G05B11/14

Actuator Apparatus, Electronic Device, And Control Method
20180321643 · 2018-11-08 ·

An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.

METHOD FOR CONTROLLING A SYSTEM AND SYSTEM

A method for controlling a system having measuring devices includes receiving a request to determine a desired measured value by a controller of the system, creating, by the controller, a proposal as to which of the measuring devices is suitable for determining the specific measured value, and outputting the established proposal to a user of the system by the controller. A system is disclosed including the measuring devices.

METHOD FOR CONTROLLING A SYSTEM AND SYSTEM

A method for controlling a system having measuring devices includes receiving a request to determine a desired measured value by a controller of the system, creating, by the controller, a proposal as to which of the measuring devices is suitable for determining the specific measured value, and outputting the established proposal to a user of the system by the controller. A system is disclosed including the measuring devices.

CONTROL SYSTEM, POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A control system configured to control a parameter of a dynamic system, wherein the parameter depends on an output signal. The control system comprises a set-point generator and a feedforward, wherein the set-point generator is arranged to provide a set-point signal to the feedforward. The feedforward is arranged to provide the output signal based on the set-point signal, wherein the feedforward is arranged to perform a non-linear operation on the set-point signal. The non-linear operation is based on a non-linear functional relationship between the output signal and the parameter.

CONTROL SYSTEM, POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A control system configured to control a parameter of a dynamic system, wherein the parameter depends on an output signal. The control system comprises a set-point generator and a feedforward, wherein the set-point generator is arranged to provide a set-point signal to the feedforward. The feedforward is arranged to provide the output signal based on the set-point signal, wherein the feedforward is arranged to perform a non-linear operation on the set-point signal. The non-linear operation is based on a non-linear functional relationship between the output signal and the parameter.

ANALYTIC-BASED ENERGY CONSUMPTION CONTROL

For analytic-based control of energy consumption, an appliance module receives an appliance identifier of an appliance connected to a power outlet, a selection module selects a power model for the power outlet based on the appliance identifier, the power model designating times that the power outlet is to be powered and times that the power outlet is to be unpowered, a usage module receives energy usage data for a power outlet, a presence module receives user presence data for a locale containing the power outlet, a update module modifies a power model for the power outlet based on the energy usage data and the user presence data, and a power control module selectively provides electrical power to the power outlet according to the power schedule.

Slewing-type working machine

A slewing-type working machine includes: a slewing motor which is a hydraulic motor for slewing; a variable-displacement hydraulic pump; a slewing operation device including an operation member; a control valve controlling the slewing motor based on an operation signal thereof; a pump regulator; a relief valve letting excess fluid to a tank; operation detectors detecting an operation direction and amount of the operation member; a motor rotational speed detector; and a controller controlling a discharge flow rate of the hydraulic pump. The controller obtains a deviation between a target rotational speed of the slewing motor obtained from a slewing operation amount and an actual rotational speed detected by the motor rotational speed detector, and controls the discharge flow rate to make the deviation closer to 0.

Slewing-type working machine

A slewing-type working machine includes: a slewing motor which is a hydraulic motor for slewing; a variable-displacement hydraulic pump; a slewing operation device including an operation member; a control valve controlling the slewing motor based on an operation signal thereof; a pump regulator; a relief valve letting excess fluid to a tank; operation detectors detecting an operation direction and amount of the operation member; a motor rotational speed detector; and a controller controlling a discharge flow rate of the hydraulic pump. The controller obtains a deviation between a target rotational speed of the slewing motor obtained from a slewing operation amount and an actual rotational speed detected by the motor rotational speed detector, and controls the discharge flow rate to make the deviation closer to 0.