A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.

A temperature control system is disclosed. The temperature control system includes a temperature monitor system. The temperature monitor system includes an anti-drift system having first and second amplification stages and first and second filter stages. At least one of the first amplification stage, the second amplification stage, the first filter stage, and the second filter stage has an active feedback circuit.

A temperature control system is disclosed. The temperature control system includes a temperature monitor system. The temperature monitor system includes an anti-drift system having first and second amplification stages and first and second filter stages. At least one of the first amplification stage, the second amplification stage, the first filter stage, and the second filter stage has an active feedback circuit.

A circuit device includes an A/D conversion section adapted to output temperature detection data, a temperature compensation section adapted to perform a temperature compensation process of the oscillation frequency based on the temperature detection data, and an oscillation signal generation circuit adapted to generate an oscillation signal using frequency control data from the temperature compensation section and a resonator. The frequency control data from the temperature compensation section is input to the oscillation signal generation circuit during a normal operation, and during a period other than the normal operation, data generated by a PLL circuit for comparing an input signal based on an output signal of the oscillation signal generation circuit and a reference signal with each other is input to the oscillation signal generation circuit.

Technologies for allocating resources of a set of managed nodes to workloads based on resource utilization phase residencies include an orchestrator server to receive resource allocation objective data and determine an assignment of a set of workloads among the managed nodes. The orchestrator server is further to receive telemetry data from the managed nodes, determine, as a function of the telemetry data, phase residency data, determine, as a function of at least the phase residency data and the resource allocation objective data, an adjustment to the assignment of the workloads to increase an achievement of at least one of the resource allocation objectives without decreasing the achievement of any of the other resource allocation objectives, and apply the adjustment to the assignments of the workloads among the managed nodes as the workloads are performed.

Examples may include sleds for a rack in a data center including physical compute resources and memory for the physical compute resources. The memory can be disaggregated, or organized into first level and second level memory. A first sled can comprise the physical compute resources and a first set of physical memory resources while a second sled can comprise a second set of physical memory resources. The first set of physical memory resources can be coupled to the physical compute resources via a local interface while the second set of physical memory resources can be coupled to the physical compute resources via a fabric.

A circuit device includes a D/A converter, a comparator that compares a temperature detection voltage from a temperature sensor unit with a D/A conversion voltage from the D/A converter, and a processing circuit that executes a determination process based on a comparison result from the comparator, and obtains temperature detection data as a result of A/D conversion of the temperature detection voltage, in which, the processing circuit determines the temperature detection data so that a change in the temperature detection data at a second output timing following a first output timing with respect to the temperature detection data at the first output timing is equal to or less than kLSB.

A method for providing a thermal feedback, performed by a feedback device. The feedback device outputs the thermal feedback, by transmitting a heat generated by a thermoelectric element, to a user via a contact surface contacting with a body part of the user. The method may include obtaining a feedback start message including a type of the thermal feedback, and when the type of the thermal feedback is a thermal grill feedback, outputting the thermal grill feedback by performing a thermal grill operation in which a heat generating operation and a heat absorbing operation is combined. The outputting of the thermal grill feedback may include applying a forward power to the thermoelectric element to perform the heat generating operation, applying a reverse power of which a current direction is opposite to the forward power to the thermoelectric element to perform the heat absorbing operation, and repeating the applying the forward power and the applying the reverse power alternatively.

A method for providing a thermal feedback, performed by a feedback device. The feedback device outputs the thermal feedback, by transmitting a heat generated by a thermoelectric element, to a user via a contact surface contacting with a body part of the user. The method may include obtaining a feedback start message including a type of the thermal feedback, and when the type of the thermal feedback is a thermal grill feedback, outputting the thermal grill feedback by performing a thermal grill operation in which a heat generating operation and a heat absorbing operation is combined. The outputting of the thermal grill feedback may include applying a forward power to the thermoelectric element to perform the heat generating operation, applying a reverse power of which a current direction is opposite to the forward power to the thermoelectric element to perform the heat absorbing operation, and repeating the applying the forward power and the applying the reverse power alternatively.

A circuit device includes an A/D converter that converts a temperature detection voltage from a temperature sensor unit to temperature detection data, and a digital signal processing circuit that executes a temperature compensation process based on the temperature detection data. The A/D converter, in an activation period, may execute a first A/D conversion process to obtain an initial value of the temperature detection data, and in a normal operation period, may execute a second A/D conversion process based on the initial value to obtain the temperature detection data.