Self-cleaning electrochemical cells, systems including self-cleaning electrochemical cells, and methods of operating self-cleaning electrochemical cells are disclosed. The self-cleaning electrochemical cell can include a plurality of concentric electrodes disposed in a housing, for example, a cathode and an anode, a fluid channel defined between the concentric electrodes, a separator residing between the concentric electrodes, first and second end caps coupled to respective ends of the housing, and an inlet cone. The separators may be configured to localize the electrodes and dimensioned to minimize a zone of reduced velocity occurring downstream from the separator. The end caps and inlet cone may be dimensioned to maintain fully developed flow and minimize pressure drop across the electrochemical cell.

A substrate storing container includes a container main body, a lid body removably attached to a container main body opening portion and able to close the container main body opening portion, a ventilation passage which enables a substrate storing space and a space outside the container main body to communicate with each other, a gas ejecting nozzle portion having a plurality of opening portions through which a gas flowing into the ventilation passage is supplied into the substrate storing space, and a gas flow rate uniformizing unit which enables the gas to flow out through the plurality of opening portions at a uniform flow rate.

Self-cleaning electrochemical cells, systems including self-cleaning electrochemical cells, and methods of operating self-cleaning electrochemical cells are disclosed. The self-cleaning electrochemical cell can include a plurality of concentric electrodes disposed in a housing, for example, a cathode and an anode, a fluid channel defined between the concentric electrodes, a separator residing between the concentric electrodes, first and second end caps coupled to respective ends of the housing, and an inlet cone. The separators may be configured to localize the electrodes and dimensioned to minimize a zone of reduced velocity occurring downstream from the separator. The end caps and inlet cone may be dimensioned to maintain fully developed flow and minimize pressure drop across the electrochemical cell.

A metering tube assembly for regulating flow of a fluid is disclosed. The metering tube assembly can include a fluid inlet, a fluid outlet, and a plurality of stacked metering plates located between the fluid inlet and the fluid outlet, each of the plurality of stacked metering plates defining a fluid passageway having a length greater than a thickness of the metering plate, wherein the stacked metering plates are arranged such that a fluid flowing through the metering plates flows sequentially through the fluid passageways of the metering plates.

A throttle valve is adapted for use in a pneumatic tool. The throttle valve includes a valve body and a filling unit. The valve body has a passage having an entrance section that is formed in one end surface of the valve body, and an exit section that is formed in another end surface of the valve body and that is adapted to be connected directly to a flow path unit of the pneumatic tool. The filling unit is disposed in the passage and cooperatively defines with the valve body a gap, such that the gas flows into the gap via the entrance section of the passage, and flows out of the gap via the exit section of the passage.

A fluid flow restrictor device for controlling fluid flow at a connection between ducts may include a restrictor device body that is partially or fully inserted into and disposed within one of the ducts and an outboard restrictor device flange extending radially outward at an outboard end of the restrictor device body and having an outboard flange outer diameter that is greater than an inner diameter of the ducts so that the restrictor device body or the outboard restrictor device flange is engaged by an open end surface of the duct to prevent full insertion of the fluid flow restrictor device into the duct. A body inner surface defines a restrictor opening through the restrictor device body that can be varied to achieve desired fluid flow characteristics at the connection.

A lubrication system for a planetary gear comprising a sun gear rotationally fixedly arranged on a first shaft, a number of planet gears rotatably supported by planet gear bearings and a planet gear carrier rotationally fixedly arranged on a second shaft. The lubrication system comprises a lubrication passage directing lubricant from one of the shafts to the planet gear bearings. The lubrication passage comprises a first passage part extending through the planet gear carrier from an inlet opening to a first outlet opening. The first passage part further comprises a second outlet opening adapted to direct lubricant to an engagement area between the sun gear and the planet gears. The second outlet opening is located at a shorter radial distance from a rotation axis of the sun gear than the first outlet opening and a flow restrictor is arranged in the first passage part between the first and second openings.

A thermal relief device (1) is described comprising a housing (2) having an inlet (3) and an outlet (4) connected by a relief channel (5). Such a thermal relief device should have a simple construction. To this end a microporous structure (10) is arranged between inlet (3) and outlet (4).

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. In one embodiment, a method of calibrating an apparatus for controlling gas flow is disclosed. Specifically, the apparatus may be calibrated on installation using a two-step process of measuring the volume of gas box downstream from the apparatus by flowing nitrogen gas into the gas box and measuring the resulting temperature and rate of pressure rise. Using the computed volume of the gas box, a sweep of several mass flow rates may be performed using the process gas and the gas map for the process gas. The apparatus is calibrated based on the measured temperature and pressure values, which allow calculation of the actual mass flow rate for the process gas as compared with the commanded mass flow rates.

Provided is a PCV valve assembly that includes a fluidic geometry that allows for the flow of combustion fluid/gas to flow between an inlet and an outlet and switch between two modes of operation, (i) a radial or high flow mode, and (ii) a tangential or low flow mode, as dictated during the operation of the engine. At low vacuums, the fluidic equipped PCV valve assembly has been tuned to operate in the radial mode producing high flow rates due to low flow resistance. As vacuum increases, the PCV valve assembly is tuned to automatically switch modes. This may be enabled due to the shape of the fluidic geometry and the bypass channel which is adapted to vary the amount of flow between a first and a second control ports. The bypass channel allows the geometric fluidic pattern to switch between the high flow mode and the low flow mode.