A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.

A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.

Systems and methods for determining an offset of a position of a focal point of an X-ray tube is provided. The methods may include obtaining at least one parameter associated with an X-ray tube during a scan of a subject and obtaining a position of a focal point of the X-ray tube. The methods may further include determining a target offset of the position of the focal point based on the at least one parameter and a target relationship between a plurality of reference parameters associated with the X-ray tube and a plurality of reference offsets of reference positions of the focal point. The methods may further include causing, based on the target offset, a correction on the position of the focal point of the X-ray tube.

Systems and methods for determining an offset of a position of a focal point of an X-ray tube is provided. The methods may include obtaining at least one parameter associated with an X-ray tube during a scan of a subject and obtaining a position of a focal point of the X-ray tube. The methods may further include determining a target offset of the position of the focal point based on the at least one parameter and a target relationship between a plurality of reference parameters associated with the X-ray tube and a plurality of reference offsets of reference positions of the focal point. The methods may further include causing, based on the target offset, a correction on the position of the focal point of the X-ray tube.

The invention comprises a method and apparatus for imaging a tumor of a patient with positively charged particles, comprising the steps of: (1) accelerating the positively charged particles to a relativistic energy using an accelerator; (2) transporting the positively charged particles from the accelerator, through a beam transport system, through an output nozzle of the beam transport system, and through the patient to yield a residual particle beam comprising a residual relativistic velocity; (3) determining the residual relativistic velocity using a first time of flight detector and a second time of flight detector separated by a separation distance; and (4) generating a positively charged particle computed tomography image using the residual relativistic velocity, where individual particles in the residual particle beam comprise a second mass of at least 1.02 times that of a first mass of the individual particles prior to the step of accelerating.

The invention comprises a method and apparatus for imaging a tumor of a patient with positively charged particles, comprising the steps of: (1) accelerating the positively charged particles to a relativistic energy using an accelerator; (2) transporting the positively charged particles from the accelerator, through a beam transport system, through an output nozzle of the beam transport system, and through the patient to yield a residual particle beam comprising a residual relativistic velocity; (3) determining the residual relativistic velocity using a first time of flight detector and a second time of flight detector separated by a separation distance; and (4) generating a positively charged particle computed tomography image using the residual relativistic velocity, where individual particles in the residual particle beam comprise a second mass of at least 1.02 times that of a first mass of the individual particles prior to the step of accelerating.

An object of the invention is to provide a charged particle beam apparatus which improves an efficiency of a beam scan at the time of performing a focus adjustment and a measurement or an inspection based on a signal obtained by the beam scan. In order to achieve the object described above, there is proposed a charged particle beam apparatus including a lens which focuses a charged particle beam on a sample, wherein focus evaluation values of a plurality of images are calculated which are obtained under different focus conditions by the lens, the images which are obtained by beam radiation with different focus conditions and in which a predetermined condition is satisfied are subject to a processing according to the focus evaluation values, and an integrated image is generated by integrating the processed images subject to the processing according to the focus evaluation values.

An object of the invention is to provide a charged particle beam apparatus which improves an efficiency of a beam scan at the time of performing a focus adjustment and a measurement or an inspection based on a signal obtained by the beam scan. In order to achieve the object described above, there is proposed a charged particle beam apparatus including a lens which focuses a charged particle beam on a sample, wherein focus evaluation values of a plurality of images are calculated which are obtained under different focus conditions by the lens, the images which are obtained by beam radiation with different focus conditions and in which a predetermined condition is satisfied are subject to a processing according to the focus evaluation values, and an integrated image is generated by integrating the processed images subject to the processing according to the focus evaluation values.

The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.

The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.