An optical apparatus is provided for manipulating light from x-ray sources (e.g., free electron lasers). In some embodiments, the optical apparatus includes a first capillary optic having a first longitudinal axis and a second capillary optic having a second longitudinal axis that is angled with respect to the first longitudinal axis. The second capillary optic is positioned to receive light directly from the first capillary optic.

A metal grid includes: a valve metal plate which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the valve metal plate; and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. Further, a production method for a metal grid includes: a step of bending a principal surface of a valve metal plate including the principal surface; a step of forming an anodic oxide film on the principal surface of the valve metal plate; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

An X-ray fluorescence analyzer includes an X-ray tube for emitting incident X-rays in the direction of a first optical axis. A slurry handling unit is configured to maintain a constant distance between a sample of slurry and the X-ray tube. A first crystal diffractor is located in a first direction from the slurry handling unit and configured to separate a predefined first wavelength range from fluorescent X-rays that propagate into the first direction. The first crystal diffractor is configured to direct the fluorescent X-rays in the separated predefined first wavelength range to a first radiation detector. The first crystal diffractor includes a pyrolytic graphite crystal that has a diffractive surface, which is a simply connected surface. The first radiation detector is a solid-state semiconductor detector.

An X-ray fluorescence analyzer comprises an X-ray tube for emitting incident X-rays in the direction of a first optical axis. A slurry handling unit is configured to maintain a constant distance between a sample of slurry and the X-ray tube. A first crystal diffractor is located in a first direction from the slurry handling unit, and configured to separate a predefined first wavelength range from fluorescent X-rays that propagate into the first direction. It is configured to direct the fluorescent X-rays in the separated predefined first wavelength range to a first radiation detector. The input power rating of said X-ray tube is at least 400 watts. The first crystal diffractor comprises a pyrolytic graphite crystal. The optical path between said X-ray tube and the slurry handling unit is direct with no diffractor therebetween.

An X-ray fluorescence analyzer including an X-ray tube for emitting incident X-rays in the direction of a first optical axis. A slurry handling unit is configured to maintain a constant distance between a sample of slurry and the X-ray tube. A first crystal diffractor is located in a first direction from the slurry handling unit. The first crystal diffractor includes a first crystal and a first radiation detector configured to detect fluorescent X-rays diffracted by the first crystal at a first energy resolution. A second crystal diffractor is located in a second direction from the slurry handling unit. The second crystal diffractor includes a second crystal and a second radiation detector configured to detect fluorescent X-rays diffracted by the second crystal at a second energy resolution. The first crystal is a pyrolytic graphite crystal, the second crystal is of a material other than pyrolytic graphite, and the first and second crystal diffractors are configured to direct to their respective radiation detectors characteristic fluorescent radiation of a same element.

A metal grid includes: a member which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the member, and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. A production method for a metal grid includes: a step of forming a valve metal film on a principal surface of a member, a step of forming an anodic oxide film by performing an anodic oxidation treatment on the valve metal film while the principal surface is curved; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

An x-ray mirror optic includes a plurality of surface segments with quadric cross-sections having differing quadric parameters. The quadric cross-sections of the surface segments share a common axis and are configured to reflect x-rays in a plurality of reflections along a single optical axis or in a scattering plane defined as containing an incident x-ray and a corresponding reflected x-ray.

A method of manufacturing an integrated circuit (IC) device includes forming a photoresist layer on a substrate, and exposing the photoresist layer to light by using a photolithographic apparatus including a light generator. The light generator includes a chamber having a plasma generation space, an optical element in the chamber, and a debris shielding assembly between the optical element and the plasma generation space in the chamber, and the debris shielding assembly includes a protective film facing the optical element and being spaced apart from the optical element with a protective space therebetween, the protective space including an optical path, and a protective frame to support the protective film and to shield the protective space from the plasma generation space.

An X-ray lens arrangement for forming a radiation pattern as a focal track is disclosed. The pattern comprises at least one 3-dimensional focal track of radiation. The aforesaid lens arrangement has a main axis passing through intensity weighted centroids of the Xray source and the pattern. The lens arrangement includes at least one reflecting surface of continuously varying Rowland arcs. Each point belonging to the focal track is linked to each elemental point composing an emitting surface of said source by a corresponding Rowland arc.

An exemplary mounting structure can be provided for interferometric imaging and an interferometric imaging apparatus comprising same. The mounting structure comprises at least one curved surface for receiving an interferometric grating to rest thereon. The surface can be provided having a plurality of apertures, whereas that the grating when so received, covers at least one of the apertures.