A multi-stage gas pressure reduction system includes a first pressure regulator, the first pressure regulator positioned to receive gas at supply pressure from an inlet and to output gas at a first intermediate pressure. The multi-stage gas pressure regulation system includes a second pressure regulator, the second pressure regulator positioned to receive gas at the first intermediate pressure from the first pressure regulator and to output gas at a second intermediate pressure. The multi-stage gas pressure regulations system includes a third pressure regulator, the third pressure regulator positioned to receive gas at the second intermediate pressure from the second pressure regulator and to output gas at a third intermediate pressure to an outlet.

Balanced plug assemblies and pressure regulators having balanced plug assemblies are described herein. A pressure regulator disclosed herein includes a device body defining a fluid passageway between an inlet and an outlet. The device body defines a channel between the fluid passageway and a pressure sense chamber. The pressure regulator includes a seat in the fluid passageway, a stem having a flange, and a plug coupled to the stem. The pressure regulator also includes a stem guide disposed in the channel of the device body. The flange of the stem disposed in a balance chamber of the stem guide and divides the balance chamber into a first balance chamber portion and a second balance chamber portion. The stem guide at least partially forms a balance passage that fluidly couples the pressure sense chamber and the second balance chamber portion.

A pressure regulator has a valve tube assembly, a gas-input assembly, a first regulating assembly and a second regulating assembly. The gas storage device has a storage unit and the pressure regulator. By the first and the second regulating assemblies, the effect of adjusting down the gas pressure is achieved to maintain the safety of use. The pressure regulator is partially embedded in the gas storage unit to reduce the overall volume of the gas storage device. However, the high-pressure piston chamber of the valve tube assembly communicates with the outside of the gas storage unit through the high-pressure gas channel to maintain the normal operation of the elastic element in the high-pressure piston chamber.

A pressure regulator has a valve tube assembly, a gas-input assembly, a first regulating assembly and a second regulating assembly. The gas storage device has a storage unit and the pressure regulator. By the first and the second regulating assemblies, the effect of adjusting down the gas pressure is achieved to maintain the safety of use. The pressure regulator is partially embedded in the gas storage unit to reduce the overall volume of the gas storage device. However, the high-pressure piston chamber of the valve tube assembly communicates with the outside of the gas storage unit through the high-pressure gas channel to maintain the normal operation of the elastic element in the high-pressure piston chamber.

An apparatus for controlling precursor flow. The apparatus may include a processor; and a memory unit coupled to the processor, including a flux control routine. The flux control routine may be operative on the processor to monitor the precursor flow and may include a flux calculation processor to determine a precursor flux value based upon a change in detected signal intensity received from a cell of a gas delivery system to deliver a precursor.

A pressure regulator includes a downstream body delimiting a low pressure chamber; an upstream body delimiting a high pressure chamber and carrying an expansion seat; a movable piston having an inner channel having an upper end forming a discharging seat and a lower end opening onto an intermediate chamber connected to a leakage circuit; a tubular valve rod passing through the inner channel of the piston and an inner channel of the upstream body, having an upper end forming a discharging valve and a lower end forming a regulating flap suitable for bearing on the expansion seat; a first biasing member compressed between the piston and the upstream body by biasing the piston towards the downstream body; and a second biasing member compressed between the piston and a plate secured to the valve rod, biasing the rod in the direction of pressing the discharging valve against the discharging seat.

An apparatus for controlling precursor flow. The apparatus may include a processor; and a memory unit coupled to the processor, including a flux control routine. The flux control routine may be operative on the processor to monitor the precursor flow and may include a flux calculation processor to determine a precursor flux value based upon a change in detected signal intensity received from a cell of a gas delivery system to deliver a precursor.

A gas regulator includes a valve chamber body that houses two valves of the regulator. Valve elements that move to open and close the two valves are received via a same opening into the valve chamber body, which is closed by a plug. The plug can define a first valve seat as well as a piercing element used to pierce a compressed gas cylinder. A retainer can hold a gasket at a valve seat as well as provide a bore or other support for a valve element and valve element spring.

Regulator assemblies can be tested using test fluids selected to have a molecular weight about that of a selected fluid to be dispensed from a fluid storage and delivery vessel including the regulator assembly. The test fluid can be a single gas or a mixture. The test fluid can have a molecular weight of between 80% and 110% of the molecular weight of the selected fluid dispensed from the fluid storage and delivery vessel. Regulator assemblies tested in this manner can pass evaluation when they show fewer than two spikes on the initiation of flow of the test gas. These regulator assemblies can be installed into fluid storage and delivery vessels, particularly for storage and delivery of pressurized fluids.

Balanced plug assemblies and pressure regulators having balanced plug assemblies are described herein. A pressure regulator disclosed herein includes a device body defining a fluid passageway between an inlet and an outlet. The device body defines a channel between the fluid passageway and a pressure sense chamber. The pressure regulator includes a seat in the fluid passageway, a stem having a flange, and a plug coupled to the stem. The pressure regulator also includes a stem guide disposed in the channel of the device body. The flange of the stem disposed in a balance chamber of the stem guide and divides the balance chamber into a first balance chamber portion and a second balance chamber portion. The stem guide at least partially forms a balance passage that fluidly couples the pressure sense chamber and the second balance chamber portion.