A low-cost digital holography microscope (DHM) that is capable of performing inspection at high speed while accurately inspecting an inspection object at high resolution, an inspection method using the DHM, and a method of manufacturing a semiconductor device by using the DHM are provided. The DHM includes: a light source configured to generate and output light; a beam splitter configured to cause the light to be incident on an inspection object and output reflected light from the inspection object; and a detector configured to detect the reflected light, wherein, when the reflected light includes interference light, the detector generates a hologram of the interference light, and wherein no lens is present in a path from the light source to the detector.

The invention discloses a digital laser holography-based rapid lens center offset detection device, which relates to the technical field of lens detection and includes a spherical wave emission device, a reticle, a lens to be detected, an image sensor and a computer. The device is simple and stable in structure, and a complex optical receiving system and mechanical scanning are avoided. A detection method is high in efficiency and measurement accuracy, a process is simple, and a lens with an infinitely great focal length may be detected.

Provided are an improved holographic reconstruction apparatus and method. A holographic reconstruction method includes: obtaining an object hologram of a measurement target object; extracting reference light information from the obtained object hologram; calculating a wavenumber vector constant of the extracted reference light information, and generating digital reference light by calculating a compensation term of the reference light information by using the calculated wavenumber vector constant; extracting curvature aberration information from the object hologram, and then generating digital curvature in which a curvature aberration is compensated for; calculating a compensated object hologram by multiplying the compensation term of the reference light information by the obtained object hologram; extracting phase information of the compensated object hologram; and reconstructing 3-dimensional (3D) shape information and quantitative thickness information of the measurement target object by calculating the quantitative thickness information of the measurement target object by using the extracted phase information of the compensated object hologram.

A method of calibration of a device for analyzing at least one element present in a sample, said device including: a detection assembly configured to acquire an image formed by the interference between a light source and said sample; and digital processing means configured to detect a digital position of at least one element in said sample based on said acquired image; said calibration method including the implementation of a plurality of predetermined displacements of said sample with respect to said detection assembly and, for all of said displacements, the detection of a digital position of a same element to determine the digital position and the real position matching model according to the predetermined displacements and to the digital positions of said element after each displacement.

Methods of providing digital images of living tissue that may include: obtaining data of a propagating wavefield through living tissue; obtaining a reference digital image of the living tissue; selecting a holographic computational method of wavefield imaging; selecting a wavefield based on one or more parameters; calculating a sampling ratio by dividing a number of data samples in the data subset by a number of image samples in the data subset; decimating the data subset; generating a new digital image based on the selected holographic computational method of imaging, the decimated data subset, and parameters corresponding to the data subset; and determining a quantitative difference measure between the reference digital image and the new digital image based on the changing of one or more parameters selected from the group consisting of field sampling, imaging sampling, and image quality.

Disclosed are a method and apparatus of automatic optical inspection using scanning holography. The apparatus for automatic optical inspection using scanning holography includes: a hologram capturer that takes a hologram of an object existing on an objective plate using a scanning hologram camera; a depth position/rotation angle extractor that extracts a depth position and a rotation angle about an objective surface of the objective plate on the basis of the hologram or the detected monitoring-light; a rotated coordinate system generator that generates a rotated coordinate system corresponding to the objective surface using the depth position and the rotation angle; and a hologram restorer that obtains an image of the object by restoring the hologram in a plane formed in a depth direction of the rotated coordinate system.

A method for large volume holographic imaging is provided that may include determining projection operators within sub-volumes of a decomposed target volume, and determining a point aggregation operator for each sub-volume based on the projection operators. The method may further include receiving holographic field measurement data set captured for the target volume via the sensor array, generating a sub-volume interest value for each sub-volume by applying the holographic field measurement data set to each point aggregation operator, determining a sub-volume with a highest sub-volume interest value, and determining respective lower-tier sub-volume interest values for lower-tier sub-volumes of the sub-volume with the highest sub-volume interest value. The lower-tier sub-volumes may be defined by decomposing the sub-volume with the highest sub-volume interest value. Additionally, the method may include generating an image of the target volume based on the lower-tier sub-volume interest values.

A data acquisition apparatus includes an illumination device, a first beam splitter, a measurement unit, and a photodetector. A measurement optical path and a reference optical path are positioned between the illumination device and the photodetector. In the first beam splitter, light traveling in a first direction and light traveling in a second direction are generated from incident light. The measurement optical path is positioned in the first direction, the reference optical path is positioned in the second direction, and the measurement unit is disposed on the measurement optical path. In the optical surface of the first beam splitter, an incident position of light emitted from the illumination device changes with time, and the angle formed by light propagating through the measurement optical path and the optical axis of the measurement optical path changes with change in the incident position.

Portable common path shearing interferometry-based holographic microscopy systems. The system includes a light source, a sample holder, a microscope objective lens, a shear plate and an imaging device positioned in a common path shearing interferometry configuration. A housing is configured to receive and hold the shear plate and maintain a position of the shear plate relative to the microscope objective lens.

Disclosed are optical interrogation apparatus that can produce lens-free images using an optoelectronic sensor array to generate a holographic image of sample objects, such as microorganisms in a sample. Also disclosed are methods of detecting and/or identifying microorganisms in a biological sample, such as microorganisms present in low levels. Also disclosed are methods of using systems to detect microorganisms in a biological sample, such as microorganisms present in low levels. In addition or as an alternative, the methods of using systems may identify microorganisms present in a sample and/or determine antimicrobial susceptibility of such microorganisms.