method of fabricating a three-dimensional semiconductor memory device using the same. The photomask may include a mask substrate, a first mask pattern on the mask substrate, and an optical path modulation substrate. The optical path modulation substrate may include a first region on a portion of the first mask pattern, and a second region on another portion of the first mask pattern. The second region has a thickness that is less than a thickness of the first region.

A spatial light modulator outputs modulated light including: modulated first light when the spatial light modulator receives first light; and modulated second light when the spatial light modulator receives second light. Projection optics project the modulated light onto: a first pixel region when a component or the spatial light modulator has a first position; and a second pixel region when the component or the spatial light modulator has a second position. The first and second pixel regions partially overlap. A pixel shifter moves the component or the spatial light modulator between: the first position when the spatial light modulator outputs the modulated first light; and the second position when the spatial light modulator outputs the modulated second light.

A three dimensional printing system includes a vertical support, a support plate, a resin vessel, a fluid spill containment vessel, and a light engine. The support plate is affixed to the vertical support at a proximal end. The support plate has an inner surface defining a first central opening. The resin vessel is supported above the support plate and has an inner edges surrounding a second central opening. The resin vessel includes a transparent sheet that closes the second central opening. The fluid spill containment vessel is supported below the support plate and includes a transparent window. The light engine is supported below the fluid spill containment vessel. The first central opening, the second central opening, and the window laterally overlap to provide an optical path whereby the light engine can project light upwardly to a build plane in the resin vessel.

A system and method of additively manufacturing a part including electrically conductive or static dissipating fluorine-containing polymers. The method includes depositing fluorine-containing polymer additive manufacturing material onto a build platform, selectively cross-linking portions of the deposited additive manufacturing material, and curing the selectively cross-linked portions such that the part is at least one of electrically conductive and static dissipating.

An optical system and a method for producing it is disclosed. The optical system has at least two separate optical components and an optical connection between them. In the inventive method, first and second optical component are provided, each having respective beam profiles. An arrangement of the first and second optical components and the form and target position of at least one beam-shaping element are specified. The beam-shaping element is produced using a three-dimensional direct-writing lithography method in situ at the target position to thereby obtain an optical component supplemented by the beam-shaping element. The supplemented optical component is placed and fixed on common base plate to thereby obtain the optical system. The optical systems produced with the present method can be used in optical data transfer, measurement technology and sensors, life sciences and medical technology, or optical signal processing.