An equipment front end module. An equipment front end module (EFEM) includes a flow modification feature projecting away from an interior wall of the equipment front end module and extending into an interior of the equipment front end module (EFEM) at an angle. The flow modification feature modifies the flow of gas flowing from a top to a bottom of the EFEM by deflecting gas flow away and/or laminarizing gas flow across an opening of the EFEM, which may improve the purge performance of a wafer carrier docked at the EFEM.

An oil return mechanism includes a base, a control switch, a first blocking ball mounted in the base, an elastic member mounted between the first blocking ball and the base. The base has a liquid storing cavity, a liquid returning cavity, a communicating cavity, a first communicating opening communicating between the liquid returning cavity and the communicating cavity, and a second commit eating opening communicating between the communicating cavity and the liquid storing cavity. The present invention can regulate a speed of a fluid flowing from the liquid returning cavity to the communicating cavity, and has the advantages of simple structure and great reduction of cost.

The invention relates to a gas inlet system for providing gas into an analytical apparatus, comprising at least a first and a second flow restriction that are arranged on a gas inlet line, a gas flow control line connected to the gas inlet line, a gas flow controller on the gas control line, and valves for controlling gas flow in the gas inlet line and the gas control line. Also provided is a method of controlling gas flow into an analytical apparatus.

A siphon assembly includes an ascent conduit having a conduit inlet, a descent conduit having a conduit outlet, and a flow passage through the ascent conduit and the descent conduit. The flow passage connects the conduit inlet and the conduit outlet via a siphon crest. The siphon assembly also includes a filter arranged to filter a siphonic flow towards the siphon crest.